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10 Technical Data

L-738 / V-738 Precision XY Stage

MP183E

Version: 1.1.2

V-738.096111

Unit

Tolerance

Motion and positioning

Active axes

X, Y

Travel range

102 × 102

Integrated sensor

Incremental linear encoder, sin/cos

signal output

Design resolution*

0.001

µm

Sensor signal period

µm

Minimum incremental motion 0.02

µm

typ.

Unidirectional repeatability

0.1

µm

typ.

Bidirectional repeatability

±0.25

µm

typ.

Angular error yrx (pitch)

±40

µrad

typ.

Angular error yrz (yaw)

±20

µrad

typ.

Angular error yrx (pitch)

±40

µrad

typ.

Angular error yrz (yaw)

±20

µrad

typ.

Straightness / flatness

±2

µm

typ.

Orthogonality

±96.963

µrad

typ.

Velocity

500

mm/s max.

Acceleration in X, Y, without

load

m/s²

max.

Reference and limit switches Optical

Mechanical properties

Load capacity

100

max.

Permissible

torque in θX, θY

130

max.

Permissible torque in θZ

max.

Guide

Recirculating ball bearing

Drive properties

Motor type

Ironless 3-phase linear motor

Operating voltage

nom.

max.

Peak force

200

max.

Nominal force

typ.

Peak current, effective

typ.

Nominal current, effective

4.4

typ.

Force constant, effective

N/A

typ.

Motor constant

N/√W

typ.

Electrical time constant

0.4

Содержание L-738 Series

Страница 1: ...100 With stepper motor without encoder L 738 051111 With stepper motor and linear encoder sin cos signal transmission L 738 051112 With stepper motor and linear encoder A B quadrature signal transmission L 738 053111 With DC motor and linear encoder sin cos signal transmission L 738 053112 With DC motor and linear encoder A B quadrature signal transmission L 738 053132 With DC motor and rotary enc...

Страница 2: ...e Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG reserves all rights The use of any text images and drawings is permitted only in part and only when indicating the source Original instructions First printing 17 July 2019 Document number MP183E MMa Version 1 1 2 Subject to change without notice This manual is ...

Страница 3: ...Motion 10 3 4 Product Labeling 10 3 5 Scope of Delivery 11 3 6 Suitable Controllers 12 3 7 Technical Features 13 3 7 1 Encoder 13 3 7 2 Limit Switches 13 3 7 3 Reference Point Switch 13 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installation 17 5 2 Attaching the L 738 V 738 to a Surface 19 5 3 Connecting the L 738 V 738 to the Protective Earth Conductor 22 5 4 Affixing the Load to the L...

Страница 4: ...rvice 35 10 Technical Data 37 10 1 Specifications 37 10 1 1 Data Table 37 10 1 2 Maximum Ratings 42 10 1 3 Ambient Conditions and Classifications 42 10 1 4 Limit Switch Specifications 43 10 1 5 Reference Point Switch Specifications 43 10 2 Dimensions 44 10 3 Pin Assignment 46 10 3 1 HD D Sub 26 Male 46 10 3 2 D Sub 15 Female 49 10 4 Tightening Torque for Screws ISO 4762 A2 49 11 Old Equipment Disp...

Страница 5: ...rsions of the user manuals are available for download on our website p 5 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation If not avoided the dangerous situation will result in minor injury Actions to take to avoid the risk NOTICE Dangerous situation If not avoided the dangerous situation will result i...

Страница 6: ...ances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 4 Other Applicable Documents The devices and software tools from PI that are mentioned in this documentation are described in separate manuals Product Document Positioners with electric motors MP146EK Short instructions for positioners with electric motors SMC Hydra motion controller Hardware manual SM...

Страница 7: ...e controller p 12 The controller is not included in the scope of delivery of the V 738 2 2 General Safety Instructions The L 738 V 738 is built according to state of the art technology and recognized safety standards Improper use of the L 738 V 738 may result in personal injury and or damage to the V 738 Only use the L 738 V 738 for its intended purpose and only use it if it is in good working ord...

Страница 8: ...turer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in damage to equipment Only install and operate the L 738 V 738 after you have read and understood this user manual Personnel Qualification The L 738 V 738 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified person...

Страница 9: ...ption L 738 051100 Precision XY stage 380 mm 380 mm width 102 102 mm travel range 150 150 mm clear aperture stepper motor L 738 051111 Precision XY stage 380 mm 380 mm width 102 102 mm travel range 150 150 mm clear aperture stepper motor incremental linear encoder with sin cos signal transmission 20 µm sensor signal period L 738 051112 Precision XY stage 380 mm 380 mm width 102 102 mm travel range...

