En
WARNING
TO ENSURE CORRECT USAGE, READ THE CORRESPONDING
MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.
Specifications and equipment are subject to change without any notice or
obligation on the part of the manufacturer. September 2002.
DART software is developed by Nikon Inc.
NIKON CORPORATION
Yokohama Plant
NIKON CORPORATION
Instruments Company
ISO 9001
Accredited by the
Dutch Council for
Accreditation
ISO 14001
©2000-02 NIKON CORPORATION
160 (6.3)
180 (7.1)
360 (14.2)
189 (7.4)
473 (18.6) max.
653 (25.7) max.
798-816 (31.4-32.1)
175 (6.9)
373 (14.7)
649 (25.6)
324-342 (12.8-13.5)
798-816 (31.4-32.1)
244 (9.6)
429-544 (16.9-21.4)
E.P.
662 (26.1)
430 (16.9)
157 (6.2)
Specifications
Dimensional diagram
(When AF Module is mounted)
Printed in Japan (0209-03)T
Code No.
2CE-KWLH-1
This brochure is printed on recycled paper made from 40% used material.
Observation method
Brightfield, darkfield, DIC, simple polarizing
Main body
Episcopic stand, Power supply built-in
Focusing mechanism
Stroke: 29mm, Coarse: 12.7mm per rotation
(torque adjustable, focusing stop mechanism
provided), Fine: 0.1mm per rotation (in 1µm
increments), Guide: 4-guide (two roller-race,
torque adjustable)
Episcopic illuminator
Motorized aperture diaphragm (centerable,
pinhole slider incorporated )
Fixed field diaphragm (with focus target), Four
ø25mm filters (NCB11/ND4,16) can be mounted;
Polarizer, Analyzer
Light sources
100W halogen, 150W metal halide, 100W mercury,
75W Xenon
Eyepiece tube
UW tilting trinocular eyepiece tube (tilt angle: 0˚-
30˚; erect images), F.O.V.: 25mm, Optical path
changeover: 2-way (Bino: Photo 100:0/0:100)
Nosepiece
Fixed-motorized sextuple universal nosepiece
(centarable), Highly durable
Stage
8x8 Stage, Cross travel: 205 x 205 mm,
Coarse/fine-movement changeover: manual,
Wafer holders: 4-8 in., Mask holders: 4-6 in.
Control
Front panel: Nosepiece rotation buttons,
Episcopic aperture diaphragm stop buttons, Light
intensity control knob
Remote control: LCD panel, Magnification
changeover, Motorized Z-axis, Episcopic aperture
diaphragm stop buttons, Light intensity control
knob, Motorized bright/darkfield changeover key,
DIC adjustment knob, Option keys
Eyepieces
CFI eyepiece lens series
Objectives
CFI LU/L Plan series
Auto focus unit
Optional (LED)
Automated function
Recipe Programming
Communication
RS-232C
Weight
Approx. 45kg (when 8x8 Stage and UW eyepiece
tube are used.)
Unit: mm (inch)
NIKON INSTECH CO., LTD.
Parale Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku,
Kawasaki, Kanagawa 210-0005, Japan
phone: +81-44-223-2175 fax: +81-44-223-2182
http://www.ave.nikon.co.jp/inst/
NIKON INSTRUMENTS EUROPE B.V.
P.O. Box 222, 1170 AE Badhoevedorp, The Netherlands
phone: +31-20-44-96-222 fax: +31-20-44-96-298
http://www.nikon-instruments.com/
NIKON INSTRUMENTS INC.
1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.
phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A.only) fax: +1-631-547-0306
http://www.nikonusa.com/
NIKON CANADA INC.
CANADA phone: +1-905-625-9910 fax: +1-905-625-0103
NIKON FRANCE S.A.
FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33
NIKON GMBH
GERMANY phone: +49-211-9414-0 fax: +49-211-9414-322
NIKON INSTRUMENTS S.p.A.
ITALY phone: + 39-55-3009601 fax: + 39-55-300993
NIKON AG
SWITZERLAND phone: +41-1-913-62 00 fax: +41-1-910-37 44
NIKON UK LTD.
UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584
NIKON SINGAPORE PTE LTD
SINGAPORE phone: +65-5593618 fax: +65-5593668
NIKON MALAYSIA SDN. BHD.
MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387
