MKS Stabil-Ion 370 Series, Инструкция по эксплуатации, Страница: 109 / 122

7 Service and Maintenance
7-5
Series 370 Stabil-Ion Instruction Manual - 370119
7.4 Electrometer Minimum Calibration Adjustment
The Electrometer is automatically calibrated and does not require calibration.
The Electrometer is programmed to output 0.00 when the collector cable is damaged or unplugged, or
when the collector current causes a pressure display lower than the minimum display as listed in Table
7-3.
Table 7-2 Fault Cause/Action
Cause Action
Microprocessor reset occurring on some module
(probable circuit failure). Cycle power.
Call Qualified Service Technician.
Unplugged Convectron Gauge. Plug in gauge.
Sensor broken in Convectron Gauge. Replace gauge.
Convectron Gauge zero badly out of calibration. Adjust zero calibration. See Section 4.9 on page 4-29.
Checksum failure on Process Control board. Cycle power and check all setpoints.
Checksum failure on Electrometer board. Cycle power and check all settings.
Checksum failure on Process Control board. Cycle power and check all setpoints.
Table 7-3 Pressure Minimums
Pressure Range Minimum Display
H
(100
μ
A)
1.00 -9
L
(4 mA)
2.00 -11
H
UHV (100
μ
A)
1.00 -10
L
UHV (4 mA)
5.00 -12
The actual pressure limit for your gauge and
Controller will be the x-ray current of the
Stabil-Ion Gauge, which is 2 x 10
-10
Torr for
the Extended Range tube (370120), and 2 x
10
-11
Torr for the UHV tube (370121).