Страница 10: ...recision XY stage 380 mm 380 mm width 102 102 mm travel range 150 150 mm clear aperture DC motor rotary encoder V 738 056111 PIMag precision XY stage 380 mm 380 mm width 102 102 mm travel range 150 150 mm clear aperture ironless 3 phase linear motor 48 V incremental linear encoder with sin cos signal transmission 20 µm sensor signal period 3 2 Product View 3 2 1 Important Components Figure 1 Impor...

Страница 11: ...V 738 056111 L 738 051100 L 738 051112 L 738 053112 L 738 053132 Pos Connection L 738 051111 L 738 053111 V 731 056111 L 738 051100 L 738 051112 L 738 053112 L 738 053132 1 Sensor connection X axis D Sub 15 panel plug 2 Sensor connection Y axis D Sub 15 panel plug 3 Motor connection X axis HD D Sub 26 panel plug 4 Motor connection Y axis HD D Sub 26 panel plug 5 Protective earth connection screw I...

Страница 12: ...rection of the motion of the platform X Y arrow direction Direction of motion on positive command 3 4 Product Labeling Figure 3 Product labeling see following table Position Labeling Description 1 Warning sign Electrostatic sensitive devices 2 Sensor X Encoder connection X axis 3 Sensor Y Encoder connection Y axis ...

Страница 13: ...ng from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers 5 X Motor connection X axis 6 Y Motor connection Y axis 7 4 Manufacturer s logo 8 Protective earth conductor connection p 22 9 4 L 738 V 738 Product series 3 5 Scope of Delivery Item number Component V 738 Stage according to order p 7 Motor cables and sensor cables according to the controller and stage order...

Страница 14: ... Yes L 738 051111 SMC Hydra 2 RS 232 LAN Yes L 738 051112 C 663 12 1 USB RS 232 daisy chain network Yes C 885 with C 663 12C885 20 USB LAN Yes L 738 053111 C 885 with C 891 11C885 20 USB LAN Yes C 891 1 RS 232 USB Yes SMC Hydra 2 RS 232 LAN Yes L 738 053112 L 738 053132 C 863 1 USB RS 232 LAN Yes C 884 4 RS 232 LAN Yes C 885 with C 863 20C885 40 USB LAN Yes V 738 056111 C 891 1 RS 232 USB Yes C 88...

Страница 15: ...the drivetrain e g the motor shaft Refer to the table in the Specifications section for the encoder resolution p 37 Model L 738 051100 does not have an encoder 3 7 2 Limit Switches The stage is equipped with optical limit switches Each limit switch sends its signal to the controller on a dedicated line The controller then stops the motion If the controller does not stop the motion in time the stag...

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Страница 17: ...8 with care 2 Compare the contents with the items listed in the contract and the packing list 3 Inspect the contents for signs of damage If there is any sign of damage or missing parts contact PI immediately 4 Keep all packaging materials in case the product needs to be returned 4 Unpacking ...

Страница 18: ......

Страница 19: ...eas are marked correspondingly and that the usual precautions are applied Keep sufficient distance from the positioner Apply corresponding precautions also for storage and transport of the positioner NOTICE Cable break A cable break leads to failure of the stage Install the stage so that the cable is not bent too strongly or crushed NOTICE Heating up of the L 738 V 738 during operation The heat pr...

Страница 20: ... the stage motions with a mounted load or make suitable calculations to detect collisions or unfavorable center of gravity constellations If necessary take suitable constructive measures to avoid collisions and instability in the overall system Avoid or mark danger zones that result from the installation of the stage and the application in accordance with the legal regulations ...

Страница 21: ... stage is tipped the platform can hit the hard stops without braking Only mount the V 738 056111 onto absolutely horizontal surfaces Remove the transport lock just before mounting onto the surface Requirements You have read and understood the general notes on installation p 17 You have provided a suitable surface for the required position and depth of the holes for accommodating the screws and loc...

Страница 22: ... key AF 5 Hex key AF 3 Mounting the stage onto a surface Figure 4 Remove the handle and the transport lock similar illustration 1 Screw for the handle 2 Handle 3 Perforated plate for the transport lock 4 Wing screw for the transport lock 5 Screw for the transport lock 1 Remove both handles With the hex key AF 3 loosen the screws for the handles see figure above 2 Remove the screw and both wing scr...

Страница 23: ...ixing holes through holes become accessible see figure below Figure 5 Positions of the through holes for mounting the stage blue dark arrows move the platform for access see light arrows It is possible to move the platform accordingly by hand 5 Align the stage on the surface so that the corresponding mounting holes in the stage and the surface overlap 6 Tighten all screws in the mounting holes sel...

