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Betriebsanleitung • Operating Instructions

PT 0263 BE/A (0901)

Turbo Pumping Station

HiCube 80 Eco

Содержание HiCube 80 Eco

Страница 1: ...Betriebsanleitung Operating Instructions PT 0263 BE A 0901 Turbo Pumping Station HiCube 80 Eco ...

Страница 2: ... 10 5 6 Connecting accessories 11 6 Operation 12 6 1 Commissioning 12 6 2 Operation modes 12 6 3 Function description 12 6 4 Operation with gas ballast valve 13 6 5 Monitoring of the operation conditions 14 6 6 Switching off and venting 14 7 Maintenance replacement 16 7 1 Maintenance intervals and responsibilities 16 7 2 Removal of components for their maintenance 16 8 Decommissioning 19 8 1 Shutt...

Страница 3: ...UVdotCOM ID 0000021320 1 2 Conventions Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk evaluations and hazard analyses and are oriented on international certification standards as specified by UL CSA ANSI Z 535 Semi S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered HiCube 80 Eco Operating ins...

Страница 4: ...the diagrams High vacuum flange Fore vacuum connection Electric connection Air cooling unit Venting connection Sealing gas connection Exhaust connection Prohibition of an action or activity in connection with a source of danger the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform a...

Страница 5: ...densing vapors Operation with improper high levels of gas loads Operation with improper high fore vacuum pressures Operation with improper gas mode Operation with improper high levels of insulated heat input Venting with improper high venting rates The operation of the devices in potentially radioactive areas The operation of the devices in systems where the turbopumps are subjected to impact like...

Страница 6: ... further connection ports by using the corresponding protective covers Only store the pumping station indoors at an ambient temperature between 25 C and 55 C In rooms with moist or aggressive atmospheres the pumping station must be airproof shrink wrapped in a plastic bag together with a bag of dessicant Warranty void if seal is broken NOTE Warranty seal The product is sealed at the factory Damagi...

Страница 7: ...02 is used to control and monitor the pumping station The DCU can be detached from the pumping station and used together with an interface cable M12 accessory as a remote control Feature HiCube 80 Eco Operating instructions High vacuum flange DN 63 ISO K DN 63 CF DN 40 ISO KF Flange material Aluminium Stainless steel Aluminium Turbopump HiPace 80 HiPace 80 HiPace 80 PT 0208 BN Electronic drive uni...

Страница 8: ...7 9 Electronic drive unit TC 110 8 Power supply pack TPS 110 9 Display and control unit DCU 002 option 10 1 Main switch 11 Backing pump diaphragm pump MVP 015 2 12 Air cooling unit 1 1 7 9 7 12 11 8 9 10 1 Installation location weather protected indoors Temperature 5 C to 40 C up to 35 C with air cooling Protection category IP 20 Protection class I Relative humidity max 80 at T 31 C up to max 50 a...

Страница 9: ...able screening sheets if necessary design information on re quest 5 3 Connecting the high vacuum side The assembly of superstructure on the pumping station HiCube 80 Eco is in the op erator s responsibility The load capacity of the high vacuum flange is specific for the used turbopump The gross weight of superstructure on the pumping station HiCube 80 Eco may not exceed 50 kg Observe barycentric s...

Страница 10: ...ltage ranges 180 254 V 50 60 Hz 90 126 V 50 60 Hz Set the desired voltage range on the voltage selector switch using a suitable screwdriver WARNING Ensure safe electrical installation Safe operation after installation is the responsibility of the operator Do not independently modify or change the pump and electrical equipment Make sure that the system is integrated in an emergency off safety circu...

Страница 11: ...tch position 115 230 Voltage ranges 90 126 V 50 60 Hz 180 254 V 50 60 Hz 115 230 115 230 NOTE Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories The installation operation and maintenance of connected devices are described in detail in the operating instructions of the individual components For information on the operating instructi...

Страница 12: ...rive unit of the turbopump per forms a self test to check the supply voltage Once the self test has been success fully completed the turbopump and the backing pump begin to operate CAUTION Danger of the pump being destroyed Pumping of gases with the molecular mass 39 in the wrong gas mode can lead to destruction of the pump Ensure the gas mode is correctly set Contact Pfeiffer Vacuum before using ...

