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Oerlikon 230 002, Руководство по эксплуатации

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Operation 

 
 

GA 09.033/6.02 – (2011-07) – 

©

 Oerlikon Leybold Vacuum

 

47 

 

Ö

 normal: 

Good relationship between re-
sponse and sensitivity of the 
display and the switching func-
tions to changes in the meas-
ured values. 

 

Ö

 slow: 

CENTER ONE does not re-
spond to small changes in 
measured values. As a conse-
quence, it will also respond 
more slowly to changes in the 
measured values. 

 

 

Ö

  For CTR gauges only. The 

response of the CENTER ONE 
to signal changes depends on 
the measuring range. The dis-
play is especially stable in the 
low measuring range. 

  Measuring range  Filter           

 

  

FS 

… 

0.1 

FS 

Ö

 

nor

 (normal) 

 0.1 FS … 0.04 FS 

Ö

 

SLo

 (slow) 

 0.04  FS  …  0.01  FS 

Ö

 

≈

2.5 × 

SLo

 

 0.01  FS  … 

0   

Ö

 

≈

5 × 

SLo

 

 

Содержание 230 002

Страница 1: ...xcess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos In stock Ready to ship TAR certified secure asset solutions Expert team I Trust guarantee I 100 satisfaction All trademarks brand names and brands appearing herein are the property of their respec...

Страница 2: ...CENTER ONE Single Channel Vacuum Gauge Controller Operating Manual GA 09 033 6 02 Part numbers 230 002 235 002 ...

Страница 3: ...likon Leybold Vacuum D 50968 Köln Type No F No V Hz VA Validity This document applies to products with part numbers 230 002 Version for Europe 235 002 Version for USA and Japan The part number can be taken from the product name plate This document is based on firmware number BG 509 763 G If your unit does not work as described in this document please check that it is equipped with the above firmwa...

Страница 4: ...NTER ONE is used together with Leybold Vakuum Transmitters in this document referred to as gauges for total pressure measurement All products must be operated in accordance with the relevant operating instructions Trademarks THERMOVAC PENNINGVAC CERAVAC IONIVAC Oerlikon Leybold Vacuum ...

Страница 5: ...r 22 3 4 SENSOR Connector 23 3 5 Interface Connector RS232 25 3 6 CONTROL Connector 26 4 Operation 27 4 1 Front Panel 27 4 2 Turning CENTER ONE On and Off 29 4 3 Operating Modes 30 4 4 Measurement Mode 30 4 4 1 Operation 31 4 4 2 Turning the Gauge On Off 32 4 4 3 Gauge Identification 33 4 5 Parameter Mode 34 4 5 1 Operation 35 4 5 2 Parameters 37 4 6 Test Mode 51 4 6 1 Operation 52 4 6 2 Parameter...

Страница 6: ...Accessories 86 9 Storage 86 10 Disposal 87 Appendix 88 A Conversion Tables 88 B Default Parameters 89 C Firmware Update 90 D Literature 93 E Index 96 EC Declaration of Conformity 96 For cross references within this document the symbol XY is used for cross references to other docu ments the symbol Z ...

Страница 7: ...or equipment damage 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be car ried out by persons who have suitable technical train ing and the necessary experience or who have been instructed by the end user of the product 1 3 General Safety Instructions Adhere to the applicable regulations and take the necessary precautions for all work you are going to d...

Страница 8: ...rate into the unit Make sure no objects enter through the lou vers and no liquids penetrate into the equip ment Disconnecting device The disconnecting device must be readily identifiable and easily reached by the user To disconnect the controller from mains you must un plug the mains cable Disconnecting device acc to EN 61010 1 Communicate the safety instructions to all other users ...

Страница 9: ...ability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modifications altera tions etc on the product use the product with accessories not listed in the cor responding documentation ...

Страница 10: ...ration 20 60 C 5 50 C Relative humidity 80 up to 31 C decreasing to 50 at 40 C Use indoors only max altitude 2000 m NN Pollution degree II Protection type IP30 Compatible gauges Number 1 Compatible types Pirani Pirani Capacitive Cold cathode Cold cathode Pirani Capacitive Ionization Ionization Pirani TTR 90 TTR 211S TTR 91 TTR 91 S TTR 96 S TTR 100 TTR 100 S2 TTR 101 TTR 101 S2 PTR 225 PTR 90 CTR ...

Страница 11: ...es depending on gauge 1 16 Measurement error gain error offset error 0 02 FSr 0 05 FSr Measurement rate analog digital 100 s 50 s CTR 100 CTR 101 ITR 90 ITR 200 10 s ITR 100 Display rate 10 s Filter time constant slow normal nor fast 750 ms fg 0 2 Hz 150 ms fg 1 Hz 20 ms fg 8 Hz Measurement units mbar Pa Torr Micron Zero adjust for linear gauges Correction factor for logarithmic gauges 0 10 10 00 ...

