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without the prior permission of SPECS GmbH.

User manual for the HSA3500 / HSA3500 plus Power Supply.

Version

1.9

printed

23 August 2010

SPECS order number for this manual:

78 000 186

HSA3500 / HSA3500 plus Power Supply

SPECS GmbH - Surface Analysis
and Computer Technology
Voltastrasse 5
13355 Berlin
GERMANY
PHONE:+49 (0)30 46 78 24 -0
FAX: +49(0)30 4 64 20 83
http://www.specs.de

Содержание HSA3500

Страница 1: ...HSA3500 HSA3500 plus Power Supply User Manual Version 1 9...

Страница 2: ...al for the HSA3500 HSA3500 plus Power Supply Version 1 9 printed 23 August 2010 SPECS order number for this manual 78 000 186 HSA3500 HSA3500 plus Power Supply SPECS GmbH Surface Analysis and Computer...

Страница 3: ...t Adapter 4 1 6 1 Introduction 4 1 6 2 Connectors diagnostic LEDs and switches 5 1 6 3 Power Requirements 6 1 6 4 Pin Setting of the CAN Bus Connector 6 1 6 5 Galvanic Decoupling 7 1 6 6 Propagation D...

Страница 4: ...HSA config files hsa 27 3 1 What are HSA3500 Configuration Files 27 3 2 Nomenclature 28 3 2 1 Mode 28 3 2 2 DACVoltage 28 3 2 3 Natural Cubic Spline 28 3 2 4 Syntax and Encoding 28 3 2 5 Comments 29 3...

Страница 5: ...alyzer bipolar HSA3500 plus module 59 4 2 7 0x24 400V bipolar HSA3500 plus module 60 4 2 8 0x34 3 5kV unipolar HSA3500 plus module 61 4 2 9 0x44 150mA bipolar HSA3500plus module 62 4 3 Hardware type a...

Страница 6: ...Table of Contents HSA3500 HSA3500 plus Power Supply...

Страница 7: ...f the unit allows independent setting of all voltages no voltage dividers are used Each module is fully galvanically floating highly stable and linear The voltages are con trolled by high precision 24...

Страница 8: ...ata Connection CAN Bus 500 kBaud Line Input 100V 250V 47 63Hz The HSA3500 plus has 5 additional modules with specifications given below 3 5kV Bi Lens 3 5kV Bi Analy 3 5kV Uni 400V Bi CPU 150mA Resolut...

Страница 9: ...low the safety instructions given therein 1 5 Initial Inspection and Packaging List Visual inspection of the component is required to ensure that no damage has oc curred during shipping Should there b...

Страница 10: ...CAN Bus adapter for the PC It is connected to the PC via an ethernet network The PC s access to CAN Bus controlled devices like the HSA is provided by the EC10 and the communication between PC and EC1...

Страница 11: ...vity indicator This LED will flash while the EC10 is receiving data from the network ONL LED red This LED will flash while the PC software is connected to the EC10 e g while SpecsLab is running CAN LE...

Страница 12: ...rements The EC10 needs a 24 Volt supply voltage Usually this voltage is provided by the HSA via the CAN Bus cable A 24 Volt supply voltage can be fed to the EC10 via the DC socket labelled 24V at the...

Страница 13: ...cal strength of both decouplings is greater than 500 Volts DC 1 6 6 Propagation Delay The propagation delay is the time the EC10 needs to convert an ethernet packet into a CAN Bus packet and vice vers...

Страница 14: ...red Error something not to specifications LED Interlock yellow This LED will be on if the vacuum interlock is en gaged LED CAN green This LED will blink while the HSA is not connected and will be on w...

Страница 15: ...er input detector cathode Screen or DLD SHV Connection to detector CCD DLD only Mesh or Aux SHV Connection defined by user Line Input 3pin Input for power cord Interlock 3pin Interlock connector Slidi...

Страница 16: ...Table 5 HSA3500 plus back panel description 1 8 General Internal Layout In Figure 6 you can see the general internal layout of the HSA At the front side you have the even slot numbers and on the back...

Страница 17: ...oduction date printed on the board Type Name Main CPU 0xf1 3 5kV bipolar 0xe1 400V bipolar 0xd1 3 5kV unipolar 0xb1 150mA unipolar Table 6 HSA3500 modules Type Name Main CPU with current module 150mA...