Страница 13: ...shers from the front panel of the display and control unit Lift out the display and control unit from the housing Be careful of the housing seal Swap the connecting cable between the display and control unit and the electro nic drive unit marked RS 485 for a longer M12 interface cable accessory 6 4 Operation with gas ballast valve Steam or moisture from pumped media can condense in the vacuum pump...

Страница 14: ...ing back from the fore vacuum area Switching off without the DCU Switch off the pumping station at the master switch Venting possibilities see below For water cooling Shut off the water supply Switching off with the DCU Switch off the pumping station via the ON OFF button on the DCU Switch off the pumping station at the master switch Venting possibilities see below For water cooling Shut off the w...

Страница 15: ...ng of the vacuum chamber in two steps Ask for details on individual solutions from Pfeiffer Vacuum Vent for 20 seconds at a rate of pressure rise of max 15 mbar s The valve cross section for the venting rate of 15 mbar s must be adapted to the size of the vacuum chamber For small vacuum chambers use the Pfeiffer Vacuum venting valve Then vent with an additional venting valve of any desired size Ve...

Страница 16: ...the relay box Take off the connector from the electronic drive unit TC 110 Detach the accessory control lines from the connector and remove them WARNING Contamination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with materials that damage health In the case of contamination carry out appropriate safety precautions in order to pre vent danger to health t...

Страница 17: ...ain tenance work on the turbopumpturbopump e g change the lubricant reservoir NOTE Note the factory settings The accessory connections on the turbopump have been preconfigured at the factory If the control lines on the connector are mixed up this can cause the pumping station to malfunction or fail Do not mix up the control lines Accessory connections can be configured for operation with the DCU F...

Страница 18: ... stand frame Fig 7 Disassembly of the diaphragm pump from the pumping stand frame Unscrew and remove the fastening nuts 30 from the bottom of the frame Take off the mounting bracket from the diaphragm pump Unscrew the fastening screws 35 Allen head far enough from the frame until the backing pump becomes detached Lift out the diaphragm pump above the top of the pumping station frame 1 1 Housing 1 ...

Страница 19: ... commissioning in accordance with the operating instructions 8 3 Disposal Products or parts thereof mechanical and electrical components operating fluids etc may cause environmental burden Safely dispose of the materials according to the locally applicable regulations WARNING Contamination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with materials that...

Страница 20: ...ted LEDs on the electronic drive unit of the turbopump light up Electrical supply interrupted Check the plug contacts at the relay box and the power supply unit Check the supply lines of the pumping stati on Check the output voltage 24 VDC at the DC out terminal of the power supply unit Check the plug contacts on the power supp ly unit Incorrect operating voltage Apply correct operating voltage Ob...

Страница 21: ...overs If possible send pump or unit in the original packaging Sending of contaminated pumps or devices No units will be accepted if they are contaminated with micro biological explosive or radioactive substances Hazardous substances are substances and com pounds in accordance with the hazardous goods directive current version If pumps are contaminated or the declaration on contamination is missing...

Страница 22: ...Integral leack rate using a Helium concentration of 100 period 10 s Acoustic pressure Distance 1 m to the pump 12 2 Technical data 12 3 Dimensions Parameter HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco Flange in DN 63 ISO K DN 63 CF F DN 40 ISO KF Venting connection G 1 8 G 1 8 G 1 8 Run up time 1 7 min 1 7 min 1 7 min Enddruck 1 10 7 mbar 5 10 10 mbar 1 10 7 mbar Cooling method standard Luft Luft Lu...

Страница 23: ...ce with the provision of EU Directive 98 37 EEC The product specified below is in correspondence to the EU directives Machin ery 98 37 EEC Electromagnetic Compatibility 89 336 EEC and Low Voltage 2006 95 EEC HiCube HiCube 80 Eco Guidelines harmonised standards and national standards in languages and specifications which have been applied EN 1012 2 EN 12100 1 EN 12100 2 EN 13857 EN 50081 1 EN 50081...

Страница 24: ...9 0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service ...

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