thermionics laboratory, inc 3kW Rod fed e-gun manual Page 1
Model RCRF-0325/0338
3 kW Rod Fed e-Gun
Evaporation Source Manual
Thermionics Laboratory, Inc.
Modesto CA 95351
Phone: 209/529-8357
Fax: 209/529-8449
www.thermionics.com
Страница 1: ...laboratory inc 3kW Rod fed e gun manual Page 1 Model RCRF 0325 0338 3 kW Rod Fed e Gun Evaporation Source Manual Thermionics Laboratory Inc Modesto CA 95351 Phone 209 529 8357 Fax 209 529 8449 www the...
Страница 2: ...tion source uses a beam of focused electrons to vaporize material in a high vacuum environment The vaporized material then condenses on an object called a substrate in the same high vacuum chamber to...
Страница 3: ...t 1 gpm at 50 psi C High Voltage power supply TLI model 150 0040 or equivalent TO INSTALL THE E GUN SYSTEM 1 Mount the e gun in the chamber Make sure that the source is grounded to the chamber 2 Conne...
Страница 4: ...given to removal of all glass from the parts after cleaning glass is a dielectric material and will cause severe arcing if left on the source Inspect the crucible bore and ensure that it is clear of a...
Страница 5: ...r supply slowly bring up voltage to negative 4 200 volts DC 8 Turn on the emission current and slowly increase the potentiometer until you see a slight glow on the tip of the rod This will normally ap...
Страница 6: ...will in many cases still see some hazing on the e gun source this is normal during evaporation As the e gun becomes coated with these materials hazing may increase e GUN SHUT DOWN Once the desired rat...
Страница 7: ...etween the beam former and the anode should be checked to assure a spacing of 040 inches 8 When looking down on the filament you should see 1 3rd of the filament exposed The filament beam former and a...
Страница 8: ...the original manufacturer s warranties This warranty does not extend to Thermionics products that have been subject to misuse neglect accident or improper application nor shall it extend to units tha...
Страница 9: ...us to determine the cause of failure In all cases Thermionics has sole responsibility for determining the cause of failure and sole discretion in determining the nature and extent of adjustment if an...
