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ULVAC CRYOGENICS INCORPORATED

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Содержание SA115-C

Страница 1: ...nsors the cryocooler falls under row 6 A 2 d 2 of the control list established by The Wassenaar Arrangement which is equal to row 10 2 of appended table 1 of Japan s Export Trade Control Order Custome...

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Страница 3: ...manual close at hand so that you can use for reference during operation If you purchased our other products and or optional devices with this product read relevant instruction manuals carefully Genera...

Страница 4: ...unsafe practices which could result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chem...

Страница 5: ...Instructions for the Electrical System 11 4 Installation 17 4 1 Conditions for Installation 17 4 2 Installation 18 5 Operation 22 5 1 Start Operation 22 5 2 Stop Operation 23 5 3 Checking Normal Oper...

Страница 6: ...IV ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 7: ...r repair or disposing Do not use this device in the corrosive gas atmosphere e g chloride It may result in injury or damaging devices Internal parts such as compressor motor or exhaust piping are in e...

Страница 8: ...charging adaptor for refrigerator maintenance 2 Before proceeding with disposal work remove the couplings of the adsorber to visually confirm that it has been depressurized Disposal Considerations The...

Страница 9: ...exterior b Oil leaks c Helium gas charge pressure The pressure gauge indicates the helium charge pressure of 1 9MPa at 20 C helium charge pressure may vary depending on the system configurations If t...

Страница 10: ...gas With purity of 99 999 or above Refrigerant filling pressure MPa 1 90 0 05 20 C Dimensions Height mm 484 Width mm 494 Depth mm 494 Weight kg 59 Safety Valve Setting MPa 2 84 3 24 Connec tion Refrig...

Страница 11: ...ally continue 2 HOUR METER HM The time counter indicates the total hours of operation of the compressor unit 3 SUPPLY PRESSURE Pressure meter When not in operation indicates the helium gas charge pres...

Страница 12: ...6 ULVAC CRYOGENICS INCORPORATED Figure 3 1 SA115 C Control and Connection Components NAME PLATE LABEL 484 460 5 5 58 426 494 85 259 70 100 391 381 167 167 66 8 5 160 59 59 376 60 494...

Страница 13: ...lium gas and oil in compressor unit SA115 C Figure 3 2 SA115 C Helium gas flow Helium Flow Oil Flow Oil Separator Pressure Regulator Refrigerant Low Pressure Switch Compressor Pressure Equalizing Sole...

Страница 14: ...ating oil 12 Low pressure regulator By pass valve to maintain the pressure of the low pressure helium gas above a certain level 13 High pressure regulator By pass valve to maintain the pressure of the...

Страница 15: ...ULVAC CRYOGENICS INCORPORATED 9 Figure 3 3 SA115 C Internal Components 1 18 12 22 23 3 2 4 11 21 13 6 7 5 14 10 15...

Страница 16: ...10 ULVAC CRYOGENICS INCORPORATED Figure 3 4 SA115 C Internal Components 9 8 17 19 20 24 16...

Страница 17: ...Terminal Board TB1 KTU15 J 600V 15A 4P 1 8 Thermostat 26G CS 74L120 120 C 2 9 Low Pressure Switch 63PL ACB 1AU3 OFF 0 098MPa 1 10 Reverse Phase Prevention Relay 47C QE 20N AC200V 1 11 Magnet Switch T...

Страница 18: ...12 ULVAC CRYOGENICS INCORPORATED Figure 3 5 SA115 C Internal Components 7...

Страница 19: ...ULVAC CRYOGENICS INCORPORATED 13 Figure 3 6 SA115 C Internal Components 8 9 15 16 11 12 14 13 10 17...

Страница 20: ...mote connector pin configuration Figure 3 7 Remote Connector Pins 3 3 3 Signal Connector The signal connector can be used to monitor conditions Table 1 7 shows the monitor sequence of the compressor u...

Страница 21: ...ray A L1 B L2 C L3 D GND Table 3 10 Coldhead Connectors Item Specifications Plug Connector Straight Made by Japan Aviation Electronics Industry Ltd JL04V 6A 18 10PE EB R Plug Connector Angle type Made...

Страница 22: ...sure drops due to some reasons such as the amount of helium gas inclusion is less than the specified amount Solenoid Valve Stabilize the helium pressure between the supply and return flexible hoses wh...

