Pfeiffer HIPACE 30 Скачать руководство пользователя страница 50

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Description

Order number

Centering ring with multifunction coating and integrated protection screen, DN 63

ISO-K/-F

PM 016 208 -U

Centering ring with integrated mesh screen, DN 40 ISO-KF

PF 113 240 -T

Centering ring with integrated splinter shield, DN 40 ISO-KF

PM 006 375 -X

Splinter shield for Pfeiffer Vacuum turbopumps

PM 016 312

Protection screen for DN 63 CF-F

PM 016 333

Set of stud screws for flanges with through-hole, DN 63 CF-F

PM 016 733 -T

Vibration damper for HiPace 60/80, DN 63 ISO-K

PM 006 800 -X

Vibration damper for HiPace 60/80, DN 63 CF-F

PM 006 801 -X

Vibration damper for HiPace 60/80, DN 40 ISO-KF

PM 006 799 -X

TPS 180, power supply pack for wall/standard rail fitting

PM 061 341 -T

TPS 181, power supply pack 19" rack module 3HU

PM 061 345 -T

Mains cable 230 V AC, CEE 7/7 to C13, 3 m

P 4564 309 ZA

Mains cable 115 V AC, NEMA 5-15 to C13, 3 m

P 4564 309 ZE

Mains cable 208 V AC, NEMA 6-15 to C13, 3 m

P 4564 309 ZF

Connection cable with RS-485 interface for TC 110/120 to power supply pack

PM 061 350 -T

Connection cable with RS-485 interface and 2 accessory ports for TC110/120 to

power supply pack

PM 061 351 -T

DCU 002, Display Control Unit

PM 061 348 AT

DCU 180, Display control unit incl. power supply pack 19”

PM C01 821

Y-Connector M12 to RS-485

P 4723 010

USB converter to RS-485 interface

PM 061 207 -T

Interface cable, M12 m straight/M12 m straight, 3 m

PM 061 283 -T

TIC 010, Adapter for two sensors

PT R70 000

TCS 11, adapter for TC 110/120 with RS-485 interface

PM 061 636 -U

TCS 12, adapter for TC 110/120 with interface RS-485, 4 accessory ports and cou-

pling set

PM 061 638 -U

TCS 13, adapter for TC 110/120 with interface RS-485, 2 accessory ports and cou-

pling set

PM 061 856 -U

Air cooling for HiPace 30 with TC 110

PM Z01 348

Water cooling for HiPace 30 | HiPace 80 mini with push-in fitting, 8 mm

PM 016 847 -T

Connection cable with RS-485 interface and 3 accessory ports for TC110/120 to

power supply pack

PM 061 512 -T

Connection cable for HiPace with TC 110/120

PM 061 543 -T

Connection cable incl. 2 accessory ports for TC 110/120 to power supply pack

PM 061 552 -T

Venting valve, shielded, 24 V DC, G 1/8", for connection to TC 110/120

PM Z01 290

Sealing gas valve, shielded for HiPace 30/60/80 with TC 110

PM Z01 310

Relay box for backing pumps, 1-phase 20 A for TC 110/120 and TCP 350, plug M8

PM 061 373 -T

Relay box, shielded, for backing pumps, 1-phase 7A for TC 110/120 and TCP 350,

plug M8

PM 071 282 -X

RPT 010, Digital Piezo/Pirani Sensor

PT R71 100

IKT 010, Digital cold cathode sensor, low current

PT R72 100

IKT 011, Digital cold cathode sensor, high current

PT R73 100

Tbl. 13:

HiPace 30 accessories

Accessories

50/56

Содержание HIPACE 30

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HIPACE 30 Turbopump ...

Страница 2: ...ffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and variants of your product Note that your product may not be equipped with all features described in this document Pfeiffer Vacuum constantly adapts its products to the latest state of the art without prior ...

