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MKS 907 Series Скачать руководство пользователя страница 33

6

Service & Maintenance

33

Series 907 Analog Convection Transducer
Instruction Manual - #109070001

5.

Adjust potentiometer R38 to a voltmeter reading of 5.487 V.

6.

Calibrate the sensor for vacuum and atmosphere following the steps on page 14.

7.

Disconnect the power cable.

6.10.2 Reassemble the Electronics Subassembly

1.

Carefully replace the front cover of the case.

2.

Secure the remaining sensor tube screw and the screw lock.

6.11 Bakeout the Sensor Tube

See Section 6.10 to remove the transducer electronics case.

1.

Remove the two screws holding the sensor tube to the transducer electronics subassembly
with a #1 Phillips head screwdriver. Separate the electronics from the sensor.

2.

Bake the standard sensor tube to a maximum of 200°C and the CE marked model to a
maximum of 100°C.

3.

Reassemble the transducer electronics on the sensor (see Section 6.10.2).

Hot Surface

Do not touch the gauge or the immediate surrounding area of
the vacuum chamber during the bake out process. Wait until
the bake out process has finished and the area has cooled.

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Содержание 907 Series

Страница 1: ...Analog Convection Transducer Instruction manual part number 109070001 Revision D May 2020 Series 907 Instruction Manual ...

Страница 2: ......

Страница 3: ...ction Manual Series 907 This instruction manual is for use with Series 907 Analog Convection Transducer A list of applicable catalog numbers is provided on the following page Analog Convection Transducer Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Visit our website at www mksinst com ...

Страница 4: ... for Series 907 Analog Convection Transducer Transducer Assembly Analog Convection Transducer Single Set Point NW16 CE 109070010CE Analog Convection Transducer Dual Set Point NW16 CE 109070019CE Analog Convection Transducer Single Set Point NW25 CE 109070027CE ...

Страница 5: ...nd Arc Suppression 20 Chapter 5 Operation 21 5 1 Introduction 21 5 2 Typical Applications 22 5 3 Theory of Operation 22 5 3 1 Measurement Limits 22 5 4 Reading Pressure 23 5 5 Using the Series 907 Transducer with Other Gases 24 5 5 1 Nitrogen Equivalent Pressure and Voltage 25 5 5 2 Calibrating for Gases Not Shown in the Graph or Table 25 5 5 3 Calibrating for Other Gases 25 5 6 Using the Series 9...

Страница 6: ...6 Series 907 Analog Convection Transducer Instruction Manual 109070001 ...

Страница 7: ...warder or airline making delivery to the customs broker must be notified within 15 days of delivery The following illustrates to whom the claim is to be directed If an airfreight forwarder handles the shipment and their agent delivers the shipment to customs the claim must be filed with the airfreight forwarder If an airfreight forwarder delivers the shipment to a specific airline and the airline ...

Страница 8: ...rn products without first obtaining an RMA In some cases a hazardous materials disclosure form may be required The MKS Customer Service Representative will advise you if the hazardous materials document is required When returning products to MKS be sure to package the products to prevent shipping damage Shipping damage on returned products as a result of inadequate packaging is the Buyer s respons...

Страница 9: ...ates a hazardous situation which if not avoided will result in death or serious injury Warning indicates a hazardous situation which if not avoided could result in death or serious injury Caution indicates a hazardous situation or unsafe practice which if not avoided may result in minor or moderate personal injury Indicates a situation or unsafe practice which if not avoided may result in equipmen...

Страница 10: ...et local regulations Operation and Service of this equipment in strict accordance with the methods and procedures supplied by MKS is the responsibility of the Customer MKS assumes no liability whatsoever for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in MKS literature including but not li...

Страница 11: ...tion via a plasma to couple a high voltage electrode potential to the vacuum chamber If exposed conductive parts of the gauge controller and chamber are not properly grounded they may attain a potential near that of the high voltage electrode during this coupling Potential fatal electrical shock could then occur because of the high voltage between these exposed conductors and ground Proper Groundi...

Страница 12: ...Voltage All conductors in on or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to Earth ground at all times High Voltage Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a co...

Страница 13: ...onfirm that these safety devices are properly installed before installing and operating the product Ensure the following precautions are complied with at all times 1 the proper gas cylinders are installed 2 the gas cylinder valve positions are correct on manual systems 3 and the automation is correct on automated gas delivery systems Explosive Environment Do not use the Series 907 Transducer in an...

