SK00-9662-EQ-003-00
G-TRAN SERIES
Pirani Vacuum gauge SWU10-R
Quick Manual
Introduction
This quick manual is for quick check of operation and display of the product.
Please refer to instruction manual in advance for detailed information about
operation, precautions and safety for proper use.
Available for download from
ULVAC website.
https://showcase.ulvac.co.jp/ja
This manual is for the following gauges. Serial Nos. 00001 and higher
.
Part Names and Functions
SWU10-R controller section
①
②
③
Name
Function
①
I/O connector
The I/O connector for the power supply and signals
(RJ-45 jack connector).
②
Gauge head
clamp
The clamp to hold and lock the gauge head.
③
Mating screws
Mating screws (M3) for the clamp hood.
SWU10-R I/O connector
No
This unit
Connection destination
1
Power 5 VDC
SH2/ST2
Multi-ionization gauge
2
GND
3
Power 5 VDC
4
Communication terminal
5
Communication terminal
6
GND
7
Power 5 VDC
8
GND
SWU10-R LED
Name (symbol)
Function
①
POWER/ERROR LED
On : Operating normally
Flashing: Error such as a filament
break, this unit is malfunctioning
Off : Power off, this unit or the
SH2 / ST2 is malfunctioning
Attaching the Product
Loosen the clamp locking screws to loosen the clamp. Then attach the gauge
head with the procedure below.
①
Align the pins for the gauge head and push it all the way in
②
Clamp the gauge head with the clamp
③
Tighten the locking screws to secure the gauge head
Handling Precautions
3.1.
Precautions related to usage
・
Secure cables as much as possible so that force is not applied to cable
connectors.
・
Firmly insert the RJ-45 connector.
・
To perform accurate pressure measurements, allow the pressure sensor to
age for 20 minutes or longer before measuring.
3.2.
Attaching this unit
・
Attach this unit so that the gauge head attachment opening surface is
parallel to the gas flow. In particular, ensure that gases do not enter the
gauge head interior like a beam.
・
As much as possible, attach the gauge head so the filament is vertical to
the force of gravity.
・
The Pirani vacuum gauge head filament is thin at φ25 µm, so avoid use in
a location with a large amount of vibration as much as possible. The
biggest cause of filament breaks is from mechanical shock, so use caution
regarding the installation location and handling.
・
Use an O-ring to attach the gauge head that releases little gas. There is a
risk of measurement errors or the gauge head lifespan will decrease if
materials that release a large quantity of gas, such as rubber tubes or grease,
are used in the gauge head connection.
Gas flow direction
Checking the Filament and Temperature Sensor for
Burnout
Filament
Approx. 5
Ω
Temperature
sensor
Approx. 1.1
k
Ω
The diagram below shows the connection of the Pirani sensor head filament. Check
continuity referring to this diagram. The resistance of the filament is about 5Ω under
atmospheric pressure and that of the temperature se
nsor is about 1.1 kΩunder
atmospheric pressure.
Note)Beware of over-current
If the filament or temperature sensor is energized with an over-current of 2 mA or
more, it may burn out. Be alert to the current value on the measuring instrument.
Also measure the resistance value under atmospheric pressure because in vacuum, the
filament and other components are heated and an accurate resistance value cannot be
measured.
Specifications
Name
Pirani vacuum gauge measuring unit
Model
SWU10-R
Measurement principle
Pirani vacuum gauge that uses thermal
conduction by gas molecule
Number of gauge heads
1pc
Applicable gauge head
SWP-16,SWP-R1/8,SWP-P18,SWP-P15, SWP-
25, SWP-CF16, SWP-1S
Measurement pressure range
5.0×10
-2
to 1.0×10
+5
Pa
Output pressure range
5.0×10
-2
to 1.0×10
+5
Pa
Accuracy (N
2
)
1×10
-1
Pa to 1×10
+4
Pa: ±10%
5×10
-2
Pa to 1×10
-1
Pa: ±20%
1×10
+4
Pa to 1×10
+5
Pa: ±20%
Repeatability
1×10
-1
Pa to 1×10
+4
Pa: ± 2%
Sampling time
50 ms, 5x moving average
Measurement value output
Output by serial communication
LED display
POWER/ERROR LED
Gauge head material
Filament
：
Pt
Other
：
SUS304, FeNiCo, Ni, Au, Glass, Ceramic
Gauge head withstand
pressure
2×10
+5
Pa(abs)
*Take the withstand pressure for flanges,
clamps, and other components into account
separately.
