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Oerlikon SCROLLVAC SC 15 D, Руководство по эксплуатации

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13

GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum

Fig. 1.4  Pumping speed curves of the SCROLLVAC SC 5 D to SC 60 D

0,10

1,00

10,00

100,00

0,001

0,010

0,100

1,000

10,000

100,000

1000,000

     50 Hz with and without Purge
     60 Hz with and without Purge

SC5D

SC15D

SC30D

SC60D

P

u

m

p

in

g

 S

p

e

e

d

Pressure

m3/h

mbar

Description

Содержание SCROLLVAC SC 15 D

Страница 1: ...Oil free Vacuum Pump SCROLLVAC SC 5 D SC 15 D SC 30 D SC 60 D Operating Instructions GA01423_002_A2 Part Nos 133 000 133 001 133 002 133 003 133 004 133 008 133 100 133 101 133 102 ...

Страница 2: ... the Vacuum System 28 4 Operation 29 4 1 Start up 30 4 2 Pumping 31 4 3 Purge Gas Operation pumping of vapours 31 4 4 Shutdown 33 5 Maintenance 34 5 1 Table Maintenance 36 5 2 Oerlikon Leybold Vacuum Service 37 5 3 Waste Disposal 37 6 Troubleshooting 38 7 Spare Parts 39 EC Conformance Declaration 40 Declaration of Contamination 42 Table of contents 2 GA01423_002_A2 10 2008 Oerlikon Leybold Vacuum ...

Страница 3: ...r nearest Oerlikon Leybold Vacuum office Failure to observe the following precautions could result in serious personal injury Never pump toxic explosive flammable corrosive gases chemicals solvents or powders Flowing substances explosion or fire can cause bodily injury Install the pump in an area without explosive or flammable substances Otherwise it can cause explosion or fire Wiring must be done...

Страница 4: ...ock or bodily injury by rotating objects Use at ambient temperatures of 5 40 C during operation Operating outside of this range can cause damage or shorten service life A Allw wa ay ys s operate the pump with the fan and terminal covers in place A Allw wa ay ys s operate the single phase pumps with the capacitor cover in place Conduct periodic maintenance and inspections Failure to do so can cause...

Страница 5: ...15 D Three phase Always keep warning stickers clean If they become dirty or lost replace them with new ones If you need stickers contact Oerlikon Leybold Vacuum Electric shock Terminal cover Capacitor cover Cover for operating hours counter Electric shock Terminal cover Cover for operating hours counter 5 GA01423_002_A2 10 2008 Oerlikon Leybold Vacuum ...

Страница 6: ...ours counter Capacitor cover Electric shock Terminal cover Cover for operating hours counter Fig 0 2 Placement of the warning stickers Always keep warning stickers clean If they become dirty or lost replace them with new ones If you need stickers contact Oerlikon Leybold Vacuum SC 60 D Three phase Electric shock Terminal cover Cover for operating hours counter ...

Страница 7: ...econd spiral orbits about the fixed spiral thereby reducing respectively increasing the volume of the pockets whereby the gases are conveyed from outside to inside thereby being com pressed Description Fig 1 1 Component designations SC 5 D SC 5 D Inlet Fan Motor ON OFF switch under the cover Operating hours counter Fixed scroll 1 Orbiting scroll Venting connection Fixed scroll 2 Fan Fan cover Inle...

Страница 8: ...ndicating arrow Direction indicating arrow Motor Motor terminal box Motor terminal box Operating hours counter Operating hours counter Fan cover Fan cover Carrying handle Venting connection Rubber support Outlet flange DN 16 Inlet flange DN 25 Crane eyelet IN plate OUT plate Frame Inlet flange DN 40 Venting connection Outlet flange DN 25 ...

Страница 9: ...se motor 133 008 SC 5 D single phase motor cable with NEMA plug 133 100 SC 15 D single phase motor cable with NEMA plug 133 101 SC 30 D single phase motor cable with NEMA plug 133 102 Fig 1 3 Component designations SC 60 D Belüftungsanschluss Einlassflansch DN 40 KF Auspuffflansch DN 40 KF Ventilatorabdeckung Drehrichtungsmarkierung Motor Motoranschlusskasten Betriebsstundenzähler Rahmen Kranöse S...

