Phoenix HT User Manual
© 2007–2012 Rigaku Automation, Inc.
5
401718 Rev A
1.2.4 Wash Stations
The 96-head wash station and the nano wash station are supplied with wash water from the water
pump control box. The pump control box controls the flow of the wash water.
Water enters the controller from the water pump control box, and is pumped through one line
to the nano-wash station, and through two lines to the 96-head wash station.
The three lines are controlled by three valves.
Located on the right side of the water pump control box, push buttons prime the pumps, a
process that removes air in the lines and allows free water flow.
Waste water from the wash station chimneys flows from the wash station drain directly to a
waste-water tank.
Figure 8. Water Pump Control box (Front)
Located on the right side of the pump control box, push buttons on the electronics control box
prime the pumps, a process that removes air in the lines and allows free water flow.
Figure 9. Buttons to Prime the Pumps
Flow control valves
Water lines to wash stations
Water line from supply
