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279

177

464

494

559

520 (

620)

680

700

700

520

580

800

(Unit: mm)

(Unit: mm)

349.5

350

170

353

417

176

406~456

190

415

■ 

Monitor *

LEXT unit dimensions

LEXT configuration dimensions

■ 

Control unit

■ 

PC *

14

W e l c o m e   t o   t h e   w o r l d   o f   L E X T   3 D

Specifications

Laser scan

Universal

Observation method

Laser

Laser, Laser confocal  DIC, Brightfield, DIC

Microscope stand Illumination

Laser

408 nm LD laser, Class 2

White light

White LED illumination

Z stage

Vertical movement/Maximum height of specimen

70 mm/100 mm

Z revolving nosepiece

Stroke/Resolution/Repeatability

10 mm/0.01 µm/3 

σ

=0.04+0.002L µm

Objective lens

5x, 10x, 20x, 50x, 100x

Total magnification

120x–14400x

Field of view

2560x2560–21x21 µm

Optical zoom

1x–6x

Stage *

Manual stage/Motorized stage

100x100 mm/150x100 mm

Frame memory

Intensity/Height

1024x1024x12 bit/1024x1024x16 bit

AF

Laser reflection type

Dimensions

464(W)x559(D)x620(H) mm

Weight

56.9 kg

57.5 kg

*300 mm x 300 mm stage is optional upon special order basis.

* PC & monitor have slightly different dimensions dependent on the area of region.

Содержание Lext OLS3100

Страница 1: ...The name LEXT is formed from the words Laser and Next and means next generation 3D confocal laser microscopes CONFOCAL LASER SCANNING MICROSCOPE OLS3100 TM NEW ...

Страница 2: ... use for everyone Even a first time user can operate the system like an expert and obtain fast reliable measurement results The system features not only improved functionality but also an even higher level of measurement performance Constantly evolving toward greater simplicity and higher precision LEXT meets a diverse range of needs in fine surface profile measurement ...

Страница 3: ...2 W e l c o m e t o t h e w o r l d o f L E X T 3 D ...

Страница 4: ...nses and an automatic light intensity adjusting function keeps brightness levels unchanged after magnification switching High speed automatic focusing and one push gain enable the user to complete preparations for 3D image capturing quickly and easily The speed of the automatic focusing function has been made three times faster so that the user can reach an image or a point on an image in an insta...

Страница 5: ...ion patterns high precision measurement and advanced analytical techniques A captured image is rendered to an ideal 3D image by using LEXT s display capabilities High precise measurement high repeatability and advanced analytical techniques related to roughness and particle analyses provide the user with a new dimension of microscopic observation W e l c o m e t o t h e w o r l d o f L E X T 3 D D...

Страница 6: ...algorithm to prevent the quality of the enlarged image from deteriorating The background color can now also be changed to improve the observation and contrast of the specimen 3D measurement Step height line width and the distance between two points can now be measured on the 3D image Allowing measurement conditions to be recognized intuitively Display Measurement Step height measurement Line width...

Страница 7: ...d using the small laser spot Further minute roughness analysis can be made using the unique ROI function Roughness can also be made along a single line much like conventional roughness gauges W e l c o m e t o t h e w o r l d o f L E X T 3 D Analysis Toner film Surface Surface 1 Corny layer cells Reverse face of a Si wafer Texture Surface 2 Wired frame Texture Real color brightfield observation St...

Страница 8: ... in a brightfield observation Laser confocal Observation with a much higher level of resolution impracticable with conventional microscopes is now possible through a combination of a 408 nm laser and confocal optics Laser confocal DIC Microscopic unevenness on a surface can be observed in three dimensions in real time which is impossible with conventional laser microscopes Observation of surface c...

Страница 9: ...ta can be statistically processed to support advanced particle analyses Split screen display An image observed in one observation mode and the same image observed in another observation mode can be displayed simultaneously during live observation A target point can be located easily by observing a microscopic image with color information and a high resolution LSM Laser Scanning Microscope image si...

Страница 10: ... world s highest level of repeatability Advanced optical techniques of Olympus accumulated over years have made possible the planar measurement repeatability of 3σ 0 02 µm and the height measurement repeatability of 3σ 0 04 0 002L mm L measured length in µm A guide with high performance in terms of straightness and a high precision linear scale are used for Z axis scanning These parts combined wit...

Страница 11: ...the case of a specimen with multi structure patterns and holes varying reflectances pose a difficulty in measuring the height Using this sensitivity switching function it is possible to obtain information on optimal height and luminance for such types of specimen Note Sensitivity can be set for a maximum of five Z positions W e l c o m e t o t h e w o r l d o f L E X T 3 D Enhanced mode ON Enhance...

Страница 12: ...image as shown in the image to the left Foam made by being injected with tiny air bubbles has outstanding properties they are heat insulating flexible and shock absorbing Therefore such foam is widely used as the material of wet suits as packing and weather strips and as the material to make many other products The size of air bubbles and how uniformly the air bubbles are distributed have a great ...

Страница 13: ...urface of solder processed with the ion etching method This image shows that the tin Sn layer white part is made smoother by using the ion etching method An SEM requires vapor deposition whereas LEXT does not require pretreatment Therefore by using LEXT a specimen can be observed in its actual state Sticky notes are widely used for the convenient feature of applying peeling and applying again Minu...

Страница 14: ...siderably by specifying the image capturing method as a recipe setting Measured image Motorized stage OLS30 CS150AS Consecutive measurement of multiple points Registered positions on a specimen can be automatically and consecutively captured under the same conditions This makes it possible to automate the taking of measurements Recipe setting screen Consecutive setting screen Stitched Tiled image ...

Страница 15: ...illumination Z stage Vertical movement Maximum height of specimen 70 mm 100 mm Z revolving nosepiece Stroke Resolution Repeatability 10 mm 0 01 µm 3 σ 0 04 0 002L µm Objective lens 5x 10x 20x 50x 100x Total magnification 120x 14400x Field of view 2560x2560 21x21 µm Optical zoom 1x 6x Stage Manual stage Motorized stage 100x100 mm 150x100 mm Frame memory Intensity Height 1024x1024x12 bit 1024x1024x1...

Страница 16: ...Specifications are subject to change without any obligation on the part of the manufacturer OLYMPUS CORPORATION has obtained ISO9001 ISO14001 Printed in Japan M1619E 0107B ...

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