Страница 10: ...5 31 0 36 0 Ultimate pressure Pa 5 1 6 1 0 1 0 mbar 0 05 0 016 0 01 0 01 Torr 0 037 0 012 0 0075 0 0075 Leak rate3 mbar l s 1 1 0 10 6 1 0 10 6 1 0 10 6 1 0 10 4 Max inlet pressure Atmospheric pressure Ambient operating C 5 40 5 40 5 40 5 40 temperature range Gas temperature at inlet C max 50 max 50 max 50 max 50 Inlet connection DN 25 25 40 40 Exhaust connection DN 16 16 25 40 Cooling Air cooling...

Страница 11: ... Part numbers 133 100 133 000 Motor Data SC 15 D Type Single ph induction motor 4P Three phase induction motor5 4P totally enclosed totally enclosed insulation class B IP 44 insulation class B IP 44 thermal protector TP 212 automatic reset type Power consumption kW 0 4 0 4 Voltage V 100 115 200 230 200 208 230 380 400 415 460 Rated current 50 Hz A 4 8 2 6 2 4 1 6 0 9 0 9 1 0 60 Hz A 4 8 4 3 2 8 2 ...

Страница 12: ...Type Three phase induction motor5 4P totally enclosed insulation class B IP44 Power consumption kW 1 4 Voltages V 200 208 230 380 400 415 460 Rated current 50 Hz A 5 5 3 3 3 6 3 8 60 Hz A 5 8 5 8 5 7 3 5 Speed at 50 Hz min 1 1460 1470 1470 1470 60 Hz min 1 1730 1740 1750 1760 Noise level2 at 1m dB A 67 with purge gas open ON dB A 74 Direction of inlet Horizontal arranged at the side Dimensions L x...

Страница 13: ...1 4 Pumping speed curves of the SCROLLVAC SC 5 D to SC 60 D 0 10 1 00 10 00 100 00 0 001 0 010 0 100 1 000 10 000 100 000 1000 000 50 Hz with and without Purge 60 Hz with and without Purge SC5D SC15D SC30D SC60D Pumping Speed Pressure m3 h mbar Description ...

Страница 14: ...14 GA01423_002_A2 10 2008 Oerlikon Leybold Vacuum Description 1 3 2 Dimensions Fig 1 5 Dimensional drawing of the SC 5 D SC 5 D Dimensions in mm ...

Страница 15: ...01423_002_A2 10 2008 Oerlikon Leybold Vacuum Fig 1 6 Dimensional drawing of the SC 15 D 3 phasig 1 phasig SC 15 D Description Dimensions in mm T Th hr re ee e p ph ha as se e S Siin ng glle e p ph ha as se e ...

Страница 16: ...01423_002_A2 10 2008 Oerlikon Leybold Vacuum Description Fig 1 7 Dimensional drawing of the SC 30 D 3 phasig 1 phasig SC 30 D Dimensions in mm T Th hr re ee e p ph ha as se e S Siin ng glle e p ph ha as se e ...

Страница 17: ...ly crane eyelets Exclusively use lifting facilities with sufficient lifting capability Never stand under the hanging pump when it is being moved Avoid any other orientations during transportation Warning Fig 1 8 Dimensional drawing of the SC 60 D 390 218 285 163 320 467 133 421 350 55 42 168 SC 60 D Description Dimensions in mm ...

Страница 18: ... file a damage claim with the carrier Remove inlet blank flange and outlet blank flange If you operate the pump with blank flanges in place it can cause damage Check that the silencer for the purge gas inlet is present in the plastic bag Fig 3 1 Product check SC 5 D SC 15 D SC 5 D SC 15 D Plastic bag Silencer Clamp Blank flange O ring Inlet Outlet Clamp Blank flange O ring Plastic bag Silencer Cla...

Страница 19: ... Leybold Vacuum Fig 3 2 Product check SC 30 D SC 60 D Blank flange O ring Clamp Inlet Outlet SC 60 D Installation SC 30 D Plastic bag Silencer Clamp Blank flange O ring Clamp Blank flange O ring Inlet Outlet Plastic bag 60 D 60 72 8 1 4 ...

Страница 20: ...re range can cause damage fire or failure Ensure proper ventilation Install in a well ventilated area Poor ventilation can cause abnormal overheating fire or failure since the scroll pump is air cooled Necessary ventilation air SC 5 D over 2 m3 min 1 SC 15 D over 4 m3 min 1 SC 30 D over 8 m3 min 1 SC 60 D over 12 m3 min 1 Install in a proper location Install in an area which is not exposed to dust...

