14
Fig. 9-2 Pressure-measurement value output graph (Torr)
9.2.2.
Measurement value outputs in each condition
Table 9-1 gives the measurement value outputs in several conditions that can occur
during measurement.
Table. 9-1 Measurement Value Output Voltages
Operating condition
Measurement value output voltage
In normal measurement
Voltage corresponding to measured pressure
When discharge is not set up
10 V or more
Below measurable lower limit
Voltage corresponded to pressure (reference only)
Below measurable greatly lower limit
※
1
10 V or more
※
1:There is possibility that output voltage is less than 0V due to change of environmental
temperature when output voltage is around 0V.
If output voltage value is minus, it shows output voltage is more than 10V (same
condition as it does not discharge).
Содержание G-Tran Series
Страница 2: ......
Страница 52: ...42 Fig 15 2 Dimensional drawing ...