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A63.7015

Tungsten Filament Scanning Electron
Microscope, SE, 20x~150000x

Instruction Manual

To ensure the safety and obtain satisfactory performance, please study this instruction manual thoroughly before start to use the instrument.

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Содержание A63.7015

Страница 1: ...m A63 7015 Tungsten Filament Scanning Electron Microscope SE 20x 150000x Instruction Manual To ensure the safety and obtain satisfactory performance please study this instruction manual thoroughly before start to use the instrument ...

Страница 2: ... to working distance Rotate the upper and lower parts of the two nuts mounted on the bracket the height of the upper edge of the sample and the lower part of the limit arm of the clamp After completion tighten the fixing nuts in opposite directions without changing the height of the sample If the sample is relatively high a nut can be removed to adjust the height Fix the stage on the bracket and t...

Страница 3: ...ght are solid and do not flash If the signal tone continues to call you need to push the door again and press it again Exchange key 5 Select the SENSE SEM icon on the computer desktop double click to start the software and acquire images according to the sequence of operations 6 Click the stop button on the software after the image is taken to close the software 7 Press and hold EXCHANGE to releas...

Страница 4: ...ge for best results 3 Select the detector type SE BSE used for this observation and analysis Secondary Electrons Backscattered Electrons 4 Select High Vacuum mode High Vacuum Low Vacuum means high vacuum low vacuum 5 Click the Start button and the electron gun emits an electron beam to form an image Note 1 The software cannot be run when the SEM power is turned off or the SEM PC Cable is not conne...

Страница 5: ... to adjust the value of Spot Size Electron Amount The lower the parameter the brighter 5 30 SE image If the graphics are unstable or relatively bright and white adjust the parameters to the right as above 20 70 BSE image The image cannot be seen at all 1 Confirm the filament value beam current value in the upper left corner of the image display window 2 Use when looking for sample observation poin...

Страница 6: ...table The nature of the face varies The lower the multiple the smaller the inclination angle the higher the multiple The angle of inclination is large The sample has obvious convex and concave and the inclination angle is small The product is relatively flat and the inclination angle is large 2 Use the mouse cursor to adjust the magnification zoom to the left zooms out and to the right the magnifi...

Страница 7: ...own direction of the image from the bottom left to the top right 2 Right click on the wobble when the field of view is a high speed real time image the image sways so much that it is impossible to distinguish the shaking direction Reduce the shaking frequency A and repeat the above 1 steps Note 1 The swing function needs to be adjusted when changing the voltage or changing the aperture size 2 Afte...

Страница 8: ... adjusting the spot size according to the sample The characteristics and equipment conditions are the same as the above Difference according to the actual observation condition setter Combined spot pattern During BSE image operation 1 50 before after you can get the best combined image effect When changing the detector click the detector selection area on the software red box in the picture above ...

Страница 9: ... rotationally symmetric magnetic field Operation essentials 1 Can not be used when shooting images below 3 000 times no big difference 2 The image is not clearly clear after high magnification adjustment and focus When the clearest position Note The adjustment range of X and Y is plus or minus 20 and the astigmatism is positive In the range of minus 20 a clear image cannot be obtained and the edge...

Страница 10: ... picture before saving 3 Photo Mode1 1280x960 30 seconds high resolution image storage 4 Photo Mode2 2560x1920 60 seconds higher resolution image storage 5 Photo Mode3 5120x3840 90 seconds highest resolution image storage 5 Mode software main interface can be switched at will 10 Image Storage Click the save icon after the image acquisition is completed you will be prompted to set the storage path ...

Страница 11: ...tton when you want to change the acceleration voltage during the image analysis process When start is displayed stop collecting images then change the voltage and then click start to restart the operation 12 11 11 When changing samples click the stop button on the software When start is displayed press the EXCHANGE button 11 on the device to release the vacuum and then you can replace the sample a...

Страница 12: ...ring tool 1 The Measuring Tools function can measure and store parameters such as length angle area etc Click the Pause button after finishing Photo mode 1 2 or 3 Measure the bar and store the picture select the measurement tool Click Can delete and edit mark data ...

Страница 13: ...ve dust and contamination on it Wiped Please ensure that the sealing ring does not directly contact other pollution sources such as skin or clothes to avoid secondary pollution Carefully inspect the seals for dirt or blemishes If defects or deformation are found the sealing ring needs to be replaced Dip a small amount of vacuum grease and spread it evenly on the surface of the sealing ring Use eth...

Страница 14: ... limits Reconnect the main unit of the equipment with the vacuum pump pipe Air hose and oil mist 2 Troubleshooting 1 Troubleshooting If the equipment is abnormal during use please operate according to the tips in this chapter If a malfunction not mentioned in this chapter occurs When you are born please stop running the equipment and contact our company The Troubleshooting Inspection System should...

Страница 15: ...open the switch please contact the after sales engineer Note If it is confirmed that the power plug is correctly inserted into the power supply box and the switch of the E L B leakage protector is on When it is on please pay special attention that even if you do not turn on the switch button on the front of the device the SMPS and other parts of the device will not work may be charged 2 2 PC Start...

Страница 16: ...ure Problem A continuous beep of BB is emitted from the internal motherboard of the device during the vacuuming process Reason The vacuum pump tube between the mechanical vacuum pump and A63 7015 A63 7006 is not properly connected Mechanical vacuum pump failure Molecular pump failure The sample compartment door is not fully closed Solution Check the connection status of the vacuum pump between the...

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