Ulvac C15T, Инструкция по эксплуатации

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Compressor Unit Instruction Manual
MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED 5-1
CAUTION
5. DISCONNECTION and STORAGE
5.1 Disconnecting Flexible Hose .................................................................. 5-1
5.2 Storage.................................................................................................... 5-2
5.1 Disconnecting Flexible Hose
When disconnecting flexible hoses, be sure to use two single open end spanners with
width across flat 26mm and 30mm.
.
1. Shut down the compressor unit.
2. After the Super Trap and/or cryopump (refrigerator unit) has been warmed up to
room temperature, disconnect the flexible hoses.
・
If flexible hoses are disconnected while the cryocooler is still in low temperature, the
pressure inside the cryocooler will rise as it warms up, resulting in helium leakage by
activated pressure relief valve.
・
Note that when performing helium circuit decontamination of the refrigerator unit, it is
required to disconnect the flexible hoses at the compressor unit side immediately
after shutdown.
CAUTION