Newport MFA Series, Руководство пользователя

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iii
EDH0199En2041 — 12/18
MFA Series Miniature Linear Stages
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity ...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction
.................................................................................1
2.0 — Description
...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics
............................................................................3
3.1 Definitions ..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Load Specification Definitions.................................................................4
3.4 Load Characteristics and Stiffness .........................................................5
3.5 Stage Weights ............................................................................................5
4.0 — Drives and Motors
....................................................................6
4.1 Stepper Drive Version ..............................................................................6
4.2 DC-Motor Drive Version ...........................................................................6
4.3 Sensor Position..........................................................................................7
4.4 Feedback Signal Position .........................................................................8
4.5 Pinouts........................................................................................................8
5.0 — Connection to Newport Controllers
..............................10
5.1 Warnings on Controllers ........................................................................10
5.2 Connection ...............................................................................................11
5.3 Cables .......................................................................................................11
6.0 — Connection to Non-Newport Electronics
....................12
6.1 MFA-PPD & MFA-CC Connections .........................................................12
6.2 MFA-PP Stage ...........................................................................................13
7.0 — Dimensions
.................................................................................13
8.0 — Accessories
.................................................................................14
8.1 MFA-BK Plate ...........................................................................................14
8.2 (M-)MFA-TP Top Plates ..........................................................................14
8.3 MFA-BP Base Plate ..................................................................................14