MKS 907 Series, Инструкция по эксплуатации

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3 Specifications
15
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
Chapter 3
3 Specifications
3.1 General Description
The MKS Series 907 Analog Convection Transducer is a compact, modular, convection enhanced
Pirani vacuum sensor/pressure switch with an integrated electronic control circuit.
The 907 Transducer is designed for applications which require pressure control in the range of
10
+3
to 10
-3
Torr. Its rapid response and wide measurement range provide the equipment designer
with maximum flexibility. Because it can operate autonomously or as part of a control system, it is
adaptable to many roles, including that For process control, the 907 Transducer is available with
one or two relay set points, each independently adjustable with its own potentiometer. LEDs
indicate the status of the set points.of a monitor or an alarm.
For process control, the 907 Transducer is available with one or two relay set points, each
independently adjustable with its own potentiometer. LEDs indicate the status of the set points.
Pressure and set points are read with a standard digital voltmeter or analog-to-digital converter and
computer.
3.2 Intended Use / Applications
• Measuring foreline and roughing pressures generated by mechanical vacuum pumps
• Controlling valves and pumps to automate system pump down using the relay setpoint(s)
• Sensing abnormal pressure and taking appropriate security measures using the relay setpoint(s)
• Controlling system pressure using the analog output as input to an automatic pressure controller
• Starting or stopping system processes using the relay setpoint(s)
• Measuring pressures of backfilled gases in the range of 10
-3
to 10
+3
Torr
• Activating high vacuum gauges in their operating range
3.2.1 Improper Use
• Removal of any factory installed components
• Modifying any factory installed components
• Removal of any labeling or warranty seals
• Operation of this device in any condensing vapor or liquid, or explosive environment
3.3 Storage
• Store the Mini-Ion gauge assembly indoors between -40
o
C to +70
o
C (-40
0
F to 158
0
F).
• Bag the assembly in a sealed or shrink wrapped bag with desiccant.
• All of the components should be bagged and boxed together along with the instructions for
future reference.