Страница 14: ...t has been dropped or the enclosure has been damaged f When the product exhibits a distinct change in performance This indicates a need for service See Service Guidelines Section 1 5 for detailed information regarding how to contact MKS Customer Service Representatives Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized Notice Do not substitute par...

Страница 15: ...tatus of the set points Pressure and set points are read with a standard digital voltmeter or analog to digital converter and computer 3 2 Intended Use Applications Measuring foreline and roughing pressures generated by mechanical vacuum pumps Controlling valves and pumps to automate system pump down using the relay setpoint s Sensing abnormal pressure and taking appropriate security measures usin...

Страница 16: ...independent relay set points atmospheric adjustment zero adjustment Relay Contact Rating SPDT 1 A 24 VAC DC resistive Relay Response 150 msec maximum Vacuum Connection KF 16 KF 25 Electrical Connection 9 pin sub miniature D type Case Material ABS Plastic with conductive coating for CE marked model Materials exposed to vacuum 304 stainless steel platinum glass nickel Weight with CF Flange 2 3 lb 1 ...

Страница 17: ... with the body set horizontally to work effectively in the convection region Convection is an effective heat transfer process at pressures above 200 Torr of nitrogen Install it in the direction indicated on the body of the sensor 4 2 Connect the Transducer to the Vacuum System Mount the Transducer to a grounded vacuum system Notice Install the Transducer on the vacuum chamber where it is protected...

Страница 18: ...cer using a mating 9 pin D sub connector with strain reliefs to ensure proper electrical connection and to reduce stress on the connectors Connect the cable to the Transducer and to the Controller before turning ON the system Tighten the thumb screw on top of the cable to make sure it is securely in place 4 3 1 Input Output Wiring Connect a user supplied cable to the 907 Transducer using a mating ...

Страница 19: ...ly input or to any other ground Half of the power current would flow through this wire Measurement errors in the output voltage may be seen due to the voltage drop from this current The longer the cable the worse the error will be Access the set point relay voltage on pin 9 of the connector Measure this voltage during a start up check to be sure that it is adjusted correctly Connect pin 7 to the p...

Страница 20: ...ntacts might interfere with controller operation or reduce relay contact life Therefore an arc suppression network is recommended The values of the capacitance C and the resistance R can be calculated by the equations C I2 1 x 107 and R E Ia where C is in farads R is in ohms I is DC or ACpeak load current in amperes E is DC or ACpeak source voltage in volts a 1 50 E Note that Rmin 0 5 Ω and Cmin 1...

Страница 21: ...e 907 is available with one or two relay set points each independently adjustable with its own potentiometer LEDs indicate the status of the set points Figure 5 1 Functions of the Series 907 Transducer Table 5 1 Functions of the Series 907 Transducer Pin Function Pin Function 1 Tip Jack for Common 8 Tip Jack for Output 2 LED Set Point 2 Indicator 9 Tip Jack for Set Point 1 3 LED Set Point 1 Indica...

Страница 22: ...loss and radiation are constant for a wire at constant temperature they provide a masking signal which largely determines the low pressure limit of the sensor Optimizing parameters of the wire length and diameter thermal emissivity thermal conductivity and wire temperature can control but not eliminate these terms A convection enhanced Pirani sensor may be operated at constant current voltage or r...

Страница 23: ...librated for air nitrogen and also indicates nitrogen equivalent pressure for argon and helium See Figure 5 2 and Figure 5 3 for pressure readings based on output voltage from the transducer See Section 5 6 when using the 907 Transducer with a computer to convert voltage to pressure readings Figure 5 2 Output Voltage vs Pressure ...

Страница 24: ...partment if additional information is needed The 907 is designed to give voltage output according to the graph in Figure 5 3 or the table in Figure 5 2 for air or nitrogen If the transducer is used to read pressure of gases with poorer heat transfer properties than nitrogen the true system pressure may be much higher than indicated This reading error could lead to a dangerous overpressure A vacuum...

Страница 25: ...ure axis This point corresponds to the true pressure for helium or argon 5 5 2 Calibrating for Gases Not Shown in the Graph or Table To determine the voltage pressure relationship for gases which are not shown in the graph or table you might need to calibrate the 907 Transducer for this gas This calibration requires a gas type independent gauge such as a capacitance manometer to act as the calibra...

