P/N: 100017411
Short form manual
REV: A, December 2009
Product: 901P-x1090-0072
Connector: 6 pin Hirschmann
Output: 19 (TPR280,TPR265)
RoHS Compliant
Measuring range (N
2
and Air):
1×10
-5
to 1500 Torr
MP Accuracy
5×10
-4
to 1×10
-3
Torr:
± 10%
of reading
1×10
-3
to 100 Torr:
± 5%
of reading
100 to Atm.:
± 25%
of reading
PZd Accuracy
(1)
-760 to +100 Torr:
± 1-10 % of reading
MP Repeatability
(2)
1×10
-3
to 100 Torr:
± 2%
of reading
Supply Voltage:
9 – 30 VDC
Power consumption:
< 1.2 Watt
Fuse (thermal recoverable):
200 mA
Analog output 1: (100 Ω impedance):
2.199 – 8.625 VDC
Analog output 1 resolution:
16 bit
Materials exposed to vacuum:
304 Stainless steel, Silicon
SiO
2
, Si
3
N
4
, gold, Viton
®
Low outgassing Epoxy resin
Internal volume:
KF16 flange
2.8 cm
3
KF16 long flange
6.7 cm
3
KF25 flange
3.6 cm
3
1/8” NPT , VCR8
3.1 cm
3
VCR4 flange
1.9 cm
3
Flange and Housing material:
Stainless steel 304
Weight (901P with KF16):
170 g
Climate category:
IP40
Operating temperature:
0 to 40
o
C
Bakeout temperature (Power off):
85
o
C
(1) Refer to Operation and Installation manual for Piezo accuracy details.
(2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at
ambient temperature after zero adjustment.
MKS Instruments HPS Products
www.mksinst.com
