The analog pressure output (16 bit resolution) is based on the digital
pressure reading (PR1). Connect the signal to a differential input.
Do not connect the negative side of the analog output to
the power supply return or to any other ground. The
voltage drop from supply current will produce errors in the
analog output.
Converting voltage to pressure:
P = 10
(Vout – c)
V
out
= c + log
10
(P)
c
mbar
5.5
Torr
5.625
Pascal
3.5
Vout vs. Pressure (Torr / mbar, N
2
setup)
The transducer can provide other analog output characteristics than the
standard 1VDC/decade. Refer to Operation and installation manual.
Gas dependence
The combined sensor output provides gas independent measurement from
60 to 1500 torr. The MicroPirani™ sensor is based on measurement of
thermal conductivity and consequently its reading depends on gas type and
gas concentration. Refer to Operation and installation manual for gas
dependency data.
US & ASIA:
MKS Instruments, Inc., HPS™
Products, Inc.,
5330 Sterling Drive, Boulder, CO
80301, USA,
Phone: (303) 449-9861
EUROPE:
MKS Denmark ApS
Ndr. Strandvej 119G
DK3150 Hellebaek, Denmark
Phone: +45 44 92 92 99,
Email: [email protected]