Страница 18: ...0xf1 3 5kV 3500V 3500V 0xf1 3 5kV 1500V 100V 0xe1 400V 400V 400V 0xe1 400V 40V 40V 0xd1 3 5kV uni 0 1V 3500V 0xb1 150mA 0mA 150mA Table 8 HSA3500 Ranges Type Module Min Voltage Max Voltage Main CPU 0m...

Страница 19: ...er to be connected to a pressure gauge or must be bridged temporarily with the supplied connector Bridging the vacuum interlock can cause great damage in case of sudden pressure rise Use at your own r...

Страница 20: ...re remote control of applications like SpecsLab2 using Windows Messages Using directly the public CORBA interfaces of the SPECS device drivers is also possible but intermediate programming skills is f...

Страница 21: ...ic Tool Diag Tool gets the hardware type e g 101 from the HSA Main CPU and reads the test file e g HsaRaw101 dat All information mode relays modules about the test is stored in this file The next test...

Страница 22: ...ogfiles Calling the diag tool more than once will create multiple logfiles with suffxies 1 2 and so on Logfiles will never be overwritten 4 DiagTool started the procedure and shows results error warni...

Страница 23: ...Figure 9 Start diag bat Figure 10 DiagTool command box HSA3500 HSA3500 plus Power Supply 17...

Страница 24: ...nce to supply and may cause rise time errors even if the module is okay Values of 0 8 are within the limit 2 3 2 Connection check for the analyzer electrodes While performing the checks below it may b...

Страница 25: ...nual to check the voltages at the ground plate pin 9 of the analyzer connector figure 36 Schematics of the 12 pin analyzer feedthrough page 71 Range V Ek Ep PIN 9 Correct with analyzer settings 40 0 0...

Страница 26: ...ct of values multiplied with Dwell Time defines the time for the measurement in this FixedEnergies mode 3 Set the workfunction in the region to zero 4 Set the kinetic energy and pass energy 5 Set the...

Страница 27: ...Now the voltages can again measured either without the filterbox cable or while be ing applied to the analyzer The next two procedures should be only carried out by well trained personnel Only touch...

Страница 28: ...e anymore Contact should be only made via the HV probe 5 Start the HSA 6 Start the HSA3500 Juggler and set the lens mode to Large Area and Ek to 800eV and Ep to 20eV remember to leave the Workfunction...

Страница 29: ...Figure 12 HSA3500 plus with opened backplane the pin numbers are indicated in the zoomed figure HSA3500 HSA3500 plus Power Supply 23...

Страница 30: ...5 Lens C5 719 9 757 9 720 2 759 4 T4 T7 6 Lens C5 719 9 757 9 720 2 759 4 T8 7 Lens B8 606 1 679 6 626 1 559 4 T9 8 Lens A7 780 780 780 536 GP 9 Analyzer A9 780 780 780 780 0 IH 10 Analyzer A5 766 7...

Страница 31: ...8 10 235 OHP 4 Analyzer C7 14 14 14 T4 T7 5 Lens C5 270 85 130 Not used 6 not used T8 7 Lens B8 9 5 9 50 T9 8 Lens A7 10 11 5 GP 9 Analyzer A9 10 10 10 IH 10 Analyzer A5 3 33 3 33 3 33 OH 11 Analyzer...

Страница 32: ...e suite also includes a small batch file called getVoltages bat located in the tools bin directrory this is in the same place located as the diag tool This program allows to output the voltages to gro...

Страница 33: ...ithout recompiling the control software The backplane of the unit incorporates plug connectors which permit various intercon nection topologies among the different modules Each HSA power supply is man...

Страница 34: ...us voltages are supplied by a HSA3500 HV module via a digital to analog converter The output voltages results from the DAC voltages modified by the back plane interconnections All DAC voltages must be...

Страница 35: ...SA3500 configuration file header looks like hsa Header Comment Name configuration name Version Comment Version version number 3 2 7 Sections Sections are the basic information containers in the HSA co...

Страница 36: ...e sequence 0 0098 0 0043 0 0001 0 0032 0 00076 point 12 00 34 08 point sequence 1 0 1 1 2 0 2 21 3 0 3 32 4 0 4 43 5 0 5 54 bit masks 0x00 0x34 0x45 0x66 0x07 section reference AnalyzerMacros Groundpl...

Страница 37: ...d to override some inherited values or sec tions If a section inherits from another section any default values are taken from the ref erenced section rather then from global defaults 3 2 10 Sections a...

