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Vacuum Sentry

Safety Valve

HPS

Products Series 145

Vacuum Sentry

Safety Valve

Operation and Maintenance Manual

651 Lowell Street
Methuen, MA 01844

Main Telephone: (800) 227-8766

p/n 100010033

www.mksinst.com

Rev. A2

Содержание HPS 145 Vacuum Sentry Series

Страница 1: ...SentryTM Safety Valve HPSTM Products Series 145 Vacuum SentryTM Safety Valve Operation and Maintenance Manual 651 Lowell Street Methuen MA 01844 Main Telephone 800 227 8766 p n 100010033 www mksinst com Rev A2 ...

Страница 2: ... 227 8766 www mksinst com 2015 MKS Instruments Inc HPSTM Products Inc All rights reserved IgniTorr LoPro HPSTM and Cv are trademarks and MODUCELL VACUUM SENTRYTM and AUTO SOFT are registered trademarks of HPSTM a division of MKS Instruments Inc SensaVac and Baratron are registered trademarks of MKS Instruments Inc Elgiloy is a registered trademark of Elgiloy Co OFHCis a registered trademark of Ama...

Страница 3: ...ifications 6 Installation 7 Electrical 7 Mechanical 7 Service 8 Disassembly 8 Repair of Subassemblies 9 Piston Diaphragm Subassembly 9 Nose Piece O ring Replacement 9 Bonnet Subassembly 10 Reassembly 10 Troubleshooting 12 Valve Cannot Be Pumped Down to High Vacuum 12 Valve Leaks in Closed Position 13 Valve Closes Too Slowly 13 Valve Opens Too Slowly or Not Completely 13 Valve Fails to Open 13 Clos...

Страница 4: ......

Страница 5: ... product to HPSTM Symbols Used in this Manual The first two symbols below that may be located on your Series 145 Vacuum SentryTM identify critical safety concerns They are used throughout this manual to further define the safety concerns associated with the product The last two symbols identify other information in this manual that is essential or useful in achieving optimal performance from the S...

Страница 6: ...is light weight constructed of vacuum compatible materials and maximizes pumping conductance Lifetimes in excess of 100 000 cycles are typical which translates into years of trouble free use in suitable environments The opening burst is less than the critical backing pressure for turbomolecular and diffusion pumps when appropriately sized mechanical pumps are used The closing burst minimized by th...

Страница 7: ...using it to close very quickly This isolates the vacuum system from the mechanical pump while the pressure deferential between the outside atmosphere and the vacuum system provides the force to maintain the valve in its closed position without electrical or pneumatic power With the vacuum system isolated a series of small orifices admits air to the inlet port of the mechanical pump until it has ri...

Страница 8: ... Vacuum SentryTM open and the vacuum system is exposed to the mechanical pump s full pumping speed Power Interruption The Vacuum SentryTM solenoid loses its power since it is connected in parallel to that of the mechanical pump The solenoid opens to the atmosphere Air enters the Vacuum SentryTM through the solenoid and creates a higher pressure above the piston than exists below it The piston clos...

Страница 9: ...emains down closed retaining the vacuum system under vacuum Note that given enough time the pressure in the vacuum system will rise due to outgassing leaks etc or venting by the operator and when the pressure is high enough the spring will open the piston and the vacuum system will be at the same pressure as the mechanical pump atmospheric Power restored The solenoid coil is energized causing the ...

Страница 10: ... Closing burst 1 x 10 3 T l Power 7 Watts 115 VAC Materials body flanges extruded aluminum A1 6061 T6 piston machined aluminum A1 2024 seals O ring diaphragm Viton guide pin 304 stainless steel Temperature range valve 0o to 100o C Temperature range solenoid 0o to 50o C Venting time 10 s l of vented volume NW 40 50 50 s l of vented volume NW 25 ...