Страница 3: ... 1 2 Rotor bearing 17 3 1 3 Drive 17 3 2 Scope of delivery 17 3 3 Identifying the product 18 3 3 1 Product types 18 3 3 2 Product features 18 4 Transportation and Storage 19 4 1 Transport 19 4 2 Storage 19 5 Installation 20 5 1 Preparatory work 20 5 2 Connecting the high vacuum side 20 5 2 1 Requirements for the dimensioning of a counter flange 20 5 2 2 Consider earthquake protection 21 5 2 3 Usin...

Страница 4: ... responsibilities 36 7 3 Replacing the operating fluid reservoir 37 7 3 1 Removing the operating fluid reservoir 37 7 3 2 Install operating fluid reservoir 38 7 4 Replace the electronic drive unit 39 7 4 1 Removing electronic drive unit 40 7 4 2 Install the electronic drive unit 40 7 5 Confirming the rotation speed specification 41 8 Decommissioning 42 8 1 Shutting down for longer periods 42 8 2 R...

Страница 5: ...tory setting of the electronic drive unit for turbopumps when delivered 31 Tbl 8 Behavior and meaning of the LEDs on the electronic drive unit 34 Tbl 9 Factory settings for delayed venting in turbopumps 35 Tbl 10 Characteristic nominal rotation speeds of the turbopumps 41 Tbl 11 Troubleshooting turbopumps 45 Tbl 12 Overview of the spare parts available for the HiPace 30 48 Tbl 13 HiPace 30 accesso...

Страница 6: ... screw and through hole 27 Fig 10 Example of fore vacuum connection on HiPace 30 27 Fig 11 Example of accessory connection via adapter TCS 12 28 Fig 12 Example Connecting the grounding cable 29 Fig 13 Connecting the electronic drive unit to a power supply pack 30 Fig 14 Removing the operating fluid reservoir 38 Fig 15 Insert capillary rods and install operating fluid reservoir 39 Fig 16 Removal of...

Страница 7: ...nit TC 110 RS PT 0351 BN Declaration of conformity Part of this document You can find these documents in the Pfeiffer Vacuum Download Center 1 1 2 Product variants HiPace 30 DN 63 ISO K TC 110 HiPace 30 DN 63 CF F TC 110 HiPace 30 DN 40 ISO KF TC 110 1 2 Target group These operating instructions are aimed at all persons performing the following activities on the product Transportation Setup Instal...

Страница 8: ...of the vacuum pump Rating plate of the electronic drive unit The electronic drive unit rating plate is located on the top Operating instructions note This sticker indicates that this operating instructions must be read before performing any tasks Protection class This sticker describes protection class 1 for the product Its placement indicates the position for the ground connection warranty seal C...

Страница 9: ...ic drive unit control parameters Printed in bold as three digit number in square brackets Frequently displayed in conjunction with a short description Example P 312 software version S1 S1 switch on power supply pack T Temperature in C TC Turbopump electronic drive unit turbo controller TPS Voltage supply turbo power supply VV Fore vacuum flange fore vacuum connection WAF Width across flats X3 15 p...

Страница 10: ...Danger of property damage Notice is used to address practices not related to physical injury Instructions on avoiding property damage Notes tips or examples indicate important information on the product or on this document 2 2 Safety instructions All safety instructions in this document are based on the results of the risk assessment carried out in accordance with Machinery Directive 2006 42 EC An...

Страница 11: ...um chamber WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892 When using a vibration compensator this will probably lead to the turbopump being sheared off in use The energy that this would release could throw the entire turbopump or sha...

Страница 12: ...he vacuum pump or in its vicinity Wear protective equipment e g gloves WARNING Risk of serious injury in the event of vacuum pump destruction due to over pressure Gas entry with very high over pressure results in destruction of the vacuum pump There is a risk of serious injury due to ejected objects Never exceed the permissible 1500 hPa absolute inlet pressure on the suction side or the vent ing a...

