Raith ELPHY Plus, Руководство по эксплуатации оборудования

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2 ELPHY Plus and ELPHY Quantum Hardware Guide
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2.1.8 Motorized Stage Control
Most modern SEM’s will have a motorized stage. Control can be via
RS-232, TCP/IP, or sometimes GPIB. Some SEM stages can be retro
fitted with motors and a suitable control unit, e.g. from Deben.
2.2 Connection Overview
The following section illustrates the basic connections needed for an
attachment system.
The basic connection requirement are: X Y DAC output of the pattern
generator to the SEM external scan interface; and the video input from
a detector on the SEM, usually the SEI signal. Optional connections
include:
•
Control to switch the SEM to external scan mode;
•
TTL signal to the beam blanker electronics;
•
RS-232 for SEM computer control;
•
TCP/IP for SEM computer control;
•
RS-232 for Stage control.
The ELPHY Plus must have a SCSI terminator installed if no other
devices are connected to the SCSI chain.