Pfeiffer Vacuum HEPTA 100 P, Руководство по эксплуатации

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Gas type Dry nitrogen
Recommended pressure setting at the pressure regulating valve 500 hPa
Filtration 5 μm
Recommended flow rate 20 SLM
Tbl. 10: Requirements for the ballast gas
5.7 Connecting the flushing gas system
1
2
3
4
5
6
7
Fig. 10: Connecting the flushing gas system
1 Flow rate meter, flow regulator 5 Pressure regulating valve
2 Solenoid valve 6 Flushing gas connection
3 Vacuum flange 7 Nitrogen monitoring tablet
4 Pressure gauge
Procedure
1. Connect the flushing gas connection to the gas supply.
– Connection size: 1/4" thread, ISO 228-1
2. Connect the electrics of the solenoid valve.
1(+)
PE
2 (-)
Fig. 11: Connection data for the solenoid valve
● U = 24 VDC; P
max
= 8 W
● Contact: Normally closed
Gas type Dry nitrogen
Gas temperature 0 – 60 °C
Max. gas pressure 13000 hPa
Recommended pressure setting at the pressure regulating valve 500 hPa
Filtration 5 μm
Recommended flow rate Hepta 100 P
Hepta 200 P SLM ≥ 40
Hepta 300 P SLM ≥ 50
Tbl. 11: Requirements for the flushing gas
Installation
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