SMC Networks XGT312-50336 Series, Руководство по эксплуатации

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1. Specifications
Opening angle 50mm×336mm
Working pressure Pa Atmospheric pressure to 10
-6
Operating pressure MPa 0.45 to 0.6
Internal leakage amount O-ring material : FKM 6.5×10
-10
Pa
･
m
3
/sec
O-ring material : Kalrez

6.5×10
-9
Pa
･
m
3
/sec
Internal leakage amount
(At negative pressure 0.1MPa or less)
O-ring material : FKM 6.5×10
-8
Pa
･
m
3
/sec
O-ring material : Kalrez

6.5×10
-7
Pa
･
m
3
/sec
External leakage amount 6.5×10
-11
Pa
･
m
3
/sec
Operating temperature
O
C 5 to 150 (for gate) 5 to 60 (for moving part)
Operating fluid Inertia vacuum
Operating times s
0.6 to 1

2
Position detection Auto switch (D-A93)
Main materials
for vacuum part
Seal material FKM
Material for
mechanism Bellows : AM350, Gate : A6063, Body : A5052P,
Bonnet : A5052, Others : SUS304
Piping size Rc1/8
Exhaust direction Universal
Mounting direction Vertical
End lock mechanism With end lock (No seal function at gate closed)
Cylinder capacity l 0.2
Mass kg 20

1: At normal temperature
･
Gas penetration is not included.

2: The period of time from gate open state to clamp after signal comes to solenoid valve and from
gate clamp state to gate open.
B
C
C