Страница 21: ...over the location should be free of corrosive gases Install the pump on a stable horizontal floor surface sloping by no more than 5 see Fig 3 3 Installing the pump on a sloping surface can cause the pump to fail If the floor is unstable secure the pump by using 4 x dia 7 mm holes in the pump base SC 5 D or 4 x dia 11 mm holes in the pump base SC 15 D or 4 x holes in the pump base for M10 screws an...

Страница 22: ...ains vol tages either 100 200V 50 Hz or 115 208 230V 60 Hz Check mains voltage and wiring 3 4 1 Single phase Motors Be sure to install a reliable main disconnect switch or breaker for emer gency stop In addition shut off the SC 5 D by turning off the switch on the motor Failure to do so can cause damage or fire The single phase motor has an internal thermal protector The motor restarts without war...

Страница 23: ...00 115 V and 200 230 V connection by changing the links If you want to change the connection remove the four nuts for the power terminal and change the links as illustrated in Figure 3 4 Two links are used at the 200 230 V connection Connect the power cord through the cable gland on the bottom side of terminal blocks SC 5 D SC 15 D SC 30 D Fig 3 4 Single phase connection 200 230 V mains connection...

Страница 24: ...a breaker Use power cord and ground wire rated at greater than 10 A Use round type terminal Fit cable gland Connect ground wire to ground terminal After each modification of power supply cable wiring a new electrical safety test has to be done according to the national rules Operate pump with inlet open and check that air comes out from outlet If you plan to switch the pump ON OFF with remote cont...

Страница 25: ... recommended breaker Failure to do so can result in injury from electrical shock or fire Use a power cord and ground wire of over 2 mm2 rated at 7 A 3 phase for SC 15 D rated at 15 A 3 phase for SC 30 D rated at 15 A 3 phase for SC 60 D When using power cords which are only rated for lower currents there then exists the risk of excessively heating the wires risk of starting a fire Firmly fit prope...

Страница 26: ...ury or electric shock You can change to 208 230 V or 380 460 V connection by changing the links It is wired to 208 230 V connection when delivered to you If you want to change to 380 460 V connection remove the electric source terminal M4 nuts and change the links as illustrated in Figure 3 8 Connect the power cord through the cable gland on the bottom side of terminal box Connect L1 L2 L3 to U1 V...

Страница 27: ...g foreign matter into the inlet Dropping foreign matter into the pump can cause failure If the direction of rotation is wrong ensure that the incoming power is OFF and then interchange two of the input leads Installation Fig 3 8 Checking the direction of rotation after having provided the wiring Viewed from the motor side clockwise direction of rotation Fig 3 9 Prevent foreign matter from entering...

Страница 28: ...the isolation valve and the pump s inlet Opening this purge gas valve during operation removes dirt and water vapour from the pump Use the clean connecting tubing between vacuum chamber and vacuum pump We recommend the use of flexible tubing between the inlet of pump and the vacuum chamber so that the pump s vibration is not trans mitted to the vacuum chamber When connecting an exhaust line to the...

Страница 29: ...n cooling fans of stage 1 and stage 2 If done you can injure your fingers or foreign matter can blow into your eyes In order to ensure an adequate air supply the front side of SCOLLVAC SC 60 D must not be obstructed Pump clean gas Pump clean gas SC 5 D SC 15 D SC 30 D SC 60 D Fig 4 1 Never pump hazardous gases Fig 4 2 Hazardous points on the pump Finger foreign matter Fan cover Ventilation opening...

Страница 30: ... takes 6 8 hours to reach its ultimate pressure during its initial start up or after a long idle period Close the inlet isolation valve and continue operation for further 6 8 hours Open the purge gas valve for 3 5 seconds to atmosphere 2 3 times per hour While the pump was off moisture may have entered the pump extending the time needed to reach ultimate pressure Close the isolation valve between ...

Страница 31: ...C install a chiller or trap in the piping between the vacuum chamber and the pump to reduce the inlet vapour temperature to less than 50 C Pumping vapour of over 50 C can cause failure 4 3 Purge Gas Operation pumping of vapours When pumping vapour open the purge gas port of the SCROLLVAC If you pump vapour with the purge gas valve port closed condensed moi sture remains in the pump resulting in fa...

Страница 32: ...p Remove the silencer from the purge gas valve port and replace it with the plug Lightly tighten the plug with a wrench When supplying nitrogen gas or dry air to the purge gas valve port set the pressure equivalent to atmospheric pressure while keeping the flow below 9 l min 1 for the SC 5 D or 10 l min 1 for the SC 15 D SC 30 D and SC 60 D Exceeding a purge gas flow of 9 or 10 l min cause pump fa...

