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108196-P1

Rev C, 11/99

Instruction Manual

MKS Type 260 PS-3B

Power Supply

Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350

Fax: (978) 975-0093

E-mail:[email protected]

Web site: http://www.mksinst.com

Содержание 260 PS-3B

Страница 1: ...P1 Rev C 11 99 Instruction Manual MKS Type 260 PS 3B Power Supply Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksins...

Страница 2: ...charge to the purchaser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by thi...

Страница 3: ...108196 P1 Rev C 11 99 Instruction Manual MKS Type 260 PS 3B Power Supply...

Страница 4: ...any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instrume...

Страница 5: ...ions relatives la s curit 9 Symboles utilis s dans ce manuel d utilisation 9 Symboles apparaissant sur l unit 10 Mesures de s curit et pr cautions 11 Medidas de seguridad 13 S mbolos usados en este ma...

Страница 6: ......

Страница 7: ...dure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention to an o...

Страница 8: ...ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417...

Страница 9: ...e must be made by qualified service personnel only USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety preca...

Страница 10: ...install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or...

Страница 11: ...er eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger t hin E...

Страница 12: ...u IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg ngige do...

Страница 13: ...urch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal Vorsicht...

Страница 14: ...Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr aufgrund vo...

Страница 15: ...un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l appareil Elle attire l attention sur une...

Страница 16: ...017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternatif IEC...

Страница 17: ...RODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise des mesures de pr caution appropri es de la purge compl te de l appareil quand cela est n cessaire e...

Страница 18: ...augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants p n trer dans l unit avant ou pendant l utilisation Des produits contaminants tels qu...

Страница 19: ...to pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilidad de producir da os al equipo Pone...

Страница 20: ...7 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente continua y altern...

Страница 21: ...TE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o reparaci n deben ser rea...

Страница 22: ...xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de vac o para evitar...

Страница 23: ...MKS immediately If it is necessary to return the unit to MKS obtain an ERA Number Equipment Return Authorization Number from the MKS Service Center before shipping Please refer to the last page of th...

Страница 24: ...Chapter Two Introduction 18 This page intentionally left blank...

Страница 25: ...n female Amphenol connectors on the rear panel The mating male connector is available from MKS part number 112 3506 or Amphenol part number 126 217 Note The Reserved pin assignment refers to a pin tha...

Страница 26: ...Chapter Three Installation 20 This page intentionally left blank...

Страница 27: ...Standard calibration equipment located at all of our regional service centers Should any difficulties arise in the use of your Type 260 PS 3B instrument or to obtain information about companion produ...

Страница 28: ...Chapter Four Operation 22 This page intentionally left blank...

Страница 29: ...Weight 5 lbs 2 3 kg Environmental Specifications Maximum Operating Temperature 50 C 122 F Electrical Specifications Power Consumption 175 Watts 120V 60 Hz Input Voltage 85 264 VAC 47 440 Hz Output Vo...

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