MKS Baratron 122A Series, Руководство пользователя

Страница: 23 / 29

Chapter Five: Maintenance General Information
17
Chapter Five: Maintenance
General Information
If the 122 transducer fails to operate properly upon receipt, check for shipping damage, and check
the cables for proper continuity. Any damage should be reported to the carrier and MKS
Instruments immediately. If it is necessary to return the unit to MKS, obtain an ERA number
(Equipment Return Authorization Number) from a MKS Service Center before shipping. Please
refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers.
Warning
All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
Signal Conditioner Electronics
MKS recommends that you do not attempt to repair the transducer signal conditioner electronics,
since replacement or movement of many PC board components may require complete
recalibration of the unit.
Sensor
MKS recommends that you do not attempt to clean the sensor except in the case of water soluble
deposited material, such as ammonium chloride from the exhaust line of a low pressure CVD
Nitride reactor. In this case, the following procedure may be used:
1. Remove the cover from the 122 transducer.
2. Unscrew the metal standoffs which hold the lower PC board.
3. Remove the two boards being careful not to change the orientation of any parts.
4. Place the sensor only in an ultrasonic cleaner with hot water and attempt to remove the
deposited material.
5. Reassemble the transducer, being careful not to change the orientation of any PC
component.
6. Vacuum pump the unit the remove water vapor.
7. Reset the ZERO.