Pfeiffer Vacuum ATH 1603 M, Руководство по эксплуатации

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Or-
der
Pa-
ra-
me-
ter
Description Functions
STA none g
0
to g
24
:
warnings
and defaults
bit
g 0 = ok 1 = warning 2 = fault
0 Seized pump Not accelerating
1 Fault (any)
2
3
4
5
Drive fault
6
7
Mag. suspens.
8 Power voltage
9
10
Upper radial bearing Yh
11 Upper radial bearing Xh
12 Lower radial bearing Yb
13 Lower radial bearing Xb
14 Axial bearing Z
15 Bearing Bearing change
16 Electronic temperature Electronic temperature
17 Pump temperature, pump sen-
sor
Pump temperature
18
19
20
Self check
21
22
23
24
Internal communication
8.5 Operation via fieldbus
Connecting and using Pfeiffer Vacuum turbomolecular pumps with a fieldbus system is possible when
the corresponding control interface is installed on the pump (depends on the ordering guide).
► Refer to the operating instructions of the corresponding control interface (see chapter “Applicable
documents”).
Interfaces for control
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