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4.1.3.
Vacuum/ReleaseStatus
Table 4-7. Vacuum/ReleaseStatus
byte bit
Content
Description
Remark
3
0 Vacuum confirmation of CH0 ejector
0 : No vacuum adsorption or
vacuum release
1 : During vacuum adsorption or
vacuum release
1 Release confirmation of CH0 ejector
2 Vacuum confirmation of CH1 ejector
3 Release confirmation of CH1 ejector
4 Vacuum confirmation of CH2 ejector
5 Release confirmation of CH2 ejector
6 Vacuum confirmation of CH3 ejector
7 Release confirmation of CH3 ejector
4
0 Vacuum confirmation of CH4 ejector
0 : No vacuum adsorption or
vacuum release
1 : During vacuum adsorption or
vacuum release
Occupy when vacuum
manifold consists of
8/12/16 stations.
1 Release confirmation of CH4 ejector
2 Vacuum confirmation of CH5 ejector
3 Release confirmation of CH5 ejector
4 Vacuum confirmation of CH6 ejector
5 Release confirmation of CH6 ejector
6 Vacuum confirmation of CH7 ejector
7 Release confirmation of CH7 ejector
5
0 Vacuum confirmation of CH8 ejector
0 : No vacuum adsorption or
vacuum release
1 : During vacuum adsorption or
vacuum release
Occupy when vacuum
manifold consists of
12/16 stations.
1 Release confirmation of CH8 ejector
2 Vacuum confirmation of CH9 ejector
3 Release confirmation of CH9 ejector
4 Vacuum confirmation of CH10 ejector
5 Release confirmation of CH10 ejector
6 Vacuum confirmation of CH11 ejector
7 Release confirmation of CH11 ejector
6
0 Vacuum confirmation of CH12 ejector
0 : No vacuum adsorption or
vacuum release
1 : During vacuum adsorption or
vacuum release
Occupy when vacuum
manifold consists of 16
stations.
1 Release confirmation of CH12 ejector
2 Vacuum confirmation of CH13 ejector
3 Release confirmation of CH13 ejector
4 Vacuum confirmation of CH14 ejector
5 Release confirmation of CH14 ejector
6 Vacuum confirmation of CH15 ejector
7 Release confirmation of CH15 ejector