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DSX510/DSX510i System diagram
DSX-CP
Stage insert plates for DSX-HRIF
U-MSSP4
Stage plate
U-WHP2
Right hand control
large-size stage
Basic
Component
Option
Software
Frame
Stage
Objective
Lens
Option
DSX-HRSU
High resolution zoom head
DSX-TLCD
23” touch panel display
DSX-CTRL-E
Controller English OS
DSX-CB
Control box for DSX system
DSX-BSW
Software License
DSX-ASW-3D
3D measuring software
DSX-HRUF
Upright frame for DSX-HR
DSX-UFSSU
100 x 100 mm motorized
stage for Upright frame
U-SIC4R2
Right hand control
large-size stage
DSX-IFSSU
50 x 25 mm motorized stage
for Inverted frame
DSX-SFR
50 × 25 mm manual stage
for Inverted frame
BH2-WHR43
3’-4’ Wafer holder plate
XLMPLFLN10XDSX
DSX-HR specialized
objective lens 10X
DSX-CALS-HR
Calibration sample
for DSX510
DSX-HRIF
Inverted frame for DSX-HR
DSX-ASW-EDM
Edge detecting measurement
DSX-ASW-PAM
Particle analysis
DSX-ASW-SHDR
Super HDR software
XLMPLFLN40XDSX
DSX-HR specialized
objective lens 40X
BD-M-AD
Adopter to mount
BF objectives
UIS2 objective lenses
DSX-ILT
LED transmitted
light illuminator
OLS40-EMG
Emergency stop device
OLS40-EMG
Emergency
stop device
DSX-ILPS
High intensity
LED light source
LG-SF
Light guide
DSX510 Dimensions
DSX510i Dimensions
296
375
550
417
1300
278
215
338
363
550
1300
375
unit: mm