Spectron Gas Control Systems GmbH
Commissioning | 6
GES_BM55-2U_0720
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6.2.2 Flushing in the process gas to the process
Flushing in the entire line network to the consumer must be implemented via a waste gas valve
on the process. To do this, refer to the system documentation for the consumer. This procedure
does not apply to fluorine or fluorine mixtures.
1. Close all valves.
2. Open slowly the process gas source valve and then the HPI and PLI valves, to fill the entire
area in which the process gas is to penetrate up to the process and fill it (pressure build-up).
In this process, the process source pressure and the gas type properties are to be taken
into account.
3. Open shut-off valve on the process. Ensure that the process gas can be discharged safely
via the process.
The pressure control panel is now in a condition ready for operation.
Once it is put into operation, both sides of the panel must always be connected. Before repla-
cing a cylinder, always turn the switching lever with the "In operation" display to the side from
which gas is currently being drawn. The arrow indicating the "reserve side" points to the side of
the pressure control panel on which the gas cylinders are now to be replaced.
It is extremely important to move the switching lever, since otherwise once the empty
gas cylinders have been replaced with full gas cylinders and the process gas valve has
been opened, this side would take over the gas supply function again. The reserve side
would then remain the reserve side, but its gas reservoir would not be 100% full.
