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0xE000200 Servo Update Time
Description:
Servo cycle time.
Data type
FLOAT
Command level
2
Item type
System
Source of data
PC software commands (
ments
0xF000100 Stage Type
Description:
Mechanics type.
Data type
CHAR
Command level
2
Item type
Axis
Source of data
ID chip of the mechanics
Possible values
x-xxx default positioners
x-xxxKxxx customized positioners
0xF000200 Stage Serial Number
Description:
Serial number of the mechanics.
Data type
CHAR
Command level
2
Item type
Axis
Source of data
ID chip of the mechanics
Possible values
9-digit number
10 PARAMETER REFERENCE
PZ285EN
‒
1/30/2019
201
M O T I O N | P O S I T I O N I N G