Страница 12: ...lter time constant Adjustment range depending on gauge 1 16 Hysteresis 1 FSr for linear gauges 10 of measurement value for logarithmic gauges Switching function relay Contact type floating changeover contact Load max 125 V 60 W ohmic 110 V 2 A 60 W ohmic DANGER For benchtop use max 30 V or 60 V may be connected Service life mechanic electric 108 105 at maximum load Connector 9 pin D Sub male pin a...

Страница 13: ...enchtop use max 30 V or 60 V may be connected Service life mechanic electric 108 105 at maximum load Connector 9 pin D Sub male pin assignment 26 Contact positions 9 8 no error 9 8 error or no mains power Analog output Number 1 recorder output Voltage range 0 10 V Deviation from displayed value 50 mV Internal resistance 660 Ω Relationship measurement signal pressure depending on gauge 1 16 Connect...

Страница 14: ...3 character mnemonics bi directional data flow RS232C only TXD and RXD used Transmission rate 9600 19200 38400 baud Connector 9 pin D Sub female pin assignment 25 Dimensions mm 91 2 ø3 5 106 2 78 84 204 5 2 5 285 A 67 3 103 6 View A Use For incorporation into a rack or control panel or for use as desk top unit Weight 0 85 kg ...

Страница 15: ...ited for incorporation into a 19 rack or a control panel or for use as desk top unit DANGER DANGER damaged product Putting a damaged product into operation can be extremely hazardous In case of visible damage make sure the product is not put into operation 3 2 1 Rack Installation CENTER ONE is designed for installation into a 19 rack chassis adapter using according to DIN 41 494 For this purpose f...

Страница 16: ...r the protection class of the rack pro tection against foreign bodies and water e g the EN 60204 1 regulations for switch cabinets Take appropriate measures for the rack to meet the specifications of the protection class Guide rail In order to reduce the mechanical strain on the front panel of CENTER ONE preferably equip the rack chas sis adapter with a guide rail ...

Страница 17: ...Installation 16 GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum Slide rails For safe and easy installation of heavy rack chassis adapters preferably equip the rack frame with slide rails ...

Страница 18: ...Installation GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum 17 Mounting height Height 3 U Height 2 U Rack installation ...

Страница 19: ... Fasten CENTER ONE to the rack chassis adapter using the screws supplied with it The temperature inside the switching cabinet must not exceed the admissible maximum am bient temperature 9 Height 3 U rack chassis adapter For incorporation into a 19 rack chassis adapter heigth 3 an adapter panel incl two collar screws and plastic sleeves is available 86 n Secure the rack adapter in the rack frame ...

Страница 20: ...the screws supplied with the adapter panel Adapter panel for height 3 U rack adapter p Slide CENTER ONE into the rack chassis adapter Height 3 U q Fasten the adapter panel to the rack chassis adapter using the screws supplied with CENTER ONE The temperature inside the switching cabinet must not exceed the admissible maximum am bient temperature 9 ...

Страница 21: ...E into a control panel the following cut out is required M3 or ø 3 5 105 91 2 78 69 For reducing the mechanical strain on the front panel preferably support the unit n Slide CENTER ONE into the cut out of the control panel o Secure it with four M3 screws Make sure the admissible maximum ambient temperature 9 is not exceeded ...

Страница 22: ... purpose two self adhesive rubber feet as well as a slip on rubber bar are supplied with it n Stick the two supplied rubber feet to the rear part of the bottom plate o Slip the supplied rubber bar onto the bottom edge of the front panel Select a location where the admissible maxi mum ambient temperature 9 is not ex ceeded e g due to sun irradiation ...

Страница 23: ...able without protective ground The unit is supplied with a 2 5 m power cord If the mains cable is not compatible with your system use your own suitable cable with protective ground The socket must be fuse protected with 10 Amax Disconnecting device acc to EN 61010 1 If the unit is installed in a switch cabinet the mains volt age should be supplied and turned on via a central dis tributor Grounding...

Страница 24: ...t once Make sure that there is never more than one gauge connected to CENTER ONE at the same time Connect the gauge to one of the two SENSOR connec tors on the rear of the unit Use a screened 1 1 cable electromagnetic compatibility Make sure the gauge is compatible 9 DANGER DANGER protective low voltage According to EN 61010 voltages exceeding 30 VAC or 60 VDC are hazardous If you are using the CE...

Страница 25: ...ignment Pin assignment of the 8 pin RJ45 appliance connector Socket Signal 1 2 3 4 5 6 7 8 24 V PGND Signal Ident Signal GND Status HV_L HV_H Pin assignment of the 15 pin D Sub appliance connector Socket Signal 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Emi status Signal Status HV_H PGND Not used Degas Supply_ITR Not used Ident Supply_CTR Signal GND RXD TXD Chassis ...