Страница 13: ...a sheet Dispose of the operating fluid reservoir according to applicable regulations Risks in the event of malfunctions WARNING Danger to life from the turbopump breaking away in the event of a fault Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892 If the turbopump is not properly secured it can shear off The energy that this would release could throw the...

Страница 14: ...rmity of the overall system in the context of the relevant European Direc tives before commissioning that system General safety precautions when handling the product Observe all applicable safety and accident prevention regulations Check that all safety measures are observed at regular intervals Do not expose body parts to the vacuum Always ensure a secure connection to the earthed conductor PE Ne...

Страница 15: ...intentional is regarded as misuse in particular Establishing the voltage supply without correct installation Installation with non specified fastening material Pumping explosive media Pumping of corrosive media Pumping of condensing vapors Pumping of fluids Pumping of dust Operation with impermissible high gas throughput Operation with impermissible high fore vacuum pressure Operation with excessi...

Страница 16: ...s documentation In addition these individuals must be familiar with applicable safety regulations and laws as well as the other standards guidelines and laws referred to in this documentation The above individuals must have an explicitly granted operational authorization to commission program configure mark and earth devices systems and circuits in accordance with safety technology standards Train...

Страница 17: ...nction connection X3 7 Turbo rotor 15 LED operating mode display 8 High vacuum connection DN 63 CF F 3 1 1 Cooling Convection cooling Air cooling optional The electronic drive unit automatically regulates the drive power downward at excess temperatures 3 1 2 Rotor bearing Hybrid bearing turbopump High vacuum side wear free permanent magnetic bearing Fore vacuum side ball bearing with ceramic balls...

Страница 18: ... on the pumping speed of the vacuum pump and if required an additional feature description Family Size model Property attribute feature HiPace 10 to 2800 none Standard version mini Compact version U Overhead version C Corrosive gas version P Process M Active magnetic bearing T Temperature management Plus Low vibration low magnetic field E High efficiency H High compression I Ion implantation Tbl 3...

Страница 19: ...e weight specified on the rating plate Where possible always transport or ship the turbopump in its original packaging Always carry the turbopump with both hands Remove the protective cover only immediately prior to installation 4 2 Storage We recommend Pfeiffer Vacuum recommends storing the products in their original transport packaging Storing the turbopump 1 Seal all flange openings with the or...

Страница 20: ...uring installation Do not start the turbopump with open vacuum connections Always carry out the mechanical installation before electrical connection Prevent access to the high vacuum connection of the turbopump from the operator side e g open vacuum chamber General notes for the installation of vacuum components Choose an installation location that permits access to the product and to supply lines...

Страница 21: ...depth of the fixing screws 170 N mm2 at 2 5 x d 270 N mm2 at 1 5 x d Maximum permissible surrounding magnetic field 3 0 mT Maximum permissible irradiated thermal output 1 2 W Tbl 5 Requirements for the dimensioning of customer specific high vacuum connection Important information for correct installation Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connection of the t...

Страница 22: ... rotor in the high vacuum flange 5 2 4 Using the vibration compensator Pfeiffer Vacuum vibration compensators are suitable for use on vibration sensitive systems WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892 When using a vibration c...

Страница 23: ... any forces from the piping system to act on the turbopump 4 Do not load the high vacuum flange of the turbopump on one side 5 2 6 Installation of ISO KF flange ISO flange connections For the connection of flanges in ISO KF or ISO K design twisting may occur in the event of sudden blockage of the rotor despite correct installation Leak tightness of the flange connection however is not jeopardized ...

Страница 24: ...cket screws cross wise in 3 steps Tightening torque 5 15 25 2 Nm 5 2 8 Installation of ISO K flange onto ISO F The connection types for the installation of ISO K with ISO F flange are Claw and tapped hole Hexagon head set screw and tapped hole Stud screw and tapped hole Stud screw and through bore ISO flange connections For the connection of flanges in ISO KF or ISO K design twisting may occur in ...

