PRF-912B & PRV-913V Miniature Concentric Ring Fixture Set
3
I.
Introduction & Description
The PRF-912B Miniature
Concentric Resistance Fixture
accurately measures surface
resistance of small areas. It
consists of a PRF-912B
Concentric Resistance Fixture,
shielded cable equipped with
BNC connectors, and a BNC to
male banana connectors adapter.
The
optional
PRV-913B Dual
Verification Fixture is designed to
confirm the proper operation of
the PRF-912B and high
resistance PRF-914B Miniature
Concentric Resist-ance Fixtures.
The PRF-912B is designed to
work in conjunction with a
precision wide range resistance
instrument, such as the
PROSTAT PRS-801 Resistance System, and an insulated test bed (e.g., PTB-920 or
equivalent). This instrument and fixture combination provides direct surface resistance
measurements in ohms, generally in accordance with the ESD Association’s S11.11 Surface
Resistance test standard. To obtain an estimate of ASTM D-257 Surface Resistivity in
ohms/square, simply multiply the PRF-912 fixture measurement by 10, i.e., add one order of
magnitude.
A. PRF-912B Concentric Resistance Fixture Description
This precision fixture is designed in miniature to approximate surface resistance
measurements typically obtained with the ESD Association’s ESD S11.11 Surface
Resistance Standard fixture. The PRF-912B, however, is approximately 1/10
th
the size of
the S11.11 fixture. Based on its size the PRF-912B is often referred to as a “micro
probe”.
1. The resistance measurement range of the PRF-912B fixture is 0.9 ohms at <10 volts
to 1.0E+12 (1.0x10
12
) ohms at 100 volts.
2. The miniature concentric fixture consists of a spring loaded 0.10 inch (2.54 mm)
diameter center electrode surrounded by 10 each 0.06 inch (1.5 mm) diameter
contact electrodes that electrically form a continuous outer ring. (Figure 2) Contacts
are pogo-pin type ATE quality probes made of beryllium Copper coated with 60
microinch of hard Gold.
Shielded
Cable
With
BNC
Connectors
BNC to Male
Banana
Adapter
PRF-912
Mi i t
Concentric
Resistance
Fixture
PRV-913 Resistance Fixture
Verification Reference
BNC
Connection
Cover
Probe Cover
Figure 1: PRF-912B Miniature Concentric Resistance Fix-
ture Measurement Set with Optional PRV-913B Dual
Verification Fixture.