Страница 26: ...o the RS232 con nector on the rear of the unit using a screened cable electromagnetic compatibility DANGER DANGER protective low voltage According to EN 61010 voltages exceeding 30 VAC or 60 VDC are hazardous If you are using CENTER ONE as desk top unit you may only connect a protective low voltage SELV Pin assignment Pin assignment of the 9 pin D Sub appliance connector Pin Signal 1 2 3 4 5 6 7 8...

Страница 27: ...According to EN 61010 voltages exceeding 30 VAC or 60 VDC are hazardous If you are using CENTER ONE as desk top unit you may only connect a protective low voltage SELV Connect the peripheral components to the CONTROL connector on the rear of the unit Use a screened cable electromagnetic com patibility Pin assignment Pin assignment of the 9 pin D Sub appliance connector Pin Signal 1 2 3 4 5 6 7 8 9...

Страница 28: ...t unit Switching function status Upper threshold Lower threshold Measurement value in floating point or exponential format or status messages 25 Warning error flashing Offset value 0 Correction factor 1 High vacuum measurement circuit activated PTR ITR 100 and ITR 200 only Degas ITR only Parameter mode activated ...

Страница 29: ...shes The measurement value is above the upper measurement range limit of the connected gauge The lamp flashes The measurement value is below the lower measurement range limit of the connected gauge The lamp flashes Parameter setup lock activated 54 Error messages ITR 90 and ITR 100 Meaning 10 11 ITR 90 0 9 ITR 100 1 6 0 no communication to the transmitter 1 9 High Byte of Error Byte Error messages...

Страница 30: ...nit is incorporated in a rack After power ON CENTER ONE automatically performs a self test identifies the connected gauge activates the parameters that were in effect before the last power OFF switches to the Measurement mode adapts the parameters if required if another gauge was previously connected Turning CENTER ONE off Turn CENTER ONE off with the power switch or cen trally via a switched powe...

Страница 31: ...the standard operating mode of CENTER ONE Measurement values and statuses as well as the gauge identification are displayed in this mode To get to the Measurement mode turn CENTER ONE on do not press any key for at least 10 s while you are in the Parameter mode press the PARA key after Parameter X bAud while you are in the Parameter mode press all three keys simultaneously for at least 5 s while y...

Страница 32: ...ed for 10 s PARA PARA Measurement value Parameter X Power ON 5 s PARA 5 s PARA 4 4 1 Operation In the Measurement mode the following commands are possible Getting to the Parameter mode 34 Turning the gauge off Only for PTR 225 cold cathode gauge and ITR 100 ionization vacuum gauge No function for other connected gauges Press 1 s 32 ...

Страница 33: ... gauge identification Press 0 5 s 33 Getting to the Test mode Press 5 s 51 4 4 2 Turning the Gauge On Off Only for PTR 225 cold cathode gauge and ITR 100 ionization vacuum gauge The high vacuum measurement circuit of these gauges can be activated in both the Measurement and the Pa rameter mode 48 The current setting is displayed Ö High vacuum measurement circuit activated Ö High vacuum measurement...

Страница 34: ...pacitive gauge TTR 100 TTR 100 S2 TTR 101 TTR 101 S2 Cold cathode gauge PTR 225 Cold cathode Pirani gauge PTR 90 Linear gauge capacitiv analog CTR 90 CTR 91 DI 200 DI 201 DI 2000 DI 2001 DI 2001 rel Linear gauge capacitiv digital CTR 100 CTR 101 Ionization Pirani vacuum gauge ITR 90 Ionization vacuum gauge ITR 100 Ionization Pirani vacuum gauge ITR 200 No gauge connected no Sensor Connected gauge ...

Страница 35: ...e you are in the Measure ment mode To quit the Parameter mode turn CENTER ONE off do not press any key for at least 10 s press the PARA key after Parameter X bAud to get to the Measurement mode press all three keys simultaneously for at least 5 s to get to the Test mode Parameter Parameter 2 Parameter X Measurement mode Parameter 1 PARA PARA PARA PARA Measurement value Wait 10 s without pressing a...

Страница 36: ...witching threshold 38 Upper switching threshold 38 Measurement range of linear gauges 42 Offset correction zero adjust of linear gauges 43 Measurement unit 45 Correction factor 45 Filter time constant 46 High vacuum measurement circuit 48 Transmission rate of the interface 49 Emission 49 Filament 49 Modifying a parameter Press 1 s 1 s The value is de creased in small increments The value is de cre...

Страница 37: ...1 s The value is in creased in small increments The value is in creased in large increments The parameter value is modified by 1 increment Loading the default parameters Press 5 s Setting all parameters back to their default values 89 Getting to the Test mode Press 5 s 51 ...

Страница 38: ...6 02 2011 07 Oerlikon Leybold Vacuum 37 4 5 2 Parameters Some parameters are not available for all gauge types They are only displayed if available The following table shows which parameters are available for which gauges ...

