Ulvac GP-1GRY Скачать руководство пользователя страница 1

No. 

SK00-7401-EI-004-06 

 

 
 
 

MODEL GP-1GRY 

 

( Pa/Torr ) 

 

PIRANI VACUUM GAUGE 

 

INSTRUCTION MANUAL 

 

 

 

This manual is for the following gauges. 

Serial Nos. T0001G and higher 

 
 

Read this manual before operation and keep it at your 
hand for immediate reference. 

 

 

ULVAC , Inc.

 

Содержание GP-1GRY

Страница 1: ...MODEL GP 1GRY Pa Torr PIRANI VACUUM GAUGE INSTRUCTION MANUAL This manual is for the following gauges Serial Nos T0001G and higher Read this manual before operation and keep it at your hand for immedia...

Страница 2: ......

Страница 3: ...fety symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of urgency of danger when...

Страница 4: ...FF the power before replacing a fuse Replacing a fuse with the power turned ON can cause electric shock Turn OFF power Whenever mounting the gauge unplug the power cable Before operating the gauge mak...

Страница 5: ...Disposal When discarding the vacuum gauge comply with your local regulations If the gauge was used in an environment that can cause hazards to human body have it disposed of by an authorized speciali...

Страница 6: ...ouching any terminal on the rear of the meter or if there is a possibility of touching it turn OFF the vacuum gauge power and the power applied to the setpoint output terminal Contact with the termina...

Страница 7: ...am 2 2 5 Change installation method to GP H Nov 7 2013 04 Change Safety symbol mark 1 2 Standard Accessories added 1 3 Add Measuring unit to Option 6 Change WARRANTY 7 Add CERTIFICATE OF DECONTAMINATI...

Страница 8: ...reliminary Operation 7 2 2 Installation 7 2 2 1 Installing the controller 7 2 2 2 Installing the meter 7 2 2 3 Installing the sensor head 8 2 2 4 Electrical connection 8 2 2 5 A sensor head installati...

Страница 9: ...t capacity Max AC125V 1A AC250V 0 5A DC30V 2A Min DC10 V 10 A Outside dimensions mm Controller 90W 140D 100H A type meter 100W 111D 100H Weight Controller 1000g A type meter 440g Measuring unit 35g GP...

Страница 10: ...f sensor head that are indicated on the measuring unit 1 3 3 Sensor head cable Sensor head cable 2 5 10 15 20 30 50 100m Weight kg 0 2 0 4 0 7 1 0 1 3 1 9 3 9 7 7 1 3 4 Others Test results certificate...

Страница 11: ...OVERVIEW 3 1 4 Description of Components Fig 1 Front panel of controller Meter connector Connect this connector to the meter incorporated in the controller...

Страница 12: ...d or if you want to change it use this ADJ potentiometer Adjustable range 0 to 20 mV with meter full scale Recorder output terminal Red terminal Black terminal Analog signal is outputted between two t...

Страница 13: ...er Pressure indicator Indicates pressure by needles Relay potentiometer Sets the meter relay L Relay potentiometer Sets the meter relay H Zero adjustment Adjust the meter needle to the zero position e...

Страница 14: ...output terminal Outputs setpoint H The recorder output is afloat from ground potential Always connect the recorder input to the recorder terminal by insulating it from ground If it is connected to GN...

Страница 15: ...turn OFF the power to the vacuum gauge Contact with the terminal to which the voltage 24 VDC is applied will cause electric shock if power is turned ON Ventilation Do not plug the air vents of the vac...

Страница 16: ...reful that the ambient temperature deviates considerably from the calibrating temperature about 25 C 2 Installing the sensor head Install the gauge in such a manner that the sensor head mounting openi...

Страница 17: ...Controller Sensor head cable 2 100m The sensor head cable is a connector same as the control side measuring unit side Measuring unit GP H WP 01 02 03 16 Measuring unit GP BH WP 04 05 WPB 10 Conversion...

Страница 18: ...ttached to GP H to a sensor head By the kind of the sensor head installation methods are different For sensor head WP 01 02 For sensor head WP 03 16 It is inserted a screw for fixation by the vent sid...

Страница 19: ...active gas or highly adsorptive gas its characteristics may change In such a case fill the chamber with nitrogen or inert gas with the sensor head energized with power and then evacuate it Repeat this...

Страница 20: ...ctive Between 5 and 100 of the full scale with the higher limit setting H red needle Between 0 and 95 of the full scale with the lower limit setting L green needle Meter relay cannot be set out of the...

