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Raith ELPHY Plus, Руководство по эксплуатации оборудования

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Содержание ELPHY Plus

Страница 1: ...uy your excess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing R...

Страница 2: ...Hardware Operation Manual ELPHY Quantum and ELPHY Plus...

Страница 3: ...sentative Copyright 2007 by Raith GmbH All rights reserved Trademarks Microsoft Windows and Windows 2000 Windows XP are the registered trademarks of Microsoft Inc AutoCAD DXF are the registered tradem...

Страница 4: ...sing this manual 5 1 2 Notes cautions and warnings 5 1 3 Navigating through the manuals 6 2 ELPHY Plus and ELPHY Quantum Hardware Guide 7 2 1 Overview 7 2 2 Connection Overview 12 2 3 General Installa...

Страница 5: ......

Страница 6: ...e whenever you are uncertain about operating your system 1 2 Notes cautions and warnings Stickers on the left column provide you with the following messages A note emphasizes information requiring spe...

Страница 7: ...for system and personal safety startup standby shutdown and bakeout procedures Information on the task oriented operation of the system as well as the user interface is given in separate documents You...

Страница 8: ...lude Beam blanker electronic control unit Beam blanker hardware for the SEM column Universal sample holder Picoammeter Motorized stage controller 2 1 1 PC System A high end PC system is supplied with...

Страница 9: ...trol switching signal IO port for Raith use The input and output levels are factory set to match the users SEM Figure 1 ELPHY Quantum board connections at the rear of the PC TTL BEAM BLANK Y DAC OUTPU...

Страница 10: ...ED bar displays to indicate the beam position LED to indicate beam blank signal LED to indicate SEM external control signal Power button and indicator Figure 2 Front and rear panels of the ELPHY Plus...

Страница 11: ...ined from the SEM manufacture if installed by them Basic hardware consists of two parallel plates one connected to ground and the other to the high voltage Some systems have mechanical adjustment for...

Страница 12: ...will be absorbed when they do not have sufficient energy to cause further secondary emission events The cup is sufficiently deep to prevent lose of electrons from the small aperture A Picoammeter mea...

Страница 13: ...nnections needed for an attachment system The basic connection requirement are X Y DAC output of the pattern generator to the SEM external scan interface and the video input from a detector on the SEM...

Страница 14: ...cal ELPHY Quantum connection diagram X DAC Output TTL Beam Blank Output Y DAC Output Video Input External mode SEM Switch SEM Interface Beam Blanker Electronics Quantum Card RS 232 SEM Control TCP IP...

Страница 15: ...C monitor ELPHY Plus Beam Blanker Electronics Stage controller Picoammeter when supplied should all be plugged into the distribution board The power for the board should be taken from the X DAC Output...

Страница 16: ...and switching on 2 3 2 Cables The cables should be tidy and routed away from any mains or heavy current carrying cables 2 3 3 Electronic equipment Electronic equipment can sometimes interfere with the...

Страница 17: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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