Страница 39: ...he measurement values The Degas function allows to clean the electrode system Value Ö Normal operation Ö Degas The electron collection grid is heated to 700 C by electron bombard ment and the elec trode system is thus cleaned Duration of the Degas function 3 min can be aborted Lower upper switching threshold CENTER ONE has a switching function with two adjust able thresholds The status of the swit...

Страница 40: ...3 4 2 3 4 Display Measurement value Value the lower switching threshold Setpoint low defines the pres sure at which the switching func tion is activated when the pres sure is dropping e g Ö gauge dependent Table If another gauge type is con nected CENTER ONE auto matically adjusts the switching threshold if required ...

Страница 41: ...r lower threshold limit upper threshold limit all values in mbar 2 10 4 mbar if PrE is activated 50 The minimum hysteresis between the upper and lower switching threshold is at least 10 of the lower threshold or 1 of the set full scale value If the value of the minimum hysteresis drops below these values the upper threshold is automatically adjusted This prevents unsta ble states ...

Страница 42: ...djusts the threshold if required unterer Schwellwert 5 102 1 10 2 FSr 1 103 1 10 1 1 5E3 1 10 3 FSr 1 103 lower threshold limit upper threshold limit 10 lower threshold 10 lower threshold 10 lower threshold 10 lower threshold 1 measurement range FSr 10 lower threshold 10 lower threshold 10 lower threshold 1 measurement range FSr The minimum hysteresis between the upper and lower switching threshol...

Страница 43: ... defined by the user the full scale value of logarithmic gauges is auto matically recognized Value e g Ö 0 01 mbar 0 01 Torr 0 02 Torr 0 05 Torr 0 10 mbar 0 25 mbar 0 50 mbar 0 10 Torr 0 25 Torr 0 50 Torr 1 mbar 2 mbar 5 mbar 1 Torr 2 Torr 5 Torr 10 mbar 20 mbar 50 mbar 10 Torr 20 Torr 50 Torr 100 mbar 200 mbar 500 mbar 100 Torr 200 Torr 500 Torr 1000 mbar 1100 mbar 1000 Torr 2 bar 5 bar 10 bar 50...

Страница 44: ...110 of the full scale setting When the offset correction is activated the saved offset value is subtracted from the actual measurement value This allows for measurements relative to a reference pressure The offset correction affects the readings on the display The switching functions and the analog output on the CONTROL connector are not affected press briefly Activate offset correction press 2 s ...

Страница 45: ...he gauge and then the controller Deactivate the offset correction before adjusting the zero of the gauge you are using 43 press 2 s Zero adjustment only for CTR 100 and CTR 101 Value e g Ö Zero adjustment activated Lit solid after 2 s and as long as key remains pressed After adjusting the zero point a zero value is displayed Due to the measuring resolution of the CTR 100 and CTR 101 noise drift a ...

Страница 46: ...000 Micron the readout automatically changes over to Torr When the pressure drops below 90 Torr the instrument automatically switches back to Micron Correction factor Not for CTR 90 CTR 91 CTR 100 CTR 101 DI 200 DI 201 DI 2000 DI 2001 and DI 2001 rel linear gauges For ITR 90 and ITR 200 Ionization Pirani vacuum gauges only for pressures 1 10 2 mbar For Pirani Capacitive gauges TTR 100 TTR 100 S2 T...

Страница 47: ...r evaluation of unstable or disturbed measurement signals The measurement value filter affects neither the analog output 26 nor the digitally transmitted measurement value of the ITR 90 ITR 100 and ITR 200 Ionization and Ionization Pirani vacuum gauges Value Ö fast CENTER ONE responds quickly to fluctuations of the measurement value As a con sequence it will also respond faster to interferences in...

Страница 48: ... does not re spond to small changes in measured values As a conse quence it will also respond more slowly to changes in the measured values Ö For CTR gauges only The response of the CENTER ONE to signal changes depends on the measuring range The dis play is especially stable in the low measuring range Measuring range Filter FS 0 1 FS Ö nor normal 0 1 FS 0 04 FS Ö SLo slow 0 04 FS 0 01 FS Ö 2 5 SLo...

Страница 49: ...ue Ö High vacuum meas urement circuit acti vated Ö High vacuum meas urement circuit de activated Display resolution digits Display resolution of measured values Value Ö Display rounded to one decimal digit or two integrals Ö Display rounded to two decimal digits or three inte grals When the PrE 50 is ON and the pressure is in the range p 1 0E 4 mbar the display resolution of the TTR transmitters i...

Страница 50: ...ly for ITR 200 ionization Pirani vacuum gauge Switching the emission on and off Value Ö the emission is switched on and off automatically by the gauge Ö the emission is switched on and off by the user Filament control mode Only for ITR 200 ionization Pirani vacuum gauge Value Ö the gauge automatically alter nates between the filaments Ö Filament 1 aktive Ö Filament 2 aktive ...