Страница 24: ...must be connected to the protective earth conductor but it is not possible to connect the protective earth conductor directly to the load The load and the motion platform are connected conductively to each other INFORMATION Observe the applicable standards for connecting the protective earth conductor A protective earth connection is located on front side of the L 738 V 738 see also Figure 1 p 8 F...

Страница 25: ... cable 0 75 mm2 PH1 screwdriver or compliant tool Connecting the L 738 V 738 to the protective earth conductor 1 If necessary attach a suitable cable lug to the protective earth conductor 2 Remove the screw and the safety and flat washers of the protective earth connection p Figure 6 3 Tighten the screw together with the safety and flat washers to affix the cable lug of the protective earth conduc...

Страница 26: ...xed to the mounting holes on the motion platform The distance between the center of gravity of the load and the center of the motion platform is as small as possible in all directions At least two points are provided for affixing the load to the motion platform ideally three attachment points Tools and accessories At least 2 M6 screws of suitable length Suitable tool for tightening the screws Opti...

Страница 27: ... with the stage Requirements You have read and understood the general notes on installation p 17 You have installed the controller You have read and understood the user manual of the controller The controller is switched off Tools and accessories Cable from the scope of delivery of the stage p 11 Suitable tools for tightening the screws to the connections Connecting the L 738 V 738 to a Controller...

Страница 28: ......

Страница 29: ...om the positioner Apply corresponding precautions also for storage and transport of the positioner CAUTION Risk of crushing by moving parts There is a risk of minor injury from crushing between the moving parts of the stage or the load and a fixed part or obstacle Use protective structures to keep limbs away from areas in which they could be caught by moving parts Observe the safety distances in a...

Страница 30: ...ly connected Operating voltages that are excessively high or incorrectly connected can cause damage to the V 738 Do not exceed the operating voltage range that is specified for the V 738 Only operate the L 738 V 738 when the operating voltage is properly connected NOTICE Damage or considerable wear due to high accelerations High accelerations can cause damage to or considerable wear on the mechani...

Страница 31: ...ed You have read and understood the manual of the PC software used The controller and the required PC software have been installed All connections on the controller have been set up see Connecting the L 738 V 738 to the Controller p 25 and the user manual of the controller Starting up the stage 1 Start up the controller s see user manual of the controller Configure the controller s during start up...

Страница 32: ......

Страница 33: ... a maintenance run over the entire travel range in order for the lubricant present to be evenly distributed If the L 731 is to be operated continuously in an industrial environment over a small travel range 20 of the entire travel range perform a maintenance run across the entire travel range every 5000 motion cycles Lubrication Under laboratory conditions the stage needs extra lubrication in exce...

Страница 34: ......

Страница 35: ... model Mechanical system does not move no operating noise can be heard Controller not correctly connected or defective Check all connecting cables Check the controller If necessary check the power supply of the stage For L 738 0511xx models Actual position deviates from the displayed position The motor is overloaded by an external load torque or the mass to be driven in the case of strong accelera...

Страница 36: ...P183E L 738 V 738 Precision XY Stage 8 2 Manually Moving the Platform INFORMATION It is necessary to repeat the reference move after moving manually and connecting to the controller The platform can be moved by hand without additional aid ...

Страница 37: ...nformation ready Product and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available on our website ...

Страница 38: ......

Страница 39: ...emental linear encoder with A B quadrature signal transmission Design resolution 10 0 001 0 01 µm Sensor signal period 20 µm Minimum incremental motion 0 2 0 05 0 05 µm typ Unidirectional repeatability 0 2 0 05 0 05 µm typ Bidirectional repeatability 2 0 5 0 5 µm typ Reference point switch repeatability 1 1 1 µm typ Angular error xry pitch 40 40 40 µrad typ Angular error xrz yaw 20 20 20 µrad typ ...

Страница 40: ...resolution 200 200 200 Operating voltage 24 24 24 V nom 48 48 48 V mx Miscellaneous Operating temperature range 5 to 40 5 to 40 5 to 40 C Moved mass in X unloaded 13 8 13 8 13 8 kg 5 Moved mass in Y unloaded 5 8 5 8 5 8 kg 5 Humidity 20 90 rel not condensing Material Aluminum black anodized Connection Motor Sensor 2 HD D Sub 26 m Motor 2 HD D Sub 26 m Sensor 2 D Sub 15 f Motor Sensor 2 HD D Sub 26...

Страница 41: ...0 5 0 5 2 µm typ Reference point switch repeatability 1 1 1 µm typ Angular error xry pitch 40 40 40 µrad typ Angular error xrz yaw 20 20 20 µrad typ Angular error yrx pitch 40 40 40 µrad typ Angular error yrz yaw 20 20 20 µrad typ Straightness flatness 2 2 2 µm typ Orthogonality 96 963 96 963 96 963 µrad typ Velocity 50 50 90 mm s max Reference and limit switches optical optical optical Mechanical...

