4
Upgrade Equipment
Turbomolecular Pumps
404
ISQ 7000 Hardware Manual
Thermo Scientific
15. Insert a new turbo pump into the chassis.
16. Lift the turbo pump up and onto the support clamps.
17. Reattach the remaining clamps.
18. Tighten all the nuts holding the turbo pump to the chassis.
19. Attach the adapter to the turbo pump and clamp it in place.
20. Reinstall the power supply and make sure it is flush against the top of the chassis and the
screw holes line up.
21. Connect the power cables on the back of the instrument. Make sure you attach the cables
properly. The foreline pump connects to the System Mech Pump connector on the back
of the instrument.
Note
There is a centering ring with an o-ring seal that must be correctly placed between
the pump and the vacuum manifold.
Figure 464.
Installing the Extended Capacity Turbo Pump
Note
You may need assistance to lift the pump up and onto the clamps. The turbo pump
is large, heavy and awkward to hold with one hand while you are tightening the clamps
with a wrench. If you remove the left side panel, controller interface board, lens driver
board, RF board, it will be easier for the other person to get their hands around the pump
as you tighten the clamps.
Содержание ISQ 7000
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Страница 174: ...2 Troubleshooting Contacting Technical Support 146 ISQ 7000 Hardware Manual Thermo Scientific ...
Страница 400: ...3 Advanced Maintenance Replacing Fans and Filters 372 ISQ 7000 Hardware Manual Thermo Scientific ...