Страница 51: ...ld Vacuum Pirani range extension The display and setpoint adjustment range can be extended TTR transmitters with display range down to 5 10 5 mbar only Value Ö Default Ö Display extended to 5 10 5 mbar setpoint adjust ment range extended to 2 10 4 mbar ...

Страница 52: ... ONE on press all keys simultaneously for at least 5 s while you are in the Measurement mode press all keys simultaneously for at least 5 s while you are in the Parameter mode To quit the Test mode turn CENTER ONE off press all keys simultaneously for at least 5 s to get to the Measurement mode Parameter mode Measurement mode Measurement value Power ON Test mode Test 2 Test X Test 1 PARA PARA Firm...

Страница 53: ... s Program version 53 Watchdog error 54 Torr lock 54 Parameter setup lock 54 The name of the test program is displayed until it is started RAM test program 55 EPROM test program 55 EEPROM test program 56 Display test program 56 A D converter test program channel 0 57 A D converter test program channel 1 57 A D converter test program channel 2 58 I O test program 59 RS232C test program 60 Stopping ...

Страница 54: ...0 4 6 2 Parameters Firmware version The firmware version program version is displayed Version Ö The two parts of the firmware number are displayed alter nately The last character indicates the modifi cation index A Z Please mention this index when contacting Oerlikon Leybold Vacuum in the event of a fault ...

Страница 55: ...o be acknowledged by the operator Torr lock The measurement unit Torr can be suppressed in the corresponding parameter setting unit 45 Setting Ö Lock disabled measurement unit Torr available Ö Lock enabled measurement unit Torr not available Parameter setup lock This parameter affects the parameter mode When the lock is activated the user can inspect but not modify pa rameter values Setting Ö Para...

Страница 56: ...est finished no error found Ö Test finished error s found The lamp flashes EPROM test Test of the program memory Test sequence The test runs automatically one time Ö Test in process Ö Test finished no error found After the test a four digit checksum hexadecimal for mat is displayed Ö Test finished error s found After the test a four digit checksum hexadecimal for mat is displayed The lamp flashes ...

Страница 57: ...y Ö Test finished no error found Ö Test finished error s found The lamp flashes Display test Test of the display Test sequence The test runs automati cally one time 1 Ö First all display ele ments are lit at the same time HV COR HV COR Ö and then each ele ment is lit individually 1 Stop the test sequence and ac tivate one element after another by pressing the key once per element ...

Страница 58: ...e of the high sensi tivity of the open measurement circuit Test sequence z B Ö Positive portion of the meas urement signal in Volt A D converter test 1 Test of channel 1 of the analog digital converter with a reference voltage at the signal input of the SENSOR connector 24 The measurement value filter affects the ap plied voltage If the signal input is open CENTER ONE displays a default value that...

Страница 59: ...rence voltage at the signal input of the SENSOR connector 24 The measurement value filter affects the ap plied voltage If the signal input is open CENTER ONE displays a default value that may easily fluctuate because of the high sensi tivity of the open measurement circuit Test sequence z B Ö Gauge identification voltage Ö No gauge connected ...

Страница 60: ...t all gauge and control system lines to ensure that no control commands or mes sages are triggered by mistake The relays switch on and off cyclically The switching operations are indicated optically and can be heard The contacts are connected to the CONTROL connector on the rear of the housing 26 Check the switching function with an ohmmeter Test sequence The test runs automatically one time Ö bot...

Страница 61: ...bold Vacuum RS232C test Test of the RS232C interface CENTER ONE repeats each sign transmitted by the communicating HOST The data transferred from to CENTER ONE can be displayed by the computer only section 5 Test sequence The test runs automatically ...

Страница 62: ...st character is transferred to the CENTER ONE the automatic transmission of measured values stops After the necessary inquiries or parameter modifications have been made the transmission of measured values can be started again with the COM command 67 Connection diagram connection cable Pin assignment of the 9 pin D Sub connector and RS232 cable 25 5 1 1 Data Transmission The data transmission is b...

Страница 63: ...vance by one line 10 0A ENQ ENQUIRY Request for data transmission 5 05 ACK ACKNOWLEDGE Positive report signal 6 06 NAK NEGATIVE ACKNOWLEDGE Negative report signal 21 15 Transmit Data transfer from HOST to CENTER ONE Receive Data transfer from CENTER ONE to HOST Format of pressure values For pressure values the following format is used sx xxxxEsxx Exponent Sign exponent Mantissa Sign mantissa Flow ...

Страница 64: ...emonics and parameters The maximum number of digits the data formats and admissible value ranges are also specified there Transmission protocol HOST CENTER ONE Explanation Mnemonics and parameters CR LF Receives message with end of message ACK CR LF Positive acknowledgment of a received message Reception format When requested with a mnemonic instruction the CENTER ONE transmits the measurement dat...

