MKS Series 275 MiniConvectron, Инструкция по эксплуатации

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Maintenance
Mini-Convectron Module Instruction Manual - 275513
49
4.2.2 Symptoms, Causes, and Solutions
Table 4-1 lists failure symptoms, causes, and solutions.
Table 4-1 Failure Symptoms, Causes, and Solutions
Symptom Possible Causes Solution
Output voltage = 0 V 11.5 to 26.5 V power supply cable
is improperly connected or faulty. Repair or replace power supply
cable (see Section 2.3.3).
Pressure reading is too high. • Conductance in connection to
vacuum chamber is inadequate.
• Plumbing to module leaks or is
contaminated.
• Chamber pressure is too high due to
leak, contamination, or pump
failure.
• Power supply or output cable is
improperly connected or faulty.
• If conductance is inadequate,
reconnect Convectron gauge port to
vacuum chamber (see page 18).
• If plumbing leaks or is
contaminated, clean, repair or
replace plumbing.
• If pump failed, repair or replace it.
• If cable is improperly connected or
faulty, repair or replace cable (see
Section 2.3.3).
Pressure reading is inaccurate. • Module is not calibrated for the
process gas that is being used.
• Module is not mounted horizontally.
• Convectron gauge or differential
pressure sensor is damaged (for
example, by reactive gas) or
contaminated.
• Temperature or mechanical
vibration is extreme.
• If Convectron gauge is out of
calibration, recalibrate it (see
Section 3.6).
• If module is not mounted
horizontally, re-mount it (see
Figure 2-4).
• If Convectron gauge is damaged,
replace it (see Section 4.4).
• If Convectron gauge is
contaminated, return it to factory
(see pages Section 4.1 and 51).
• If temperature or vibration is
extreme, relocate module or
eliminate source of heat or
vibration.
Indicated pressure is different than
pressure indications from other
measurement devices. • Process gas is a not the gas that the
user anticipated using in the system.
• Convectron gauge is defective.
• If the process gas is not what was
anticipated, calibrate the
Convectron gauge for the gas being
used (see Section 3.2.1 and Section
3.2.2).
• If Convectron gauge is defective,
return it to factory (see pages 47
and 51).
Relay LED indicator is ON, but
relay is not functioning. • Relay contacts are defective. • Make sure the relay load is within
the specified rating and is
non-inductive (see the
Specifications Appendix).
• Relay will not activate.
• Output voltage is < 0.10 V. • A circuit board is faulty.
• Convectron gauge sensing wire is
open.
• Return module to factory (see
Section 4.1
).