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WARNING

TO ENSURE CORRECT USAGE, READ THE CORRESPONDING

MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

Specifications and equipment are subject to change without any notice or 
obligation on the part of the manufacturer. September 2002.
DART software is developed by Nikon Inc.

NIKON CORPORATION

Yokohama Plant

NIKON CORPORATION

Instruments Company

ISO 9001

Accredited by the
Dutch Council for

Accreditation

ISO 14001

©2000-02 NIKON CORPORATION

160 (6.3)

180 (7.1)

360 (14.2)

189 (7.4)

473 (18.6) max.

653 (25.7) max.

798-816 (31.4-32.1)

175 (6.9)

373 (14.7)

649 (25.6)

324-342 (12.8-13.5)

798-816 (31.4-32.1)

244 (9.6)

429-544 (16.9-21.4)

E.P.

662 (26.1)

430 (16.9)

157 (6.2)

Specifications

Dimensional diagram 

(When AF Module is mounted)

Printed in Japan (0209-03)T

Code No. 

2CE-KWLH-1

This brochure is printed on recycled paper made from 40% used material.

Observation method

Brightfield, darkfield, DIC, simple polarizing

Main body

Episcopic stand, Power supply built-in

Focusing mechanism

Stroke: 29mm, Coarse: 12.7mm per rotation
(torque adjustable, focusing stop mechanism
provided), Fine: 0.1mm per rotation (in 1µm
increments), Guide: 4-guide (two roller-race,
torque adjustable)

Episcopic illuminator

Motorized aperture diaphragm (centerable,
pinhole slider incorporated )
Fixed field diaphragm (with focus target), Four
ø25mm filters (NCB11/ND4,16) can be mounted;
Polarizer, Analyzer

Light sources

100W halogen, 150W metal halide, 100W mercury,
75W Xenon

Eyepiece tube

UW tilting trinocular eyepiece tube (tilt angle: 0˚-
30˚; erect images), F.O.V.: 25mm, Optical path
changeover: 2-way (Bino: Photo 100:0/0:100)

Nosepiece

Fixed-motorized sextuple universal nosepiece
(centarable), Highly durable

Stage

8x8 Stage, Cross travel: 205 x 205 mm,
Coarse/fine-movement changeover: manual,
Wafer holders: 4-8 in., Mask holders: 4-6 in.

Control

Front panel: Nosepiece rotation buttons,
Episcopic aperture diaphragm stop buttons, Light
intensity control knob
Remote control: LCD panel, Magnification
changeover, Motorized Z-axis, Episcopic aperture
diaphragm stop buttons, Light intensity control
knob, Motorized bright/darkfield changeover key,
DIC adjustment knob, Option keys

Eyepieces

CFI eyepiece lens series 

Objectives

CFI LU/L Plan series

Auto focus unit

Optional (LED)

Automated function

Recipe Programming

Communication

RS-232C

Weight

Approx. 45kg (when 8x8 Stage and UW eyepiece
tube are used.)

Unit: mm (inch)

NIKON INSTECH CO., LTD.

Parale Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku,
Kawasaki, Kanagawa 210-0005, Japan
phone: +81-44-223-2175  fax: +81-44-223-2182 

http://www.ave.nikon.co.jp/inst/

NIKON INSTRUMENTS EUROPE B.V.

P.O. Box  222, 1170 AE Badhoevedorp, The Netherlands
phone: +31-20-44-96-222  fax: +31-20-44-96-298

http://www.nikon-instruments.com/

NIKON INSTRUMENTS INC.

1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.
phone: +1-631-547-8500;  +1-800-52-NIKON (within the U.S.A.only)  fax: +1-631-547-0306

http://www.nikonusa.com/

NIKON CANADA INC.

CANADA  phone: +1-905-625-9910  fax: +1-905-625-0103 

NIKON FRANCE S.A.

FRANCE  phone: +33-1-45-16-45-16   fax: +33-1-45-16-00-33

NIKON GMBH

GERMANY  phone: +49-211-9414-0   fax: +49-211-9414-322

NIKON INSTRUMENTS S.p.A.

ITALY  phone: + 39-55-3009601  fax: + 39-55-300993

NIKON AG

SWITZERLAND  phone: +41-1-913-62 00  fax: +41-1-910-37 44

NIKON UK LTD. 

UNITED KINGDOM  phone: +44-20-8541-4440   fax: +44-20-8541-4584

NIKON SINGAPORE PTE LTD

SINGAPORE  phone: +65-5593618   fax: +65-5593668

NIKON MALAYSIA SDN. BHD.

MALAYSIA  phone: +60-3-78763887  fax: +60-3-78763387

Содержание Eclipse L200A

Страница 1: ...Automated IC Inspection Microscope Automated IC Inspection Microscope L200A ...

Страница 2: ...contamination free inspections Cursor keys LCD screen DIC adjustment knob Aperture keys Darkfield key Brightfield key Option keys Objective selection keys Enter key Menu key Focus dial Focus Coarse Fine changeover key AF MF changeover key Focus fine adjustment knob When AF is ON Lamp intensity Auto Manual changeover key Lamp intensity control knob Motorized remote control minimizes the chance of c...

Страница 3: ...L860 Local PC DART Software Other Software Other Euipment Local Local RS232C Binary RS232C Binary RS232C SECS L200A DIC Confocal DUV Filing System Host Computer Auto In spection Machine 4 5 In combination with wafer loaders Of course the L200A can be configured with Nikon s NWL 860 series of wafer loaders and manual or motorized scanning stages to create a wafer inspection system at a minimum cost...

Страница 4: ...n s renowned CFI60 optics are the fusion of CF design and infinity optics These new optics feature longer working distances and high N A s They also produce brighter images with more contrast and reduced flare Optical System A tilting trinocular eyepiece tube with a lower eyepoint designed to be closer to the operator allows you to sit in a more natural erect position Microscope controls located c...

Страница 5: ...extuple universal nosepiece centarable Highly durable Stage 8x8 Stage Cross travel 205 x 205 mm Coarse fine movement changeover manual Wafer holders 4 8 in Mask holders 4 6 in Control Front panel Nosepiece rotation buttons Episcopic aperture diaphragm stop buttons Light intensity control knob Remote control LCD panel Magnification changeover Motorized Z axis Episcopic aperture diaphragm stop butto...

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