Страница 65: ...ansmits data with end of message Error processing All strings received are verified in the CENTER ONE If an error is detected a negative acknowledgment NAK is output The appropriate flag is set in the ERROR word Errors can be decoded when the ERROR word is read Error recognition protocol HOST CENTER ONE Explanation Mnemonics and parameters CR LF Receives message with end of message Transmission or...

Страница 66: ...6 HVC HV EMI on off 67 ITR ITR CTR 100 CTR 101 data output 68 LOC Parameter setup lock 78 OFS Offset correction 73 PNR Program number 77 PRE Pirani range extension 76 PR1 Pressure measurement 66 RES Reset 69 SAV Save parameters to EEPROM 76 SP1 Setpoint 70 SPS Setpoint status 71 TAD A D converter test 80 TDI Display test 80 TEE EEPROM test 79 TEP EPROM test 79 TID Sensor identification 68 TIO I O ...

Страница 67: ... Receive ACK CR LF Transmit ENQ Receive x sx xxxxEsxx CR LF Measurement value 1 in current pressure unit Status x 0 Measurement data okay 1 Underrange 2 Overrange 3 Sensor error 4 Sensor off ITR 100 PTR 225 5 No sensor 6 Identification error 7 Error ITR 1 The 3 rd and 4 th decimal are always 0 except for the CTR gauge ...

Страница 68: ...lue in the desired interval Receive x sx xxxxEsxx y CR LF Measured value 1 with pressure unit Status x 0 Measurement data okay 1 Underrange 2 Overrange 3 Sensor error 4 Sensor off ITR 100 PTR 225 5 No sensor 6 Identification error 7 Error ITR 1 The 3 rd and 4 th decimal are always 0 except for the CTR gauge Activating deactivating the HV circuit and EMI Transmit HVC x CR LF Mode x 0 off default 1 ...

Страница 69: ...eceive ITR 90 200 xx xx xx xx xx xx xx xx CR LF CTR 100 101 Transmission string byte 0 7 in hex format ITR 90 ITR 200 CTR 100 CTR 101 Gauge identification Transmit TID CR LF Receive ACK CR LF Transmit ENQ Receive x CR LF Identification x TTR Pirani all versions TTR100 Pirani Capacitive PTR Cold cathode PTR90 Cold cathode Pirani CTR Capacitive ITR Hot cathode ITR100 Hot cathode ITR200 Hot cathode P...

Страница 70: ...meter 0001 SYN Syntax error The ERROR word is cancelled when read out If the error persists it is immediately set again Reset Transmit RES x CR LF x 1 Reset Receive ACK CR LF Transmit ENQ Receive x x x x CR LF List of all present error messages xx 0 No error 1 Watchdog has responded 2 Task fail error 5 EPROM error 6 RAM error 7 EEPROM error 9 DISPLAY error 10 A D converter error 11 Sensor error e ...

Страница 71: ...tion Transmit SP1 x xxEsx x xxEsx CR LF Upper threshold 1 in current pressure unit default depending on gauge Lower threshold 1 in current pressure unit default depending on gauge 1 Values can be entered in any format They are internally converted into the floating point format Receive ACK CR LF Transmit ENQ Receive x xxxxEsxx x xxxxEsxx CR LF Upper threshold in current pressure unit Lower thresho...

Страница 72: ...Operation GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum 71 Switching function status Transmit SPS CR LF Receive ACK CR LF Transmit ENQ Receive x CR LF Switching function x 0 off 1 on ...

Страница 73: ...ed Transmit FSR x CR LF Measurement range x 0 0 01 mbar 1 0 01 Torr 2 0 02 Torr 3 0 05 Torr 4 0 10 mbar 5 0 10 Torr 6 0 25 mbar 7 0 25 Torr 8 0 50 mbar 9 0 50 Torr 10 1 mbar 11 1 Torr 12 2 mbar 13 2 Torr 14 5 mbar 15 5 Torr 16 10 mbar 17 10 Torr 18 20 mbar 19 20 Torr 20 50 mbar 21 50 Torr 22 100 mbar 23 100 Torr 24 200 mbar 25 200 Torr 26 500 mbar 27 500 Torr 28 1000 mbar 29 1100 mbar 30 1000 Torr...

Страница 74: ...No offset value needs to be entered 1 On If no offset value has been entered the previously defined offset value is taken over 2 Auto offset measurement No offset value needs to be entered 3 Zero adjust CTR 100 CTR 101 No offset value needs to be entered 1 Values can be entered in any format They are internally converted into the floating point format Receive ACK CR LF Transmit ENQ Receive x sx xx...

Страница 75: ...ive ACK CR LF Transmit ENQ Receive x CR LF Measurement unit Correction factor Transmit COR x x xxx CR LF 0 100 10 000 default 1 000 Receive ACK CR LF Transmit ENQ Receive x x xxx CR LF Correction factor Measurement value filter Transmit FIL x CR LF x 0 fast 1 medium default 2 slow Receive ACK CR LF Transmit ENQ Receive x CR LF Filter time constant ...