Operating temperature range
10 to 40
℃
Operating humidity range
15 to 85% RH (no condensation)
Storage temperature
-20 to 65
℃
(no condensation)
Bake out
150
℃
(without electronics unit)
Mounting position
Free
IP protection class
IP30
Power supply voltage
5VDC
±
5%
I/O connector
RJ-45 jack connector
Gauge head internal volume
Pirani vacuum gauge head(SWP-16): 7.3cm
3
Weight
Controller: Approx. 38 g,
External dimensions
φ
40
×
51 (controller section only)
Standard Accessories
Quick manual(This paper)
1copy
Trouble shooting
Bad electrical wiring is a major cause of this unit malfunctions. If this unit
behaves in a manner you find unusual, first check the wiring between this unit and
the SH2/ST2. Refer to the SH2/ST2 instruction manual as well.
The POWER/ERROR LED is off even though power is being supplied
Cause
Action
Miswired or broken cable
Repair the wiring and check continuity
with a tester.
The power supply voltage to the
SH2/ST2 is not within the specified
range
Check the power supply voltage with a
tester.
This unit or the SH2/ST2 is
malfunctioning
Requires inspection and repairs at
ULVAC.
The POWER/ERROR LED is flashing or the SH2/ST2 keeps outputting the
error signal
Cause
Action
Filament break or short circuit
Measure filament continuity and
isolation between each pin and the case.
⇒
Replace the gauge head when there is
a problem.
The gauge head is not attached
Attach the gauge head.
This unit or the SH2/ST2 is
malfunctioning
Requires inspection and repairs at
ULVAC.
Pressure does not reach 5
×
10
-2
Pa or lower even when pumping to vacuum
Cause
Action
The actual pressure is not 5
×
10
-2
Pa
or lower
Check the pressure with an ionization
vacuum gauge.
Room temperature, gas temperature
is different when measuring
This is normal. Measurements are
temperature dependent.
This unit or the SH2/ST2 is
malfunctioning
Requires inspection and repairs at
ULVAC.
The pressure reading does not show a steady value.
Cause
Action
The pressure is actually fluctuating
This is normal.
This unit is affected by pump
vibrations and fluctuating
Suppress vibrations as much as possible.
Measurements are affected by the
principle of the Pirani vacuum gauge.
Attached to a location with a gas
flow
Attach this unit to a location with no gas
flow.
Measurements are affected by the
principle of the Pirani vacuum gauge.
The environmental temperature is
fluctuating
Wait for the environmental temperature
to stabilize.
Measurements are affected by the
principle of the Pirani vacuum gauge.
High temperature and low
temperature gases are flowing in
Implement corrective action such as
attaching the gauge head to a location
unaffected by gas temperature.
Measurements are affected by the
principle of the Pirani vacuum gauge.
Dirty gauge head interior
Replace the gauge head
Affected by moisture and dirt
Attach the gauge head to a location as
unaffected as possible
Influenced by heat of vaporization by
gradual vaporization.
There is a leak in the gauge head
or the area where the gauge head is
attached
Gauge head leak
⇒
Replace the gauge
head
Other leaks
⇒
Stop the leak
Bad cable contact, increased wire
resistance
Check the cable connection and
resistance.
The cable is affected by
electromagnetic induction.
(By external noise)
Change the cable installation location.
Use this unit with the device generating
the noise turned off.
Review how the cables are installed
Examine separate measures for noise
1
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