Chapter
6
Specifications and Options
6.1 Physical
Mounting flange:
2.75 " (NW 35 CF)
In vacuum length:
200 mm (7.5 ")
In vacuum diameter:
34 mm (1.34 ") max
Bakeout temperature:
200
o
C
Rod feed:
50 mm (2 ") as standard
Rod diameters:
2,3,4,5 or 6 mm (2 mm supplied as standard. Also ac-
cepts crucibles.)
Crucible volume:
0.25 cc
Crucible materials:
Mo, Ta, W, pyrolytic graphite (PG), vitreous carbon (VC)
Table 1: Physical specifications
6.2 Beam
Deposition Rate:
Measured at 100 mm: Refractory materials e.g. W, Ta:
~2nm/min.
Higher vapour pressure materials e.g. Ag, Cu: up to nm/second.
Deposition rates controllable down to <0.01 A/s = 0.2 monolay-
er/min.
Beam Divergence:
~10
o
with flux electrode fitted
Table 2: Beam specifications
21
Содержание EBE-1
Страница 1: ...EBE 1 Electron Beam Evaporator 1 11...
Страница 8: ...Inspection 4 EBE 1...
Страница 22: ...Operation 18 EBE 1...
Страница 28: ...Drawings 24 EBE 1 Figure 4 Evaporator details...
Страница 30: ...List of Figures II EBE 1...
Страница 32: ...List of Tables IV EBE 1...