Страница 23: ...upply line are needed Power Source Make sure that the correct AC power source is supplied to the compressor For more information see Table 3 1 Compressor Unit SA115 C Specifications Room Temperature C...

Страница 24: ...plate 4 2 2 Install the Compressor Unit Check that the following installation conditions are met 1 Install the compressor unit on a smooth floor that is visually level 2 Be sure that all four casters...

Страница 25: ...2 and IEC60947 3 Install a circuit breaker in a place close to the compressor unit within 3m and can be easily accessed Do not install in a way that hinders easy operation Indicate that the circuit b...

Страница 26: ...m2 up to 30 m 3 5 mm2 Electric wiring Room temperature 38 C or less Metal tube PVC tube etc Voltage drop standard 2 Minimum thickness of power cable 2 mm2 21 m Distance up to 10 m 2 mm2 up to 20 m 2 m...

Страница 27: ...the female self sealing coupling of the high pressure piping outgoing piping to the refrigerator to the male self sealing coupling of the SUPPLY and screw the union nuts of the female self sealing cou...

Страница 28: ...ables are correctly connected To start the cryocooler system 1 Confirm that the pressure of the compressor unit is within the rated values 2 Turn the OPERATION switch to ON on the front panel of the c...

Страница 29: ...The ultimate temperature of the coldhead depends on the heat load or vacuum level of the vacuum chamber If the temperature is high and stable the total heat load for the coldhead may be too large Chec...

Страница 30: ...iability of cryocoolers It is requested to clean the heat exchanger at least once in a circumstance such as computer rooms The timing may vary depending on the ambient conditions of a compressor Clean...

Страница 31: ...d connect helium charging valve to the port 4 Connect the charging hose to the pressure regulator of the helium bottle 5 Connect the charging hose to the charging valve while releasing small amount of...

Страница 32: ...fications Component No Notes F1 F2 F3 Glass tube fuse 250VAC 3A MT4 3A For control circuits NOTES 1 When the helium gas pressure meter reads 0 MPa air may already present Contact our service departmen...

Страница 33: ...e 1 Loosen the cap of the fuse holder with a flathead screwdriver and remove the used fuse 2 Insert a new fuse into the fuse holder and fasten the cap as before Disconnect all the power supply to the...

Страница 34: ...E LOCAL switch to L or perform the correct remote operations Either the fuse is blown or disconnected Check if the inner fuse is OK If defective replace the fuse with a new one If the problem continue...

Страница 35: ...ar if blocked Secure the space to intake and exhaust air around the compressor unit In case the thermostat is activated due to the abnormal temperature it may take time to return to the normal conditi...

Страница 36: ...ntact us Compressor unit stops during operation Helium gas temperature is not in normal range A Abnormal temperature The flow rate of the cooling air is low B Lubricating oil of the compressor is decr...

Страница 37: ...1 Connectors attached 3 Remote Connector 1 For remote operation 4 Single Head Wrench 1 set For connecting helium gas lines 5 Instruction Manual 1 This book 8 2 Optional Parts Table 8 2 Optional Parts...

Страница 38: ...OTE VT WT PK EXTERNAL OPERATION VT BN 9 OR RD RD F1 3 B C DRIVE MOTOR FAN MOTOR MOTOR COMPRESSOR T S R 51 CM PK BN C PK BN CM 52 BL WT RD 47 C 3 4 6 1 2 SW2 L O C A L R E M O T E BN BN VT AL 4X 1 10 2...

Страница 39: ...cases the cost shall be your own expense even though the product is within the warranty period i Breakdowns due to improper storage or handling careless accident software or hardware design by the cus...

Страница 40: ...ENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under warranty 3 Repair period after production is discontinued ULVAC CR...

Страница 41: ...Chigasaki Kanagawa 253 0085 Japan Sales Tel 81 467 85 8884 Service Engineering Division Tel 81 467 85 9366 Fax 81 467 83 4838 ULVAC CRYOGENICS KOREA INC www ulvac cryo co kr 107 Hyeongoksandan ro Che...

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Страница 43: ...CORPORATED R 1 Revision History Date Revision No Contents 2017 07 27 2021 07 08 2017 07 2021JU01 First edition Table 3 4 3 8 3 10 Parts model name has been changed Table 3 1 has been modified Figure9...

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