MKS Stabil-Ion 370 Series, Инструкция по эксплуатации, Страница: 77 / 122

4 Preparing the Stabil-Ion System for Operation
4-19
Series 370 Stabil-Ion Instruction Manual - 370119
4.7.1 Understanding Convectron Gauge Pressure Measurement in Gases other than
Nitrogen (or Air)
Convectron Gauges are thermal conductivity gauges of the Pirani type. These gauges transduce gas
pressure by measuring the heat loss from a heated sensor wire maintained at constant temperature.
For different gases, the heat loss is different at any given true pressure and thus the pressure
indication can be very different.
It is important to understand that the indicated pressure of a Convectron Gauge depends on the type
of gas, the orientation of the gauge axis, and on the gas density in the gauge. Convectron Gauges
are normally supplied calibrated for N
2
(air has approximately the same calibration). With proper
precautions, the Convectron Gauge may be used to measure pressure of certain other gases.
The following information in this section applies only when the Convectron Gauge has been
calibrated for N
2
, either with the standard factory memory data or for a specific gauge using a
Memory Module and when the Convectron Gauge is mounted with its axis horizontal. It does not
apply when a Convectron Gauge's memory has been reprogrammed for a specific gas other than
N
2
.
At pressures below a few Torr, there is no danger in measuring pressure of gases other than N
2
and
air, merely inaccurate indications. A danger arises if the N
2
calibration is used without correction to
measure higher pressures of some other gases. For example, N
2
or air at 24 Torr causes the same
heat loss from the Convectron sensor as will argon at atmospheric pressure. Thus if the pressure
indication of the Convectron Gauge is not properly corrected for argon, an operator attempting to
fill a vacuum system with 1/2 atmosphere of argon would observe an indication of only 12 Torr
when the actual pressure had risen to the desired 380 Torr. Continuing to fill the system with argon
to 760 Torr would result in only a 24 Torr indication. Depending on the pressure of the argon gas
source, the chamber could be dangerously pressurized while the display continued to read about
30 Torr of N
2
equivalent pressure.
NOTE: The same type of danger likely exists with other thermal conductivity gauges utilizing
convection to extend the range to high pressures; and with Convectron Gauges calibrated for gas
type Y when used with gas type X.
Understand that, with a Convectron Gauge calibrated for N
2
or Air, to measure the pressure of gases
other than air, N
2
, and Air you must use the conversion curves specifically for the Convectron
Gauge to translate between indicated pressure and true pressure. Do not use other data. Never use
conversion curves for the Convectron Gauge with gauges of other manufacturers. Their geometry is
very likely different and dangerously high pressures may be produced even at relatively low
pressure indications.
Also, you must ensure that the atmosphere adjustments for Convectron
Gauges A and B are correctly set. See Section 4.9 on page 4-29.
Figures 4-9 through 4-14 show the true pressure vs. indicated pressure for eleven commonly used
gases. Table 4-5 on page 4-20 will help to locate the proper graph.