Страница 76: ... 0E 4 mbar the display resolution of the TTR transmitters is reduced by one decimal digit Transmission rate Transmit BAU x CR LF x 0 9600 baud default 1 19200 baud 2 38400 baud As soon as the new baud rate has been entered the report signal is transmitted at the new trans mission rate Receive ACK CR LF Transmit ENQ Receive x CR LF Transmission rate Emission ITR 200 Transmit EUM x CR LF x 0 Manuall...

Страница 77: ...ment 2 Receive ACK CR LF Transmit ENQ Receive x CR LF Save parameters to EEPROM Transmit SAV x CR LF x 0 Save default parameters 1 Save user parameters Receive ACK CR LF Pirani range extension Transmit PRE x CR LF x 0 off default 1 on Receive ACK CR LF Transmit ENQ Receive x CR LF TTR transmitters only measurement range down to 5 10 5 mbar ...

Страница 78: ... 02 2011 07 Oerlikon Leybold Vacuum 77 5 2 3 Test Mode For service specialists Firmware version Transmit PNR CR LF Receive ACK CR LF Transmit ENQ Receive xxx xxx x CR LF x Modification index original version Firmware number ...

Страница 79: ...has responded the error is automatically acknowledged and cancelled after 2 s Receive ACK CR LF Transmit ENQ Receive x CR LF Watchdog control Torr lock Transmit TLC x CR LF x 0 off default 1 on Receive ACK CR LF Transmit ENQ Receive x CR LF Torr lock status Parameter setup lock Transmit LOC x CR LF x 0 off default 1 on Receive ACK CR LF Transmit ENQ Receive x CR LF Parameter setup lock status ...

Страница 80: ...ion 1 s Receive xxxx CR LF ERROR word EPROM test Transmit TEP CR LF Receive ACK CR LF Transmit ENQ Starts the test duration 10 s Receive xxxx xxxx CR LF Check sum hex ERROR word EEPROM test Transmit TEE CR LF Receive ACK CR LF Transmit ENQ Starts the test duration 1 s Do not keep repeating this test EEPROM life Receive xxxx CR LF ERROR word ...

Страница 81: ...rts the test all LEDs on Receive ACK CR LF Transmit ENQ Receive x CR LF Display test status ADC test Transmit TAD CR LF Receive ACK CR LF Transmit ENQ Receive x x xxxx x xxxx x xxxx CR LF ADC channel 2 Gauge identification 0 0000 5 0000 V ADC channel 1 Measurement signal negative portion 0 0000 5 0000 V ADC channel 0 Measurement signal positive portion 0 0000 11 0000 V ...

Страница 82: ... Setpoint relay off error relay on 4 Setpoint relay on error relay on Receive ACK CR LF Transmit ENQ Receive x CR LF I O test status Operator key test Transmit TKB CR LF Receive ACK CR LF Transmit ENQ Receive xxx CR LF Key 3 x 0 Not pushed 1 Pushed Key 2 Key 1 RS232 test Transmit TRS CR LF Receive ACK CR LF Transmit ENQ Starts the test repeats each character test is interrupted with CTRL C ...

Страница 83: ...E 3 9 80E 3 CR LF R ACK CR LF Modification of threshold values of switching function setpoint Positive acknowledgement T FOL 2 CR LF R NAK CR LF T ENQ R 0001 CR LF T FIL 2 CR LF R ACK CR LF T ENQ R 2 CR LF Modification of filter time constant syntax error Negative acknowledgement Request for data transmission ERROR word Modification of filter time constant Positive acknowledgement Request for data...

Страница 84: ...Cleaning CENTER ONE For cleaning the outside of CENTER ONE a slightly moist cloth will usually do Do not use any aggressive or scouring cleaning agents DANGER DANGER mains voltage Contact with live parts is extremely hazardous when liquids penetrate into the unit Make sure no liquids penetrate into the equipment ...

Страница 85: ...RA key If the problem persists or is displayed Possible cause and remedy acknowledgement CENTER ONE has been turned on too fast after power OFF Ö Acknowledge with the PARA key If the watchdog is set to Auto CENTER ONE acknowledges the message automatically after 2 s 54 The watchdog has tripped because of severe electric disturbance or an oper ating system error Ö Acknowledge with the PARA key If t...

Страница 86: ...OM error Ö Acknowledge with the PARA key Possible cause and remedy acknowledgement Display driver error Ö Acknowledge with the PARA key Possible cause and remedy acknowledgement A D converter error Ö Acknowledge with the PARA key Possible cause and remedy acknowledgement Operating system Task Fail error Ö Acknowledge with the PARA key Technical support If the problem persists after the message has...

Страница 87: ...le D Sub connector fitting the CONTROL connector screw type 230 006 DI SC adapter connection cable for DI Gauge Heads 245 009 V01 9 Storage Caution Caution electronic component Inappropriate storage static electricity hu midity etc can damage electronic compo nents Store the product in an antistatic bag or con tainer Observe the corresponding specifica tions in the technical data 9 ...

