Ulvac GI-M2, Инструкция по эксплуатации

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9.7. X-Ray Function
（
GI-N8 Only
）
The X-Ray function can hold the background error of the ionic current value (pressure
signal) due to soft X-rays.
9.7.1.What is X-Ray mode setting?
Holding down the F1 key for two seconds or more turns ON X-Ray. A second press (two
seconds or more) on the key turns OFF X-Ray. (X-Ray is activated from the time when
the key is pressed to the time when it is pressed for a second time.)
9.7.2.How to actuate X-Ray function
(1) Actuating conditions
The X-Ray function is not actuated unless the filament is ON.
When X-Ray is actuated, the lamp in the F1 key lights.
Pressing the FIL key when X-Ray is ON turns OFF the X-Ray mode and filament.
(2) Operation
X-Ray operation can be entered from the front panel or external I/O connector (X-
Ray).
(3) Notice
The X-Ray function is not actuated unless pressure comes down to below 3.0 × 10
-
5
Pa (2.0 × 10
-10
Torr) and will be turned OFF automatically if the pressure rises to
above 3.0
×
10
-8
Pa (2.0
×
10
-10
Torr).
CAUTION: X-Ray function can be actuated only when the filament is turned ON.
If DEGAS is actuated when the X-Ray function is actuated, the X-Ray action
will stop and the DEGAS mode will be executed. The X-Ray action will be
restored when DEGAS is turned OFF. (when the pressure after degassing is
below 3.0
×
10
-8
Pa(2.0
×
10
-10
Torr))
X-Ray action is not accepted during degassing action.
When the X-Ray action is actuated, pressure measurement data are updated
at intervals of five seconds. The filament protecting action against abrupt
pressure rise will be disabled.