Страница 26: ... 907 s capabilities an A D converter should be used with an input voltage span of 0 to 6 V The A D conversion rate should be at least 6 Hz 150 msec conversion time A resolution of 12 bits is needed corresponding to 1 46 mV per bit The A D converter should have a differential input to ensure accurate measurements Equations for Converting Voltage to Pressure The following equations convert the volta...

Страница 27: ...static sensitive devices or other components removed from the product Do not handle static sensitive devices more than absolutely necessary and only when wearing a ground strap Do not use an ohmmeter for troubleshooting MOS circuits Rely on voltage measurements Use a grounded electrostatic discharge safe soldering iron NOTE This product is designed and tested to offer reasonably safe service provi...

Страница 28: ...ed or the enclosure has been damaged The product exhibits a distinct change in performance This may indicate a need for service Product Modifications Do not substitute parts or modify the instrument Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the product Return the product to a service facility designated by MK...

Страница 29: ...potentiometer for a voltmeter reading of 0 375 V 4 Repeat step 2 This second adjustment of the atmosphere potentiometer will not cause more than a few millivolts of error in the reading at vacuum Table 6 1 General Symptoms Possible Causes Symptom Possible Causes Remedy Pressure readings are too low or too high 1 Contaminated sensor 2 Atm and Vacuum adjustments maybe incorrectly calibrated 1 Test a...

Страница 30: ...e set point value the normally open relay contact is open and the normally closed contact is closed If a power or sensor failure occurs the LED will turn OFF 6 7 Leak Detection Its inherent sensitivity to gas type makes the Series 907 Transducer useful for detecting leaks at rates greater than 10 4 std cc sec of helium in foreline and roughing systems It is a useful complement to a mass spectromet...

Страница 31: ...ld cause additional error from a shift in the sensor s output See Section 6 10 Replacing the Sensor 6 9 Test the Sensor 1 Disconnect the power cable from the 907 Transducer 2 Remove the two screws from the transducer electronics subassembly Gently pull the sensor tube away from the transducer assembly 3 With an ohmmeter check the resistance as specified in Table 6 2 and Figure 6 1 The resistance r...

Страница 32: ...t points 6 10 1 Calibrate the New Sensor Tube 1 Plug the new sensor tube into the electronics and replace the one screw through the half cover remaining being careful not to over tighten the screw which could crack the case 2 Install the partially assembled unit on a vacuum system connect the D sub connector and raise the system pressure to 760 Torr with air or nitrogen Make sure that the transduc...

Страница 33: ...ck 6 11 Bakeout the Sensor Tube See Section 6 10 to remove the transducer electronics case 1 Remove the two screws holding the sensor tube to the transducer electronics subassembly with a 1 Phillips head screwdriver Separate the electronics from the sensor 2 Bake the standard sensor tube to a maximum of 200 C and the CE marked model to a maximum of 100 C 3 Reassemble the transducer electronics on ...

Страница 34: ...09070018CE Transducer w 2 Setpoints KF16 109070019CE KF25 109070028CE 1 8 NPT M w 1 2 compression Seal 109070020CE 8 VCR F 109070021CE 1 1 3 CF 109070022CE 2 3 4 CF 109070023CE Ø15mm x 30mm tubing 109070025CE Ø18mm x 30mm tubing 109070026CE Seal Centering Ring Assemblies with Screen KF 16 100318601 with Screen KF 25 100318603 Adaptive SS Viton KF 16 to KF 10 100315821 Adaptive SS Viton KF 25 to KF...

Страница 35: ...oduction General Description 15 Improper Use 15 Intended Use 15 O Over Pressure Conditions 13 R Receiving Inspection 7 S Safety Cautions Warnings 9 10 Service 14 Guidelines 8 Service guidelines 27 Specifications 16 Storage 15 W Warning Notices Symbols 9 10 Warranty 7 Series 907 Analog Convection Transducer Index Instruction Manual 109070001 ...

Страница 36: ...Series 907 Analog Convection Transducer Instruction Manual 109070001 ...

Страница 37: ... ...

Страница 38: ...y 2020 Series 907 Instruction Manual Analog Convection Transducer Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Visit our website at www mksinst com ...

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