PI P-611 Series, Руководство пользователя

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10 Technical Data
P­611 Positioners PZ253E Version: 1.2.0 35
In this Chapter
Specifications ............................................................................................................................... 35
Dimensions .................................................................................................................................. 42
Torque for Stainless Steel Screws (A2-70) ................................................................................... 49
Pin Assignment ............................................................................................................................ 49
10.1 Specifications
10.1.1 Data Table
P­611.1S P­611.10 Unit Tolerance
Active axes X X
Motion and positioning
Integrated sensor SGS -
Travel range at -20 to
+120 V, open loop
120 120 µm +20 % /
-0 %
Travel range, closed loop 100 - µm
Resolution, open loop 0.2 0.2 nm typ.
Resolution, closed loop 2 - nm typ.
Linearity error, closed loop 0.1 - % typ.
Repeatability <10 - nm typ.
Pitch ±5 ±5 µrad typ.
Yaw ±20 ±20 µrad typ.
Flatness 10 10 nm typ.
Mechanical properties
Stiffness in motion direction 0.2 0.2 N/µm ±20 %
Resonant frequency, no load 400 400 Hz ±20 %
Resonant frequency, under
load, 30 g
300 300 Hz ±20 %
Resonant frequency, under
load, 100 g
195 195 Hz ±20 %
Push/pull force capacity in
motion direction
15 / 10 15 / 10 N max.
Load capacity 15 15 N max.
10 Technical Data