Страница 88: ...rimental to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its compo nents according to the following criteria Non electronic components Such components must be separated according to their materials and recycled Electronic components Such components must be separated according to their...

Страница 89: ... 3 at 101 325 103 1 013 1 013 103 760 1 14 696 lbf in2 psi 6 895 103 68 948 10 3 68 948 51 715 68 046 10 3 1 Pressure units used in the vacuum technology mbar Pascal Torr mmWs psi inch of merc mbar 1 100 750 062 10 3 10 2 14 504 10 3 2 95 10 2 Pascal 10 10 3 1 7 5 10 3 0 102 0 145 10 3 2 95 10 4 Torr 1 333 133 332 1 13 595 19 337 10 3 3 937 10 2 mmWs 9 81 10 2 9 81 7 356 10 2 1 1 422 10 3 2 896 10...

Страница 90: ...rlikon Leybold Vacuum 89 B Default Parameters The following values are activated when the default pa rameters are loaded 36 mbar oFF 1000 Torr 1 103 mbar 5 10 4 mbar oFF 1 00 nor oFF 9600 Auto oFF 2 Digits oFF Auto Auto oFF Default User ...

Страница 91: ...a rameter and Test mode will not be affected by a firm ware update To be sure note your parameter settings before upgrading the firmware 89 Preparing CENTER ONE for a program transfer Turn CENTER ONE off Connect CENTER ONE with the serial COM1 COM2 interface of your PC via a 9 pin D Sub ex tension cable the firmware of CENTER ONE cannot be loaded from a Mac With a pin ø 2 mm depress the switch beh...

Страница 92: ...1 Programmtransfer n Unpack the self extracting file exe or the packed zip file o If you have not connected CENTER ONE to the COM1 interface Open the batch file Update BG509763 A edit the interface and save the new setting p Start batch file Update BG509763 A ...

Страница 93: ...d firm ware If the program transfer was successful quit the Update mode by turning CENTER ONE off Wait at least 10 s before turning CENTER ONE on again in order for it to correctly initialize it self CENTER ONE is now ready for operation To be sure check that the current parameter settings are identical with the previously defined settings 89 ...

Страница 94: ...23 1 02 Oerlikon Leybold Vacuum GmbH D 50968 Köln Deutschland 4 www oerlikon com Operating Manual THERMOVAC Transmitter TTR 211 S GA 09 216 1 02 Oerlikon Leybold Vacuum GmbH D 50968 Köln Deutschland 5 www oerlikon com Operating Manual THERMOVAC Transmitter TTR 100 TTR 100 S2 GA 09 221 1 02 Oerlikon Leybold Vacuum GmbH D 50968 Köln Deutschland 6 www oerlikon com Operating Manual THERMOVAC Transmitt...

Страница 95: ...n Leybold Vacuum GmbH D 50968 Köln Deutschland 11 www oerlikon com Operating Manual IONIVAC Transmitter ITR 100 GA 09 414 1 02 Oerlikon Leybold Vacuum GmbH D 50968 Köln Deutschland 12 www oerlikon com Operating Manual PENNINGVAC Transmitter PTR 90 GA 09 313 1 02 Oerlikon Leybold Vacuum GmbH D 50968 Köln Deutschland 13 www oerlikon com Operating Manual IONIVAC Transmitter ITR 200 17200137_002_00 Oe...

Страница 96: ...oerlikon com Gebrauchsanleitung CERAVAC Transmitter CTR 100 17200257_001_00 Oerlikon Leybold Vacuum GmbH D 50968 Köln Deutschland 16 www oerlikon com Gebrauchsanleitung CERAVAC Transmitter CTR 101 130002066_001_A0 Oerlikon Leybold Vacuum GmbH D 50968 Köln Deutschland ...

Страница 97: ... Gauge identification 33 I O 59 Interface connector 25 Literature 93 Mains power connector 22 Maintenance 83 Measurement 42 45 46 Measurement mode 31 32 33 Mnemonics Communication Mode Operating modes Offset 43 44 Operating 51 Operating modes 30 34 90 Operation 29 Parameter 38 42 43 44 45 46 48 49 50 54 Parameter mode 35 Pirani 50 Power connector 22 Power OFF 29 Power ON 29 Program Firmware Update...

Страница 98: ...GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum 97 ...

Страница 99: ...Notes 98 GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum ...

Страница 100: ...Notes GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum 99 ...

Страница 101: ...Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Köln Tel 49 0 221 347 1234 Fax 49 0 221 347 1245 documentation vacuum oerlikon com w w w o e r l i k o n c o m Original German GA 09 033 6 01 2011 07 ga09 033 6 02 ...

Страница 102: ...quipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentation Artisan Scientific Corporation dba Artisan Technology Group is not an affiliate representative or authorized distributor for any manufacturer listed herein We re here to make your life easier How...

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