The Ariel User Manual
Rev 5, 01/04/21
3
Chapter 3: Safety Information
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of intended use of the instrument and may impair the protection
provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure
to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return the
instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety
features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution
The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not
correctly performed or adhered to, could result in damage to
or destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls
attention to a procedure, practice, condition, or the like,
which is essential to highlight.