Страница 42: ...0 5 to 40 C Material Aluminum black anodized Connection 2 HD Sub D 26 m motor 2 Sub D 15 f sensor 2 HD Sub D 26 m motor sensor 2 HD Sub D 26 m motor sensor Recommended controller SMC Hydra double axis C 891 single axis C 885 with C 891 11C885 up to 20 axes ACS modular controller C 863 single axis C 884 up to 6 axes C 885 with C 863 20C885 to 40 axes ACS modular controller C 863 single axis C 884 u...

Страница 43: ...yp Angular error yrx pitch 40 µrad typ Angular error yrz yaw 20 µrad typ Straightness flatness 2 µm typ Orthogonality 96 963 µrad typ Velocity 500 mm s max Acceleration in X Y without load 10 m s max Reference and limit switches Optical Mechanical properties Load capacity 100 N max Permissible torque in θX θY 130 Nm max Permissible torque in θZ 90 Nm max Guide Recirculating ball bearing Drive prop...

Страница 44: ...d controller SMC Hydra C 891 C 885 with C 891 11C885 Modular ACS controller 10 1 2 Maximum Ratings The L 738 V 738 stages are designed for the following operating data Except for V 738 not suitable for continous operation Maximum operating voltage 48 V 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed Area of application For indoor ...

Страница 45: ...s Normal motor operation low 0 V Limit switch reached high 5 V 10 1 5 Reference Point Switch Specifications Type Optical sensor Supply voltage 5 V GND supplied by the motor controller through the motor connector Signal output Open Collector Signal logic Direction sensing by means of different signal levels on the left and right side of the reference point switch The signal level changes from 0 to ...

Страница 46: ... Data 44 Version 1 1 2 MP183E L 738 V 738 Precision XY Stage 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 8 Dimensions Platform in reference position ...

Страница 47: ...10 Technical Data L 738 V 738 Precision XY Stage MP183E Version 1 1 2 45 Figure 9 Dimensions Platform moved out ...

Страница 48: ...or A Motor Motor A V Input 4 Motor A Motor Motor A V Input 5 Motor B Motor B W Input 6 Motor B Motor B W Input 7 Motor B Motor B Input 8 Motor B Motor B Input 9 10 REF REF Output 11 Limit neg Limit neg Output 12 Limit pos Limit pos Output 13 14 15 16 17 ID I O ID I O Bidirectional 18 Limit Power 5 V Limit Power 5 V Output 19 Encoder A Encoder A Output 20 Encoder A Encoder A Output 21 Encoder B Enc...

Страница 49: ...otor Input 2 Motor Input 3 Motor Input 4 Motor Input 5 6 7 8 9 10 REF Output 11 Limit neg Output 12 Limit pos Output 13 14 15 16 17 ID I O Bidirectional 18 Limit Power 5 V Input 19 Encoder A Output 20 Encoder A Output 21 Encoder B Output 22 Encoder B Output 23 Encoder C Output 24 Encoder C Output 25 GND GND 26 Encoder Power 5 V DC Input ...

Страница 50: ...738 056111 Pin Signal Direction 1 Phase 1 U Input 2 Phase 1 U Input 3 Phase 2 V Input 4 Phase 2 V Input 5 Phase 3 W Input 6 Phase 3 W Input 7 8 9 10 REF Output 11 Limit neg Output 12 Limit pos Output 13 14 15 16 17 ID Output 18 Limit Power 5 V Input 19 20 21 22 23 24 25 GND 26 ...

Страница 51: ...utput 4 sin Output 5 Temp GND 6 cos Output 7 cos Output 8 Limit neg Output 9 NTC Output 10 REF Output 11 PTC Output 12 REF Output 13 Output 14 GND 15 Limit pos Output 10 4 Tightening Torque for Screws ISO 4762 A2 The following tightening torques for screws according to ISO4762 corresponds to DIN 912 A2 may not be exceeded Value Maximum tightening torque M3 1 5 Nm M4 2 Nm M5 2 5 Nm M6 3 Nm ...

Страница 52: ......

Страница 53: ...according to international national and local rules and regulations In order to fulfil the responsibility as the product manufacturer PI miCos GmbH undertakes environmentally correct disposal of all old PI miCos equipment made available on the market after 13 August 2005 without charge Any old PI miCos equipment can be sent free of charge to the following address PI miCos GmbH Freiburger Strasse 3...

Страница 54: ......

Страница 55: ... EU Declaration of Conformity has been issued for the L 738 V 738 in accordance with the following European directives EMC Directive RoHS Directive The applied standards certifying the conformity are listed below EMC EN 61326 1 Safety EN 61010 1 RoHS EN 50581 12 EU Declaration of Conformity ...

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