Страница 25: ...erve the minimum tensile strength of the flange material and the screw in depth 3 Place the collar flange over the high vacuum flange on the turbopump 4 Insert the snap ring into the side groove on the high vacuum flange of the turbopump 5 Fasten the turbopump onto the counter flange in accordance with the diagram using the collar flange snap ring and centering ring 6 Utilize all prescribed compon...

Страница 26: ...gh vacuum flange 3 Place the seal exactly in the hollow 4 Connect the flange with the components of the mounting kit according to the figure 5 Tighten the screw couplings all the way around Tightening torque 22 2 Nm 6 Then check the torque since flowing of the sealing material may make it necessary to re tighten the screws Fig 8 Flange connection CF F stud screw and tapped hole Connection of the s...

Страница 27: ...a fault causes fittings to accelerate There is the risk of damaging on site connections e g fore vacuum line and resulting leaks This results in leakage of process media In processes involving toxic media there is a risk of injury and danger to life due to poisoning Keep masses connected to the turbopump as low as possible Use flexible lines to connect to the turbopump where necessary Suitable bac...

Страница 28: ...tronic drive unit is only possible using the corresponding connection cable and or adapter on the X3 multi functional connection Configure the required accessory output via RS 485 using Pfeiffer Vacuum display and control units or PC X3 B1 ACC A1 DO2 DO1 1 3 2 4 5 6 7 Fig 11 Example of accessory connection via adapter TCS 12 1 Multifunction connection X3 5 Digital output DO2 2 Adapter TCS 6 Digita...

Страница 29: ...ng a suitable grounding cable to discharge applicative interfer ences M4 Fig 12 Example Connecting the grounding cable Procedure 1 Use the turbopump ground terminal M4 female thread 2 Route the connection in accordance with locally applicable provisions 5 5 2 Establishing the electric connection DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved...

Страница 30: ...ay and control unit via RS 485 Connection cable with RS 485 interface and accessory connections from TC 110 TC 120 to power supply unit Power supply via power supply unit Connection of accessory devices with M8 plug Connection to display and control unit via RS 485 Connection bridges from TC 110 TC 120 to power supply unit Power supply via power supply unit Automatic startup via bridges on pins 2 ...

Страница 31: ...e is set correctly by P 027 in the electronic drive unit Consult Pfeiffer Vacuum before you use gases with higher molecular masses 80 Important settings and function related variables are factory programmed into the vacuum pump elec tronic drive unit as parameters Each parameter has a three digit number and a description Parameter driven operation and control is supported via Pfeiffer Vacuum displ...

Страница 32: ...ve unit with E74 version 6 2 3 Operation via multi function connection X3 Remote control is available via the 15 Pole D Sub connection with the X3 designation on the electron ic drive unit The accessible individual functions are mapped to PLC levels Instructions for remote control operation See the electronic drive unit operating instructions 6 2 4 Operation via Pfeiffer Vacuum display and control...

Страница 33: ...ipment e g gloves WARNING Risk of serious injury in the event of vacuum pump destruction due to over pressure Gas entry with very high over pressure results in destruction of the vacuum pump There is a risk of serious injury due to ejected objects Never exceed the permissible 1500 hPa absolute inlet pressure on the suction side or the vent ing and sealing gas connection Make sure that high process...

Страница 34: ...flowing back into the vacuum system from the fore vacuum area 6 5 1 Switching off Notes for switching off the turbopump 1 Shut down the turbopump via the control unit or remote control 2 Close the fore vacuum line 3 Switch off the backing pump if necessary 4 Vent the turbopump options see below 5 Close the supply lines e g for cooling water or sealing gas 6 5 2 Venting CAUTION Risk of injuries due...

Страница 35: ...n down period to initiate a proper venting process When power is re stored the venting process is interrupted Switch off the turbopump The venting process starts automatically Venting speed P 720 Venting duration P 721 Venting duration in the event of a power failure 50 of rated speed 3600 s 3600 s Tbl 9 Factory settings for delayed venting in turbopumps General information for fast venting We rec...