Страница 11: ...ted to about 50o C because of the heat generated by the coil This should be kept in mind when selecting a mounting location The body of the Vacuum SentryTM is very rugged and it is difficult to deform it in any normal piping arrangement used in vacuum systems It is possible however that tremendous forces could result from thermal expansion or from a long run of pipe cantilevered from a fixed valve...

Страница 12: ...ntly prying up the diaphragm at one edge and pulling free of the body 7 around the full circumference Inspect the diaphragm for holes tears or accumulated contamination Also inspect the orifices 19 and 20 for blockage Finally inspect the nose piece O ring 5 carefully If it is scratched or if there is imbedded foreign material this O ring must be replaced The bulk of service can be done with disass...

Страница 13: ... inch long bushings used in tandem After removal of the old bushings inspect the bore in the sleeve 3 for debris and burrs Clean as necessary Press two new bushings into the bore one at a time flush to the top of the sleeve 3 To reassemble place diaphragm 11 on the piston with the inner bead down and the outer bead up See figure 3 A small amount of vacuum compatible grease should be smeared on the...

Страница 14: ...the groove Particulate contamination may be blown off with DUST OFFR or dry nitrogen Place the prepared O ring from step 2 above on top of the groove Place two thumbs on the o ring at points 180o apart and push the o ring into the groove Avoid twisting the O ring as it is pushed in Then push in the opposite intermediate points and so on until the ring is uniformly in place Bonnet Subassembly 1 The...

Страница 15: ...0 32 x 5 8 16 socket cap screws Tighten to 27 inch lb torque 3 Place the O ring 14 into the groove on the side of the body and position the flange 12 on the body Be sure that the O ring and groove are clean Insert four 10 32 x 5 8 socket cap screws 16 and tighten to 27 inch lb torque 4 Before returning the valve to service it should be leak tested Note that power will need to be supplied to the so...

Страница 16: ...ue to damaged flanges damaged O ring dirt loose clamps or incorrect assembly Locate the problem and assemble correctly b If a leak signal is obtained at the solenoid bonnet connection disassemble clean and reassemble c A leak signal at the solenoid intake indicates a defective solenoid valve Disassembly of the solenoid valve is not recommended Install a new solenoid valve If the solenoid valve is ...

Страница 17: ...alve is defective Replace with a new solenoid valve 3 There is excess friction between bushing 2 and guide pin 1 Clean and repair the bushing and guide pin as described above 4 The spring is restricted by contamination Disassemble clean or replace Valve Opens Too Slowly or Not Completely 1 The orifices are partially blocked Clean and reassemble 2 There is excess friction between bushing 2 and guid...

Страница 18: ...ion A 85o C temperature rise is normal for this valve 2 Coil and operating voltage frequency not matched Change the solenoid coil to one with a voltage frequency compatible with the pump 3 The ambient temperature is too high The ambient temperature near the solenoid is limited to less than 50o C due to the temperature rise inherent in the solenoid valve Higher temperature rated coils are available...

Страница 19: ...toxic or radioactive substances See Product Return Policy below e Is it an emergency repair f Is it a warranty repair When was the valve shipped to you g Who in your organization can answer technical questions about the use of the valve 2 Prepare the valve for shipment by capping the ports to prevent entry of foreign material and to protect the seal surfaces Place the valve in a sealed plastic bag...

Страница 20: ... Viton Screw SHCS 10 32 x 62 L SST Protector flange NW 25 Protector flange NW 40 Protector flange NW 50 Solenoid valve 120 Volt 60 Hz Solenoid valve 100 Volt 50 Hz Solenoid valve 220 Volt 50 60 Hz Solenoid valve 208 Volt 60 Hz Solenoid valve 24 Volt 50 60 Hz Solenoid valve 24 Volt dc Orifice Orifice Spanner wrench 100003946 100003897 100003862 100003861 100005110 100003879 100003907 100003868 1000...

Страница 21: ...roduct for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that is dangerous to the health of humans or is environmentally unsafe it is the responsibility of the PURCHASER to have the product cleaned by an independent agency ...

Страница 22: ...Notes 18 Vacuum SentryTM safety Valve ...

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