Pfeiffer Vacuum DUO 5 MC, Руководство по эксплуатации, Страница: 53 / 60

14 Technical data and dimensions
14.1 General
Basis for the technical data of Pfeiffer Vacuum rotary vane pumps:
● Specifications according to PNEUROP committee PN5
● ISO 21360-1: 2016: “Vacuum technology - Standard methods for measuring vacuum-pump per-
formance - Part 1: General description”
● Leak test to ascertain the integral leakage rate according to EN 1779: 1999 technique A1; with
20 % helium concentration, 10 s measurement duration
● Sound pressure level according to ISO 3744, class 2
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1
1 · 10
-3 100 1 0.1 0.75
bar 1000 1
1 · 10 5
1000 100 750
Pa 0.01
1 · 10
-5 1 0.01
1 · 10
-3
7.5 · 10
-3
hPa 1
1 · 10 -3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33
1.33 · 10 -3
133.32 1.33 0.133 1
1 Pa = 1 N/m
2
Tbl. 14: Conversion table: Pressure units
mbar l/s Pa m 3 /s sccm Torr l/s atm cm 3 /s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m 3 /s
10 1 592 7.5 9.87
sccm 1.69 · 10 -2 1.69 · 10 -3 1 1.27 · 10 -2 1.67 · 10 -2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm
3
/s
1.01 0.101 59.8 0.76 1
Tbl. 15: Conversion table: Units for gas throughput
14.2 Technical data
Type designation Duo 5 M Duo 5 M Duo 5 M Duo 5 M
Part number PK D61 105 PK D61 707 PK D61 712 PK D61 017
Connection flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 25 ISO-KF
Connection flange
(out)
DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF –
Pumping speed at 50
Hz
5 m³/h 5 m³/h 5 m³/h 5 m³/h
Pumping speed at 60
Hz
6 m³/h 6 m³/h 6 m³/h 6 m³/h
Final pressure with
gas ballast
7 · 10 -3 hPa 7 · 10 -3 hPa 7 · 10 -3 hPa 7 · 10 -3 hPa
Final pressure without
gas ballast
4 · 10 -3 hPa 4 · 10 -3 hPa 4 · 10 -3 hPa 4 · 10 -3 hPa
Gas ballast flow 192 l/h 192 l/h 192 l/h 192 l/h
Water vapor capacity
50 Hz
44 g/h 44 g/h 44 g/h 44 g/h
Water vapor capacity
60 Hz
53 g/h 53 g/h 53 g/h 53 g/h
Water vapor tolerance
at 50 Hz
13 hPa 13 hPa 13 hPa 13 hPa
Technical data and dimensions
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