Страница 36: ... of cuts on moving sharp edged parts when reaching into the open high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situations with risk of injury There is a risk of cuts from accessing sharp edged rotating parts when removing the turbopump Wait until the turbopump comes to a standstill rotation speed f 0 Switch the turbopump off properly Secur...

Страница 37: ...nsuitable tools for removal or insertion of sealing rings damages the sealing surfaces causing vacuum pump leakage Never use sharp metallic tools e g tweezers Only remove sealing rings with an O ring picker You can find the safety data sheet in the Download Center Prerequisites The turbopump is off The turbopump has cooled down The vacuum system is vented to atmospheric pressure The electrical sup...

Страница 38: ...p on the closed high vacuum flange 4 Unscrew the rubber metal bumper from the turbopump bottom 5 Unscrew the Torx screws from the housing cover 6 Remove the housing cover from the pump base 7 Be careful with the O ring use an O ring picker to remove if needed 8 Remove the operating fluid reservoir from the pump base by hand 9 Pull the old capillary rods out of the pump base using tweezers 7 3 2 In...

Страница 39: ...connection of compo nents Even after the mains power is switched off the turbopump continues to deliver electrical energy dur ing its run down period If the turbopump and electronic drive unit are disconnected prematurely there is the risk of body contact and consequently the destruction of electronic components Never disconnect the turbopump and electronic drive unit from each other if power is s...

Страница 40: ...nt part Prerequisites Turbopump is off see chapter Switching off page 34 The vacuum system is vented to atmospheric pressure see chapter Venting page 34 The electrical supply is disconnected All cables are disconnected from the electronic drive unit All openings are sealed with the original protective covers 7 4 1 Removing electronic drive unit Required tools Torx screwdriver TX 10 3 4 5 1 2 Fig 1...

Страница 41: ...asure for preventing excess rotation speed HiPace Nominal rotation speed 10 30 60 80 1500 Hz 300 1000 Hz 450 1100 Hz 400 700 800 820 Hz Tbl 10 Characteristic nominal rotation speeds of the turbopumps Required aids A connected Pfeiffer Vacuum display and control unit Knowledge of the configuration and setting of electronic drive unit operating parameters Adjusting the nominal rotation speed confirm...

Страница 42: ...within the specified temperature range 9 In rooms with humid or aggressive atmospheres Hermetically seal the turbopump together with a drying agent in a plastic bag 8 2 Recommissioning NOTICE Risk of damage to the turbopump as a result of operating fluid aging after recommissioning The shelf life of the operating fluid of the turbopump is limited Aging of the operating fluid may lead to the failur...

Страница 43: ...a risk to health from contact with these poisonous substances Illegal disposal of toxic sub stances causes environmental damage Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media Decontaminate affected parts before carrying out maintenance work Wear protective equipment Procedure Dispose safely of all substances according to local regulati...

Страница 44: ...event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892 When using a vibration compensator this will probably lead to the turbopump being sheared off in use The energy that this would release could throw the entire turbopump or shattered pieces from its interior through the surrounding space Potentially dangerous gases can escape There is ...

Страница 45: ...play and control unit Thermal load due to lack of ventilation water flow too low fore vacuum pressure too high ambient temperature too high Reduce the thermal load Ensure adequate air supply Adjust the cooling water flow Reduce the fore vacuum pressure Adapt the ambient conditions Turbopump not achieving the ul timate pressure Turbopump is polluted Heat the turbopump if required Have it cleaned Co...

Страница 46: ... and addresses can be found on our website in the Pfeiff er Vacuum Service section Advice on the optimum solution is available from your Pfeiffer Vacuum contact partner For quick and smooth handling of the service process we recommend the following steps 1 Download the current form templates Declaration of Service Request Service Request Declaration of Contamination a Dismantle all accessories and...

