Table of contents
1
1.1
1.1.1 Applicable documents
1.1.2 Variants
1.2
1.3
1.3.1 Instructions in the text
1.3.2 Pictographs
1.3.3 Stickers on the product
1.3.4 Abbreviations
1.4
2
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.8.1 Ensuring personnel qualification
2.8.2 Personnel qualification for maintenance and repair
2.8.3 Advanced training with Pfeiffer Vacuum
2.9
3
3.1
3.2
3.2.1 Axial ion source
3.2.2 Crossbeam ion source
3.2.3 Grid ion source
3.3
3.3.1 QMA 430
3.3.2 QMA 400
3.3.3 QMA 410
3.4
3.4.1 SEV 217
3.4.2 Detecting negative ions
3.4.3 SEV 218
3.5
3.5.1 Cathode materials
3.5.2 Electron collimation magnet
3.5.3 90° deflection
3.5.4 90° deflection with deflection voltage
3.5.5 Faraday cup
3.5.6 Vacuum-annealed QMA
3.6
3.7
4
4.1
4.2
5
5.1
Preparing analyzer for installation
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