Страница 38: ...cribing of what parts a mode name is composed of Default value is Lens Mode Range Table 16 Info section description 3 2 10 2 SplineList Section This section contains a sequence of all spline definitio...

Страница 39: ...ltageList section description 3 2 10 4 ModeList Section This section defines the modes which will be available to the user control software It contains a sequence of Mode subsections Any mode defined...

Страница 40: ...he configuration file This section has a single entry with name points its value is a sequence of the spline grid points The sequence can have any length but must be written as a single line of text A...

Страница 41: ...he logical voltage Types are V eV mA or nu meaning no unit AdjustOnly boolean mandatory Signals that this logical voltage is used as an offset to some DAC voltages for adjustment and optimization only...

Страница 42: ...dden in a ModeDef section Step double mandatory Minimal step width the logical voltage can be changed The value depends on the DAC resolution the DAC voltage calculation and the hardware wiring defaul...

Страница 43: ...or each HSA3500 mode this is typically a lens mode in a special voltage range This section contains all in formation required by the software to activate and operate a HSA3500 mode The most essential...

Страница 44: ...e is disabled by the control software software until it is explicitly enabled in the program options Default false LogicalVoltage optional multiple Describe the values of a global defined logical volt...

Страница 45: ...ef section with the same name for this HSA3500 mode Step double optional Override the value of the Step entry in a global LogicalVoltageDef section with the same name for this HSA3500 mode Table 23 Lo...

Страница 46: ...ollowing different parts integers and floats references to logical voltages by their shortname prefixed with e g Ekin the following fuctions are supported where x and y denote the parameters the trigo...

Страница 47: ...than 0 it gives the minimal delay between two DAC output operations for decreasing output voltages U2 U1 Default 0 ignored if 0 Units ms StandByValue string Value of DAC Voltages while the Unit is in...

Страница 48: ...ilCurrent DacId 16 0 OperationMode 0 Formula Icoil 0 001 User Interface Unit mA DacVoltage NonLinearLens1 DacId 1 0 OperationMode 3 Formula Ekin WF Ep spline_LargeArea_T2 Ekin WF Ep DacVoltage NonLine...

Страница 49: ...e DacVoltage GroundPlate AnalyzerVoltages MacroGroundPlate DacVoltage InnerHemisphere AnalyzerVoltages MacroInnerHemisphere DacVoltage OuterHemispherePlate AnalyzerVoltages MacroOuterHemisphere Plate...

Страница 50: ...st to the LogicalVoltageList LogicalVoltageList LogicalVoltages list of all logical voltages LogicalVoltage Adjust 2 Define the LogicalVoltage in the block LogicalVoltageDef LogicalVoltageDef Adjust S...

Страница 51: ...ities These can be read out with the free soft ware tool DebugView available from http technet microsoft com en us sys internals bb896647 aspx Now open DebugView and connect to the HSA and look for th...

Страница 52: ...HSA config files hsa Figure 13 ConfigCheck startup screen 46 HSA3500 HSA3500 plus Power Supply...

Страница 53: ...Chapter 4 Appendix 4 1 Working Ranges HSA3500 HSA3500 plus Power Supply 47 Figure 14 Working range for LM mode up to 660eV pass energy...

Страница 54: ...Appendix 48 HSA3500 HSA3500 plus Power Supply Figure 15 Working range for MM mode up to 660eV pass energy Figure 16 Working range for HM mode up to 660eV pass energy...

Страница 55: ...HSA3500 HSA3500 plus Power Supply 49 Figure 17 Working range for LA mode up to 660eV pass energy Figure 18 Working range for MA mode up to 660eV pass energy...

Страница 56: ...Appendix 50 HSA3500 HSA3500 plus Power Supply Figure 19 Working range for SA mode up to 660eV pass energy Figure 20 Working range for HAD mode up to 660eV pass energy...

Страница 57: ...HSA3500 HSA3500 plus Power Supply 51 Figure 21 Working range for MAD mode up to 660eV pass energy Figure 22 Working range for LAD mode up to 660eV pass energy...

Страница 58: ...Appendix 52 HSA3500 HSA3500 plus Power Supply Figure 23 Working range for WAM mode up to 660eV pass energy Figure 24 Working range for SA2 mode up to 660eV pass energy...