Страница 33: ...ack of debris from the vacuum pump into vacuum chamber during shutdown close the isolation valve open the purge gas valve if one is installed Switch the vacuum pump off When the pump stops atmospheric air is drawn back from the purge gas valve port to the inside of pump and pressure inside pump rises to about atmospheric pressure To maintain vacuum in the vacuum chamber and prevent the drawback of...

Страница 34: ...tch off the electric power before maintenance or inspection Switch off electric source Be sure to switch off the electrical power before maintenance or inspec tion Failure to do so can cause bodily injury from electric shock or rota ting objects More frequent maintenance is required if the ambient temperature is too high The maintenance interval is based on 5 40 C ambient temperatu re and 25 C ave...

Страница 35: ...over Fan Electric shock During inspection and maintenance work keep the power supply switched off SC 30 D SC 60 D SC 5 D SC 15 D Fig 5 2 During inspection and maintenance work keep the power supp ly switched off Electric shock Fan Fan cover Fan Maintenance ...

Страница 36: ... was done by the user or non specialist Maintenance interval Where to inspect Yearly or every Every two years or After having Remarks 8 000 hours every 16 000 hours pumped vapours 400x Ball bearing grease Tip seal Seal O ring Exhaust valve Purge Pin crank Stopper Vacuum pump itself inside cleaning inside cleaning inside cleaning Small maintenance kit Large maintenance kit Replace in case of malfun...

Страница 37: ...our employees We must return to the sender any equipment which is not accompanied by a contamination statement The pump must be packed in such a way that it will not be damaged during shipping and so that any contaminants are not released from the package 5 3 Waste Disposal The pump may be contaminated by the process or by environmental influen ces In this case it must be decontaminated in accorda...

Страница 38: ...d Replace Thermal protector trips Inspect connection Inspect connection Inspect voltage Inspect and repair Ultimate pressure is insufficient Air leaks for pumping Check tightness of piping Moisture or solvent has condensed Open inlet to atmosphere and operate in pump for a few minutes and then operate for about 24 hours with the inlet closed Install a trap or a filter to prevent water and solvent ...

Страница 39: ...icant P N P N P N P N EK 870000496 EK 870000497 EK 870000498 EK 870000519 P N P N P N P N EK 870000499 EK 870000500 EK 870000501 EK 870000520 P N P N P N P N EK 870000502 EK 870000503 EK 870000503 EK 870000521 P N P N P N P N E 870000510 E 870000511 E 870000512 E 870000522 P N P N P N P N EK 870000507 EK 870000508 EK 870000509 EK 870000523 P N P N P N P N EK 870000504 EK 870000505 EK 870000506 EK ...

Страница 40: ...40 GA01423_002_A2 10 2008 Oerlikon Leybold Vacuum ...

Страница 41: ...008 The product complies to the following European Council Directives EC Machinery Directive 98 37 EC EC Directive related to electrical equipment designed for use within certain voltage limits 2006 95 EC EC Directive relating to electromagnetic compatibility 2004 108 EC Related harmonized standards EN 1012 2 1996 Safety requirements for compressors and vacuum pumps Part 2 Vacuum pumps EN 60034 1 ...

Страница 42: ...____ B Condition of the equipment No1 Yes No Contamination No1 Yes 1 Has the equipment been used1 q q toxic q q 2 Drained Product service fluid q q corrosive q q 3 All openings sealed airtight q flammable q q 4 Purged q q explosive2 q q If yes which cleaning agent _______________________________________ radioactive2 q q and which method of cleaning _______________________________________ microbiol...

Страница 43: ...43 GA01423_002_A2 10 2008 Oerlikon Leybold Vacuum Notes ...

Страница 44: ...lès Valence Cedex Phone 33 4 75 82 33 00 Fax 33 4 75 82 92 69 info vacuum vc oerlikon com Great Britain Oerlikon Leybold Vacuum UK Ltd Unit 2 Silverglade Business Park Leatherhead Road UK Chessington Surrey KT9 2QL Sales Phone 44 13 7273 7300 Fax 44 13 7273 7301 sales vacuum ln oerlikon com Service Phone 44 20 8971 7030 Fax 44 20 8971 7003 service vacuum ln oerlikon com Italy Oerlikon Leybold Vacu...

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