MKS Stabil-Ion 370 Series, Инструкция по эксплуатации, Страница: 76 / 122

4 Preparing the Stabil-Ion System for Operation
4-18
Series 370 Stabil-Ion Instruction Manual - 370119
4.7 Preparing for Convectron Gauge Operation
Convectron Gauge pressures are indicated on lines A and B of the 370 Controller display.
Install suitable devices that will limit the pressure to the level that the vacuum system can safely
withstand. In addition, install suitable pressure relief valves or rupture disks that will release
pressure at a level considerably below that pressure which the system can safely withstand.
MKS Instruments, Inc. does not supply pressure relief valves or rupture disks. Suppliers of pressure
relief valves and pressure relief disks can be located via an online search, and are listed on
ThomasNet.com under “Relief Valves” and “Rupture Discs”.
Confirm that these safety devices are properly installed before installing the product.
In addition, check that (1) the proper gas cylinders are installed, (2) gas cylinder valve positions are
correct on manual systems, and (3) the automation is correct on automated gas delivery systems.
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized.
Figure 4-8 Ionization Gauge Analog Output vs. Pressure
Using the N
2
calibration to pressurize a vacuum system above about 1 Torr
with certain other gases can cause dangerously high pressures which may
cause explosion of the system. See Section 4.7.1 on page 4-19 before
using with other gases.
0 1 2 3 4 5 6 7 8 9 10
IG analog output (V)
10
-11
10
-10
10
-9
10
-8
10
-7
10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
10
-9
10
-8
10
-7
10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
1
10
gauge
off Fig. 4.8 Ionization gauge analog output vs pressure.
normal operation
11
Pre
ssure (Pa)
Pr
essure (Tor
r) (mba
r)