Страница 59: ...following tables Tips The RelayOut Bits have to be 1 so that the relay is closed and 0 for it to be open Fast Slow Bits are so encoded that 1 sets fast mode and 0 sets slow mode Usually one wants to...

Страница 60: ...AC Output Pin 0 N A N A N A 1 Mon U0 Voltage Output 0 26 2 Mon U1 Relay Output 1 20 3 Mon U2 Relay Output 2 14 4 N A N A N A 5 N A N A N A 6 Mon I Total current 7 N A N A N A Table 26 HSA3500 0xf1 ADC...

Страница 61: ...6 6 Mon I2 Current Output 2 26 7 N A N A N A Table 28 HSA3500 0xe1 ADC mapping DAC Voltage Range Q5 Fast Slow DAC2 Q4 Fast Slow DAC1 Q3 Fast Slow DAC0 Q2 Range DAC2 Q1 Range DAC1 Q0 Range DAC0 Hex val...

Страница 62: ...26 2 Mon U1 Relay Output 1 20 3 Mon U2 Relay Output 2 14 4 N A N A N A 5 N A N A N A 6 Mon I Total current 7 N A N A N A Table 30 HSA3500 0xd1 ADC mapping Voltage Range Q2 Relay Out 2 Q1 Relay Out 1 Q...

Страница 63: ...AC Output Pin 0 N A N A N A 1 Mon U Output 26 2 Mon I Output 26 3 N A N A N A 4 N A N A N A 5 N A N A N A 6 N A N A N A 7 N A N A N A Table 32 HSA3500 0xb1 ADC mapping Note No Operation Modes exist Th...

Страница 64: ...6 N A N A N A 7 N A N A N A Table 33 HSA3500 plus 0x04 ADC mapping Module voltage range Q3 Relay Out 2 Q2 Relay Out 1 Q1 Range 0 Q0 Range 1 Hex value 3500V to 3500V 1 1 0x03 1 1 1 0x07 1 1 1 0x0B 1 1...

Страница 65: ...t 4 Mon U2 Voltage Output 2 14 5 N A N A N A 6 N A N A N A 7 N A N A N A Table 35 HSA3500 plus 0x14 ADC mapping Module voltage range Q3 Relay Out 2 Q2 Relay Out 1 Q1 Range 0 Q0 Range 1 Hex value 3500V...

Страница 66: ...HSA3500 plus 0x24 ADC mapping DAC Module voltage range Q3 Range 10V Q2 Range DAC0 Q1 Range DAC1 Q0 Range DAC2 Hex value 0 400V to 400V 1 0x01 100V to 20V 0x00 1 400V to 400V 1 0x02 100V to 20V 0x00 2...

Страница 67: ...20 1 N A N A N A 2 Uerr 3 Mon I Total current 4 Mon U0 Voltage Output 0 26 5 N A N A N A 6 N A N A N A 7 N A N A N A Table 39 HSA3500 plus 0x34 ADC mapping Module Q2 Relay Out 1 Q1 Range 0 Q0 Range 1...

Страница 68: ...on U Output 26 1 Mon I Output 26 2 N A N A N A 3 N A N A N A 4 N A N A N A 5 N A N A N A 6 N A N A N A 7 N A N A N A Table 41 HSA3500plus 0x44 ADC mapping Note No Operation Modes exist The Operation M...

Страница 69: ...only 7 D 9 HSA3500 Standard MCD old 8 D 10 HSA3500 9 D 10 HSA3500 10 D 11 HSA3500 11 E HSA3500 12 F 12 HSA3500 13 D 12 HSA3500 14 I 10 HSA3500 Standard MCD 15 I 11 HSA3500 Standard CCD 17 K 12 HSA350...

Страница 70: ...plus Standard MCD Deflector 105 X4 10 HSA3500plus THEMIS 106 X5 12 HSA3500plus Wide Angle 107 X7 7 HSA3500plus Wide Angle Pre Lens Defl 108 X7 5 HSA3500plus Wide Angle Pre Lens 109 X4 12 HSA3500plus T...

Страница 71: ...4 3 1 Wiring I Figure 26 HSA3500 Wiring I Figure 27 HSA3500 Wiring Backplane I HSA3500 HSA3500 plus Power Supply 65...

Страница 72: ...Appendix 4 3 2 Wiring H Figure 28 HSA3500 Wiring H Figure 29 HSA3500 Wiring Backplane H 66 HSA3500 HSA3500 plus Power Supply...

