Newport Spectra-Physics ST-200, Руководство пользователя

Страница: 16 / 36

16 General Information
2.2 Specifications
Working Surface
400 Series ferromagnetic stainless steel
3/16 in. (4.8 mm) thick with integrated damping layer
Surface Flatness
[in. (mm)]
±0.004 (±0.1), over 2 ft. (600 mm) square
Core Design
Trussed honeycomb, vertically bonded closed cell construction,
0.010 in. (0.25 mm)
Steel sheet materials, 0.030 in. (0.76 mm) Triple core interface
Active Damping Adjustable electronic dampers
Structural Damping Constrained layer core, damped working surface and
composite edge finish
Mounting Holes
1/4-20 holes on 1 in. grid (M6-1.0 holes on 25 mm grid), 0.5 in.
borders (12.5 mm borders)
Hole/Core Sealing
Easy clean conical cup 0.75 in. (19 mm) deep,
Non-corrosive high impact polymer material
Typical Table Performance Values ST Series
Maximum Dynamic Deflection Coefficient 0.4 x 10
-3
Maximum Relative Motion Value [in. (mm)]* <3.0 x 10
-9
(<7.6 x 10
-8
)
Deflection Under Load [in. (mm)]† <5.0 x 10
-5
(<1.3 x 10
-3
)
Table 1 Specifications
Compliance, in/lb, damped corner
10 100 1
.
10
3
1
.
10
7
1
.
10
6
1
.
10
5
1
.
10
4
1
.
10
3
ON
OFF
Hz
Figure 12 Typical Compliance Curve.
(This data was taken on a ST-48-8 table supported by I-2000 isolators.)