Ulvac C15T, Инструкция по эксплуатации

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Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 4-1
4. OPERATION
4.1 Before Operation .................................................................................... 4-1
4.2 Normal Operation ................................................................................... 4-1
4.1 Before Operation
Before operating the compressor, check following items;
1. The power supply meets the requirements described in Table 1-1.
2. STOP switch lights up when the power is supplied to the compressor.
If it does not light, the phase may be reversed. Change any one set of RST phases.
3. REMOTE/LOCAL switch is properly set.
4. Connectors are fixed firmly.
5. Cooling water meets the requirements.
6. Helium gas static pressure is within the appropriate values.
4.2 Normal Operation
Check that the operating pressure is within the values shown in Table 1-1.
Helium pressure while the compressor is in operation varies depending on the length of the
flexible hoses. Especially, helium pressure tends to be high when flexible hose is longer
than 3m. Adjust the pressure by releasing helium from helium charge port.
CAUTION