Страница 73: ...4 3 3 Wiring Q Figure 30 HSA3500 plus Wiring Q Figure 31 HSA3500 plus Wiring Backplane Q1 HSA3500 HSA3500 plus Power Supply 67...

Страница 74: ...Appendix 4 3 4 Wiring X1 Figure 32 HSA3500 plus Wiring X1 Figure 33 HSA3500 plus Wiring Backplane X1 68 HSA3500 HSA3500 plus Power Supply...

Страница 75: ...4 3 5 Wiring X4 Figure 34 HSA3500 plus Wiring X4 Figure 35 HSA3500 plus Wiring Backplane X4 HSA3500 HSA3500 plus Power Supply 69...

Страница 76: ...locks in the cable so that the voltages are only applied if the cable is connected These interlocks are as follows Both Connectors C1 and C2 have to be connected to ground Analyzer Connector A2 and A3...

Страница 77: ...When using this program it is possible for the unit to switch on dangerous High Voltage This voltage can also be present at the connector terminals of the back plate of the Unit HV Meter Connector HV...

Страница 78: ...ate of the Unit will light up green and stay lit At this same time the program will provide information about this connection on screen for example Connected to Unit 0f 28 f7 f5 05 00 00 Firmware Vers...

Страница 79: ...General 0 Cmd 0x00 ErrCode 0x00 FatalErr 0x00 0x00 Total Error Counter 0 Fatal Error Code 0x00 Setup Error Code 0x00 EventCounter 0 0 EventCounter 1 0 EventCounter 2 0 EventCounter 3 0 EventCounter 4...

Страница 80: ...a measurement of approximately 710 Volts The LEDs on the front panel should be lit as follows Power on CAN green HV on and all of the other LEDs should not be lit at all If you now pull out one of the...

Страница 81: ...the program will then terminate 4 5 1 Commands Explained adc slot channel Reads out the ADC channel of Module slot The channel assignments are de scribed in the section dac slot chn val Set the channe...

Страница 82: ...rovides a short description of the command s syntax help mode will describe the mode command hvoff Turns off the High Voltage hvon Turns on the high voltage This can only occur once an operation mode...

Страница 83: ...ment in the list be ginning with 0 Modules that are not required or are not present should have an empty definition The following examples can explain this paragraph better mode 1 Module 0 Mode 1 HV o...

Страница 84: ...ve the format printf notation General d Cmd 0x 02x ErrCode 0x 02x FatalErr 0x 02x 0x 02x Above General is the Error Message of the CAN Devicenet layer of the PC Cmd is the Firmware command that failed...

Страница 85: ...the unit doesn t respond to a command sent via CAN bus within the expected amount of time This occurs most often due to an error in the Devicenet allocation which occurs at the program s start initial...

Страница 86: ...Message was received from the Unit Possible causes The Unit was turned off and then on again while the program was running Unit rebooted as a result of some other error typically a defective hardware...

Страница 87: ...Figure 37 HSA 3500 CE Conformity Declaration HSA3500 HSA3500 plus Power Supply 81...

Страница 88: ...Appendix Figure 38 HSA 3500 plus CE Conformity Declaration 82 HSA3500 HSA3500 plus Power Supply...

Страница 89: ...screen 46 Figure 14 Working range for LM mode up to 660eV pass energy 47 Figure 15 Working range for MM mode up to 660eV pass energy 48 Figure 16 Working range for HM mode up to 660eV pass energy 48 F...

Страница 90: ...SA3500 plus Wiring Q 67 Figure 31 HSA3500 plus Wiring Backplane Q1 67 Figure 32 HSA3500 plus Wiring X1 68 Figure 33 HSA3500 plus Wiring Backplane X1 68 Figure 34 HSA3500 plus Wiring X4 69 Figure 35 HS...

Страница 91: ...00V range with high voltage probe 1000 1 19 Table 12 Voltages to Ground Ekin 800eV Ep 20 eV WF 0 PHOIBOS 100 150 R6 or higher for typical XPS applications 24 Table 13 Voltages to Ground Ekin 20eV Ep 1...

Страница 92: ...Operation Modes 56 Table 32 HSA3500 0xb1 ADC mapping 57 Table 33 HSA3500 plus 0x04 ADC mapping 58 Table 34 HSA3500 plus 0x04 Operation Modes 58 Table 35 HSA3500 plus 0x14 ADC mapping 59 Table 36 HSA3...

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