Страница 47: ...containers e Observe the applicable transport conditions ERKLÄRUNG KONTAMINIERUNG 6 Affix the declaration of contamination to the outside of the packag ing 7 Then send your product to your local Service Center 8 You will receive a confirmation message a quotation from Pfeiff er Vacuum For all service orders our General Terms and Conditions of Sales and Supply and General Terms and Conditions of Re...

Страница 48: ...Pieces 1 Electronic drive unit TC 110 refer to the rating plate depending on the con nection panel 1 2 Operating fluid reservoir PM 183 900 T incl capillary rods and O ring 1 3 Rubber metal bumper P 0101 527 1 Tbl 12 Overview of the spare parts available for the HiPace 30 Spare parts HiPace 30 48 56 ...

Страница 49: ...ithout control Air cooling For processes with low gas throughputs and good fore vacuum pressure air cooling can be used inde pendently of a water supply Automatic control through the integrated electronic drive unit of the turbo pump Heating Heating jackets enable the ultimate pressure to be reached more quickly during process cleaning Auto matic control through the integrated electronic drive uni...

Страница 50: ...ack 19 PM C01 821 Y Connector M12 to RS 485 P 4723 010 USB converter to RS 485 interface PM 061 207 T Interface cable M12 m straight M12 m straight 3 m PM 061 283 T TIC 010 Adapter for two sensors PT R70 000 TCS 11 adapter for TC 110 120 with RS 485 interface PM 061 636 U TCS 12 adapter for TC 110 120 with interface RS 485 4 accessory ports and cou pling set PM 061 638 U TCS 13 adapter for TC 110 ...

Страница 51: ...measurement duration Sound pressure level at distance to vacuum pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 1 1 105 1000 100 750 Pa 0 01 1 10 5 1 0 01 1 10 3 7 5 10 3 hPa 1 1 10 3 100 1 0 1 0 75 kPa 10 0 01 1000 10 1 7 5 Torr mm Hg 1 33 1 33 10 3 133 32 1 33 0 133 1 1 Pa 1 N m2 Tbl 14 Conversion table Pressure units mbar l s Pa m3 s sccm Torr l s atm cm3 s mbar l ...

Страница 52: ...W min 1 48 81000 W min 1 48 81000 W min 1 Power characteristic line in gas mode 1 vertex A 60 90000 W min 1 60 90000 W min 1 60 90000 W min 1 Power characteristic line in gas mode 1 vertex B 69 81000 W min 1 69 81000 W min 1 69 81000 W min 1 Power characteristic line in gas mode 2 vertex E 80 90000 W min 1 80 90000 W min 1 80 90000 W min 1 Power characteristic line in gas mode 2 vertex F 80 81000 ...

Страница 53: ...30 24 V 13 3 Dimensions Dimensions in mm VV DN 16 ISO KF G1 4 HV DN 63 ISO K 30 32 32 32 32 Ø 86 Ø 97 55 M4 10 deep 4x 64 5 98 5 110 100 37 5 94 5 98 5 63 9 Fig 19 Dimensions HiPace 30 DN 63 ISO K VV DN 16 ISO KF G1 4 30 32 32 32 32 Ø 86 Ø 97 55 M4 10 deep 4x 100 37 5 63 9 108 5 74 5 108 5 120 94 5 HV DN 63 CF F Fig 20 Dimensions HiPace 30 DN 63 CF F VV DN 16 ISO KF G1 4 HV DN 40 ISO KF 30 32 32 3...

Страница 54: ...e authorized representative for the compilation of technical documents is Mr Hel mut Bernhardt Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany Turbopump HiPace 30 Harmonized standards and applied national standards and specifications DIN EN ISO 12100 2011 ISO 21360 1 2016 DIN EN 1012 2 2011 ISO 21360 4 2018 DIN EN 61000 3 2 2015 DIN EN IEC 63000 2019 DIN EN 61000 3 3 2014 DIN EN 61010...

Страница 55: ...55 56 ...

Страница 56: ... PT0510 ed D Date 1907 P N PT0510BEN ...

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