190
0
50
10
40
90
60
20
30
80
70
Weight
ON
OFF
ON
OFF
→
Time
Pilot valve signal
Vacuum
Atmospheric pressure
→
Time
→
Vacuum
level
→
Vacuum
level
●
Vacuum Generator VN
●
Conventional Vacuum Generator
Large dispersion in response time
Small dispersion in response time
Vacuum
Atmospheric pressure
Pilot valve signal
High speed response
Fine control of the pressure dedicated to
vacuum break prevents small workpieces
blow off.
Gauge Union Type Regulator
Small-sized plug-in Type
Vacuum Filter
Vacuum Pad
Workpiece
Vacuum Generator VN
Indivisual air supply port type
Suction solenoid valve
Air supply PV port for vacuum generation
Air supply PS port for vacuum break
Blow-off flow adjusting needle
Blow-off solenoid valve
Vacuum port (V)
Silencer
Ejector
Vacuum Generator
VN
& External Vacuum Controller
VNP
Series
Complex Vacuum Generator & External Vacuum Controller for High Speed & Stable Response
C
haracteristics
•
Perfect for use in an IC chip loader, IC handlers and other semiconductor manufacturing devices.
•
Limited space can be utilized.
Small size and lightweight vacuum generator & external vacuum controller.
In particular, the height is lowered for small space use.
●
Stand alone type
●
Manifold type
•
High speed, yet stable respose is realized. (ON/OFF=Max. 5msec)
Direct operated solenoid valve is used for the main valve.
•
Small workpiece is removed gently at vacuum break with blow-off.
Air supply port for blow-off is independent. Therefore, not only conventional flow adjustment but also using external regulator easily make the fine adjustment of blow-off
air.
●
Circuit Diagram
•
Common supply port type is also available.
Air supply port for vacuum generation and blow-off are common.
2011̲vacuum-4
11.8.4, 3:36 PM
190
