
-
22-
4.
Process Data
The process data size occupied by the SI Unit depends on the number of vacuum manifold stations.
The process data size occupied is as follows.
Table 4-1. Process data size
Vacuum manifold stations Input process data Output process data
4
4 byte
2 byte
8
5 byte
3 byte
12
6 byte
4 byte
16
7 byte
5 byte
4.1.
Input process data
Table 4-2. Overview of input process data
byte
Content
Description
0,1 PressureValueMonitoring
Refer to
2
UnitStatus
Refer to
3
Vacuum/ReleaseStatusCH0...3
Refer to
4
Vacuum/ReleaseStatusCH4...7
Refer to
Occupy when vacuum manifold consists of 8/12/16 stations.
5
Vacuum/ReleaseStatusCH8...11
Refer to
Occupy when vacuum manifold consists of 12/16 stations.
6
Vacuum/ReleaseStatusCH12...15
Refer to
Occupy when vacuum manifold consists of 16 stations.