Quorum Q150T E, Инструкция по эксплуатации

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Q150T Sample Preparation System
10473 - Issue 5
48
Q150T - Instruction Manual
4. Edit other parameters as required.
5. Back on the Maintenance page, click on the OK button to confirm the changes or
on the Cancel button to restore the previous values.
6.2.5 Hardware
This option allows you to change the settings defining the configuration of your
instrument. The Q150T uses these settings in all profiles of type:
Timed Sputter and
FTM Terminated Sputter .
To change the settings, tap on Hardware and then tap on the Edit button. The Hardware
properties are displayed (see Figure 6-7 and Table 16 ).
Figure 6-7. Hardware settings (single target)
Table 16 Hardware settings
Name Default
Value
Minimum
Value Maximum
Value Comment
Target A Target material, if installed.
Target B Target material, if installed.
Target C Target material, if installed.
Vacuum Gauge
Type Read only: displays gauge type
Use Turbo
Pumping* Yes No Yes If No the turbo pump will not be
turned on during the pumping of
the chamber
FTM Present No No Yes
Turbo Present Yes No Yes
Stage Rotate Yes No Yes Set the state of the stage unless
overridden in the process profile
Stage Rotate
Speed Sets the speed of the stage
unless overridden in the process
profile
Available Targets* 1 1 3 Sets the number of auxiliary
sputter inserts allowing the whole
insert to be changed making the
use of multiple materials easier
* Admin group level required to edit this property
1. To edit a parameter, tap on its value.
2. Change the value as required. The instrument displays a dialog box for editing
purposes, with either a numeric keypad or keyboard as required. The dialog box
also shows the allowed values for the parameter.