Страница 21: ...o GND potential by mistake the meter will not indicate the correct value Also the vacuum gauge may be damaged Pa mV Torr mV 0 4 2 5 10 20 40 60 80 100 200 400 600 800 1000 2000 0 15 0 35 0 65 1 10 1 7...

Страница 22: ...OPERATING PROCEDURE 14 Fig 6 Pressure vs recorder output curve...

Страница 23: ...wer Before touching any terminal on the rear of the meter or if there is a possibility of touching it turn OFF the vacuum gauge power and the power applied to the setpoint output terminal Contact with...

Страница 24: ...is contaminated or its filament has worn out 1 Replace the sensor head Leak in the sensor head or a leak in the place where the sensor head is installed 1 If there is a leak in the sensor head replac...

Страница 25: ...after the pressure decreases Possible cause Corrective action The gauge has been exposed to high temperature and high humidity above the specification for long time 1 Use the gauge at condition as li...

Страница 26: ...equation A is a coefficient referred to as free molecule thermal conductivity m3 K 1 and its value varies with the type of gas is a coefficient that corrects the imperfectness of exchange of amount of...

Страница 27: ...pendent on C and is in inverse proportion to MT In a high pressure region the number of molecules that carry heat energy increases while the free path of molecule becomes short so that the amount of t...

Страница 28: ...1E 1 1 0E 2 2 0E 2 5 0E 2 1 0E 3 1 1 2 5 6 7 1 3E 1 2 9E 1 8 5E 1 1 9E 2 3 7E 2 1 3E 3 8 0E 3 5 3E 1 1 0 1 8 4 3 8 0 1 7E 1 5 1E 1 1 1E 2 2 3E 2 8 5E 2 8 0E 3 5 9E 1 1 2 2 3 5 3 1 1E 1 2 1E 1 5 2E 1 1...

Страница 29: ...hat an error of 3 of the linear scale is involved when the meter S range scale is replaced by a linear scale of 100 full scale To express the error range at a reference pressure of 40 Pa 0 4Torr by pr...

Страница 30: ...DIX 22 1 10 100 1000 1 10 100 1000 Indicated Values Pa 3 3 0 4 Working Standard Pa 0 01 0 1 1 10 0 01 0 1 1 10 3 3 Working Standard Torr 0 003 Indicated Values Torr Fig 9 Indication Values Working Sta...

Страница 31: ...the Pirani gauge is a molecular density measuring vacuum gauge the indication of the gauge varies with the type of gas difference in thermal conductivity The Model GP 1G RY has been adjusted with nit...

Страница 32: ...the local ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm a...

Страница 33: ...CERTIFICATE OF DECONTAMINATION 25 7 CERTIFICATE OF DECONTAMINATION...

Страница 34: ...aking format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board Chassis Connector AC DC Converter Lab...

Страница 35: ...E CABLE LENGTH BETWEEN CONTOROLLER AND METER ABOUT 1m SENSOR HEAD CABLE 2 100m A TYPE C TYPE CONTOROLLER CONVERSION CABLE WP04 05 2m MEASURING UNIT GP BH MEASURING UNIT GP BH CONVERSION CABLE WPB 10 2...

Страница 36: ...RELATED DRAWINGS 28 Fig 11 Dimensional drawing for controller...

Страница 37: ...RELATED DRAWINGS 29 Panel cut dimensional Fig 12 Dimensional drawing for A type meter...

Страница 38: ...RELATED DRAWINGS 30 Panel cut dimensional Use until 0 8 Fig 13 Dimensional drawing for B type meter...

Страница 39: ...RELATED DRAWINGS 31 Panel cut dimensional Fig 14 Dimensional drawing for C type meter...

Страница 40: ...RELATED DRAWINGS 32 Fig 15 Dimensional drawing for measuring unit GP H...

Страница 41: ...RELATED DRAWINGS 33 Fig 16 Dimensional drawing for measuring unit GP BH...

Страница 42: ...34 Pin No Label Mater terminal 1 2 3 DC24V U 4 0V U 5 6 7 Fig 17 Mater cable GP 1GRY connection diagram 2 5 10 15 20 30 50 100m Pin No Use 1 5V 2 15V 3 V 4 V 5 AG Cover FG Fig 18 Sensor head cable co...

Страница 43: ...t material Case material Compatible cable WP 01 18 Pt 25 BS Ni plating Socket type WP 02 15 18 Pt 25 BS Ni plating Socket type WP 03 3 8 Pt 25 BS Ni plating Socket type WP 16 NW 16 30 Pt 25 BS Ni plat...

Страница 44: ...RELATED DRAWINGS 36 Fig 20 Sensor head filament connection diagram...

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